Preferential dielectric gapfill

• US 8,476,142 B2
• Filed: 03/21/2011
• Issued: 07/02/2013
• Est. Priority Date: 04/12/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kweskin, Sasha, Hamana, Hiroshi, Gee, Paul Edward, Venkataraman, Shankar, Sapre, Kadar
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): JEFFERSON, QUOVAUNDA
• Application Number:
  US13/052,238
• Publication Number:
  US 20110250731A1
• Time in Patent Office: 834 Days
• Field of Search: 438/400, 438/424, 438/425, 438/427, 438/428, 438/435, 438/436, 438/437, 438/438, 438/442, 438/778, 438/784, 438/787, 438/788, 438/789, 438/790, 438/FOR.227, 438/FOR.221, 257/E21.273, 257/E21.278, 257/E21.494, 257/E21.24, 257/E21.261, 257/E21.262, 257/E21.2, 257/63, 257/E21.264, 257/E21.274, 257/E21.275, 257/E21.276, 257/E21.277, 257/E21.545, 257/E21.546, 257/E21.548
• US Class Current: 438/427
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/76229 Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches

Abstract

Aspects of the disclosure pertain to methods of preferentially filling narrow trenches with silicon oxide while not completely filling wider trenches and/or open areas. In embodiments, dielectric layers are deposited by flowing a silicon-containing precursor and ozone into a processing chamber such that a relatively dense first portion of a silicon oxide layer followed by a more porous (and more rapidly etched) second portion of the silicon oxide layer. Narrow trenches are filled with dense material whereas open areas are covered with a layer of dense material and more porous material. Dielectric material in wider trenches may be removed at this point with a wet etch while the dense material in narrow trenches is retained.

Claims

1. A method of processing a patterned substrate having a narrow trench and an open area, the method comprising:

flowing a silicon-containing precursor and ozone (O₃) into a substrate processing region containing the patterned substrate;

forming a dense portion of silicon oxide, filling the narrow trench and covering an exposed horizontal surface of the open area;

forming a porous portion of silicon oxide over the dense portion, wherein the porous portion predominantly forms above the narrow trench and not within the narrow trench; and

stripping the porous portion of the silicon oxide using a wet etch, wherein the open area is the bottom of a wide trench and the wide trench contain material from both the dense portion and the porous portion prior to the stripping operation, and wherein the operation of stripping the porous portion further comprises removing the dense portion of silicon oxide above the open area such that the open area is again exposed.

2. The method of claim 1 wherein the narrow trench is essentially filled by the dense portion of silicon oxide.

3. The method of claim 1 wherein the operation of stripping the porous portion further comprises removing some of the dense portion above the narrow trench but leaving the narrow trench essentially filled.

4. The method of claim 1 wherein a plane containing the exposed horizontal surface of the open area is coplanar with the top of the trench.

5. The method of claim 1 wherein a plane containing the exposed horizontal surface of the open area is recessed from a plane which includes the top of the trench.

6. The method of claim 5 wherein the plane containing the exposed horizontal surface of the open area is coplanar with the bottom of the trench.

7. The method of claim 1 wherein a wet etch rate of the porous portion of silicon oxide exceeds that of the dense portion by a multiplicative factor of 2, in an HF buffered oxide etch.

8. The method of claim 1 wherein a width of the narrow trench is less than 100 nm.

9. The method of claim 1 wherein a depth of the narrow trench is greater than 50 nm.

10. The method of claim 1 wherein the open area comprises a wide trench having a width greater than 100 nm.

11. The method of claim 1 further comprising the operation of flowing steam into the substrate processing region concurrently with the flows of the silicon-containing precursor and ozone.

12. The method of claim 1 wherein the silicon-containing precursor is TEOS.

13. The method of claim 1 wherein the porous portion is formed on the dense portion with essentially no intervening layer.