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MEMS micromirror and micromirror array

  • US 8,472,105 B2
  • Filed: 07/03/2012
  • Issued: 06/25/2013
  • Est. Priority Date: 06/01/2009
  • Status: Active Grant
First Claim
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1. A MEMS micromirror structure comprising:

  • a movable structure mounted on a support structure by a resilient structure, and at least a portion of the movable structure comprising a micromirror;

    an electrostatic actuator for pivotally driving the movable structure, the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the movable structure;

    the resilient structure comprising a first portion and a second portion that is symmetrical to the first portion, each of the first portion and the second portion comprising an I beam connected to a composite structure.

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