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Transducer structure and method for MEMS devices

  • US 8,477,473 B1
  • Filed: 08/19/2010
  • Issued: 07/02/2013
  • Est. Priority Date: 08/19/2010
  • Status: Active Grant
First Claim
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1. An apparatus disposed upon a substrate member having a surface region, the apparatus comprising:

  • a movable base having at least one intermediate cavity disposed in an intermediate portion of the movable base structure, the at least one intermediate cavity having a cavity surface region;

    at least one intermediate anchor structure spatially disposed within the at least one intermediate cavity, the intermediate anchor structure(s) being coupled to at least one portion of the surface region;

    at least one intermediate spring structure coupled to at least one portion of the cavity surface region, the intermediate spring structure(s) being coupled to the intermediate anchor structure(s), the spring structure(s) being spatially oriented to be substantially 45 degrees or substantially (pi/4) radians to the edges of a die; and

    at least one capacitor element, the capacitor element(s) being spatially disposed within a vicinity of the intermediate cavity.

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