MEMS micromirror and micromirror array
First Claim
Patent Images
1. A MEMS micromirror structure comprising:
- a movable structure mounted on a support structure by a resilient structure, and at least a portion of the movable structure comprising a micromirror;
an electrostatic actuator for pivotally driving the movable structure, the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the movable structure;
the resilient structure comprising a first portion and a second portion that is symmetrical to the first portion, each of the first portion and the second portion comprising an I beam connected to a composite structure.
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Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
102 Citations
12 Claims
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1. A MEMS micromirror structure comprising:
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a movable structure mounted on a support structure by a resilient structure, and at least a portion of the movable structure comprising a micromirror; an electrostatic actuator for pivotally driving the movable structure, the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the movable structure; the resilient structure comprising a first portion and a second portion that is symmetrical to the first portion, each of the first portion and the second portion comprising an I beam connected to a composite structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An array of MEMS micromirrors, and each micromirror comprising:
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a movable structure mounted on a support structure by a resilient structure, and at least a portion of the movable structure comprising a micromirror; an electrostatic actuator for pivotally driving the movable structure, and the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the movable structure; and the resilient structure comprising a first portion and a second portion that is symmetrical to the first portion, and each of the first portion and the second portion comprising an I beam connected to a composite structure.
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Specification