Apparatus and method for wafer level classification of light emitting device
First Claim
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1. A semiconductor test system, comprising:
- a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs);
a probe test card operable to test each test field of the wafer; and
a light detector secured on the probe test card to collect light from a LED of the wafer and operable to move with the probe test card with respect to the wafer stage.
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Abstract
The present disclosure provides a semiconductor test system. The semiconductor test system includes a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from a LED of the wafer.
62 Citations
20 Claims
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1. A semiconductor test system, comprising:
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a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector secured on the probe test card to collect light from a LED of the wafer and operable to move with the probe test card with respect to the wafer stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method, comprising:
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providing a semiconductor test system for testing a wafer, wherein the semiconductor test system includes; a wafer stage to hold a wafer; a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from the wafer; providing a wafer having a plurality of light emitting devices (LEDs) to the wafer stage; testing a die of a test field on the wafer using the light detector for optical and electrical performance of the die; and classifying the die into a bin according to the optical and electrical performance of the die. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A semiconductor test system, comprising:
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a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from a LED of the wafer, wherein the light detector is integrated with the probe test card and is configured to move relative to the probe test card. - View Dependent Claims (19, 20)
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Specification