Apparatus for etching high aspect ratio features
First Claim
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1. A processing chamber comprising:
- a chamber body assembly having an interior volume;
a showerhead assembly coupled to a ceiling of the chamber body and having at least two fluidly isolated plenums formed therein, a region transmissive to an optical metrology signal defined through a ceramic plug, a first plurality of gas passages formed through the showerhead assembly fluidly coupling a first plenum of the at least two fluidly isolated plenums to the interior volume of the chamber body, wherein the first gas passages are distributed at a plurality radial distances from a center of the showerhead assembly, and a second plurality of gas passages formed through the showerhead assembly fluidly coupling a second plenum of the at least two fluidly isolated plenums to the interior volume of the chamber body, wherein the second gas passages are distributed at a plurality radial distances from the center of the showerhead assembly, wherein the showerhead assembly further includes a gas distribution plate facing the substrate support assembly fabricated from bulk Yttrium, the gas distribution plate having a plurality of apertures aligned with a plurality of apertures formed in the ceramic plug; and
a substrate support assembly disposed in the chamber body.
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Abstract
Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.
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Citations
22 Claims
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1. A processing chamber comprising:
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a chamber body assembly having an interior volume; a showerhead assembly coupled to a ceiling of the chamber body and having at least two fluidly isolated plenums formed therein, a region transmissive to an optical metrology signal defined through a ceramic plug, a first plurality of gas passages formed through the showerhead assembly fluidly coupling a first plenum of the at least two fluidly isolated plenums to the interior volume of the chamber body, wherein the first gas passages are distributed at a plurality radial distances from a center of the showerhead assembly, and a second plurality of gas passages formed through the showerhead assembly fluidly coupling a second plenum of the at least two fluidly isolated plenums to the interior volume of the chamber body, wherein the second gas passages are distributed at a plurality radial distances from the center of the showerhead assembly, wherein the showerhead assembly further includes a gas distribution plate facing the substrate support assembly fabricated from bulk Yttrium, the gas distribution plate having a plurality of apertures aligned with a plurality of apertures formed in the ceramic plug; and a substrate support assembly disposed in the chamber body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A processing chamber comprising:
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a chamber body assembly having an interior volume; a showerhead assembly coupled to a ceiling of the chamber body and having an inner gas flow plenum and an outer gas flow plenum, the plenums being fluidly isolated, and a region transmissive to an optical metrology signal, the transmissive region comprising a ceramic plug having a plurality of apertures, the showerhead assembly further comprising a gas distribution plate having a plurality of apertures aligned with the apertures formed in the ceramic plug; a substrate support assembly disposed in the chamber body and having at least two independently controllable laterally spaced temperature zones; an optical metrology system arranged to view the interior volume of the chamber body through the plurality of apertures of the ceramic plug and the plurality of apertures of the gas distribution plate of the showerhead assembly; a bias power source coupled to the substrate support assembly; at least two plasma power sources coupled to the substrate support assembly; a gas panel having a plurality of gas sources coupled to a mixing manifold, the mixing manifold fluidly coupled to the plenums of the showerhead assembly; and a least one direct injection gas source fluidly coupled to at least one of the plenums and bypassing the mixing manifold. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A processing chamber comprising:
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a chamber body assembly having an interior volume; a gas distribution plate disposed in the interior volume and having a lower side and an upper side, the gas distribution plate having an outer set of gas flow holes, and inner set of gas flow holes, and a set of optical metrology holes; an inner gas flow zone fluidly coupled to the interior volume through the first set of gas flow holes; an outer gas flow zone fluidly isolated from the inner zone and coupled to the interior volume through the second set of gas flow holes; a ceramic plug disposed on the upper side of the gas distribution plate and having a plurality of holes aligned with the optical metrology holes; a window aligned with the plug; a substrate support assembly disposed in the chamber body and having at least two independently controllable laterally spaced temperature zones, the substrate support assembly facing the lower side of the gas distribution plate; an optical metrology system arranged to view the interior volume of the chamber body through an optical passage defined by the window, the holes in the plug and optical metrology holes; a bias power source coupled to the substrate support assembly; and at least two plasma power sources coupled to the substrate support assembly. - View Dependent Claims (21, 22)
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Specification