×

Apparatus and method for wafer level classification of light emitting device

  • US 8,476,918 B2
  • Filed: 04/28/2010
  • Issued: 07/02/2013
  • Est. Priority Date: 04/28/2010
  • Status: Active Grant
First Claim
Patent Images

1. A semiconductor test system, comprising:

  • a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs);

    a probe test card operable to test each test field of the wafer; and

    a light detector secured on the probe test card to collect light from a LED of the wafer and operable to move with the probe test card with respect to the wafer stage.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×