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Power semiconductor device and method therefor

  • US 8,471,378 B2
  • Filed: 03/23/2006
  • Issued: 06/25/2013
  • Est. Priority Date: 01/10/2004
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a semiconductor material including a die;

    a mesh structure including a plurality of transistors, wherein each transistor of the plurality of transistors comprises a gate positioned over the semiconductor material, a drain region, and a source region wherein the gates of the plurality of transistors are coupled to each other and are disposed in closed shapes around respective source regions, and wherein the source regions and the drain regions are disposed on opposite sides of the die;

    a gate contact coupled to the mesh structure, wherein the gate contact includes a gate interconnection that is disposed external to the mesh structure and that completely surrounds the mesh structure, and wherein the gate contact is coupled to the gates of the plurality of transistors of the mesh structure via one or more gate pathways; and

    a dielectric structure extending from a first surface of the semiconductor material into the semiconductor material, wherein the gate contact is disposed over the dielectric structure.

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