Microgyroscope for determining rotational movements about an X and/or Y and Z axis
First Claim
1. A microgyroscope for determining rotational movements about an x-axis and/or a y-axis, and a z-axis, the microgyroscope comprising:
- a substrate;
a plurality of oscillating masses comprising individual masses arranged around a central point on the substrate;
a plurality of springs for fastening the plurality of oscillating masses to the substrate;
a plurality of drive elements for inducing radial oscillation of the individual masses on an x-y plane, with respect to the central point, in order to generate Coriolis forces when the substrate rotates; and
a plurality of sensor elements for registering deflections of the individual masses caused due to the generated Coriolis forces;
wherein the individual masses are arranged in two groups comprising a first group and a second group, the masses of both groups being jointly induced by the plurality of drive elements to perform an oscillating primary movement in the x-y plane, the masses of the first group being arranged on the substrate so as to allow movements out of the x-y plane, the masses of the second group being arranged on the substrate so as to allow movements perpendicular to the oscillating primary movement in the x-y plane.
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Accused Products
Abstract
The invention relates to a microgyroscope for determining rotational movements about an x-axis and/or a y-axis and a z-axis. Oscillating masses are fastened to a substrate by springs. Drive elements vibrate individual masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements detect deflections of the masses on account of the Coriolis forces produced. The Individual masses are arranged in two groups that are jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses of the first group allow movements starting from the x-y plane, and the masses of the second group allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.
56 Citations
18 Claims
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1. A microgyroscope for determining rotational movements about an x-axis and/or a y-axis, and a z-axis, the microgyroscope comprising:
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a substrate; a plurality of oscillating masses comprising individual masses arranged around a central point on the substrate; a plurality of springs for fastening the plurality of oscillating masses to the substrate; a plurality of drive elements for inducing radial oscillation of the individual masses on an x-y plane, with respect to the central point, in order to generate Coriolis forces when the substrate rotates; and a plurality of sensor elements for registering deflections of the individual masses caused due to the generated Coriolis forces; wherein the individual masses are arranged in two groups comprising a first group and a second group, the masses of both groups being jointly induced by the plurality of drive elements to perform an oscillating primary movement in the x-y plane, the masses of the first group being arranged on the substrate so as to allow movements out of the x-y plane, the masses of the second group being arranged on the substrate so as to allow movements perpendicular to the oscillating primary movement in the x-y plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification