Effective algorithm for warming a twist axis for cold ion implantations

• US 8,481,969 B2
• Filed: 06/01/2011
• Issued: 07/09/2013
• Est. Priority Date: 06/04/2010
• Status: Active Grant

• Current Assignee: Axcelis Technologies Incorporated
• Original Assignee: Axcelis Technologies Incorporated
• Inventors: Ota, Kan, Lee, William Davis
• Primary Examiner(s): Kim, Robert
• Assistant Examiner(s): STOFFA, WYATT A
• Application Number:
  US13/150,822
• Publication Number:
  US 20110297845A1
• Time in Patent Office: 769 Days
• Field of Search: 250/453.11, 250/492.1
• US Class Current: 250/453.11
• CPC Class Codes: H01J 2237/002 Cooling arrangements of objects being observed or treated H01J2237/2001
• CPC Class Codes: H01J 2237/166 Sealing means
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 2237/2005 Seal mechanisms
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 2237/31701 Ion implantation
• CPC Class Codes: H01J 37/18 Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel vacuum locks for electron-beam tubes in general H01J29/865
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/3171 for ion implantation plasma immersion ion implantation H01J37/32412

Abstract

A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

Claims

1. A method for warming a rotational interface in an ion implantation environment, the method comprising:

providing a scan arm configured to rotate about a first axis and an end effector rotatably coupled to the scan arm via a twist motor and configured to selectively secure a workpiece, wherein the end effector is further configured to rotate about a second axis having a bearing and a seal associated with the second axis and twist motor, wherein the first axis and second axis are positioned a predetermined distance apart;

activating the twist motor;

performing one of reversing the rotation of the twist motor after a predetermined time and reversing the rotation of the twist motor when the twist motor faults;

determining whether the rotation of the end effector about the second axis is acceptable; and

reciprocating the scan arm about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

2. The method of claim 1, wherein one or more of the bearing and seal comprise a ferrofluid.

3. The method of claim 1, wherein reversing the rotation of the twist motor after a predetermined time comprises successively incrementing a duration of the predetermined time.

4. The method of claim 1, wherein the rotation of the end effector about the second axis is determined to be acceptable when the end effector rotates a predetermined amount.

5. The method of claim 4, wherein the predetermined amount comprises a rotation about the second axis of approximately 30 degrees.

6. The method of claim 1, further comprising translating the scan arm in a direction generally perpendicular to the first axis, wherein reciprocating the scan arm about the first axis generally avoids an intersection of the end effector with a process medium.

7. The method of claim 6, wherein the process medium comprises an ion beam.

8. The method of claim 1, wherein reciprocating the scan arm about the first axis is performed concurrently with a period of time when the ion implantation is not being performed, therein maintaining a relatively low viscosity of the bearing and/or seal.

9. A method for warming a rotational interface in a chilled ion implantation environment, the method comprising:

providing an ion implantation system configured to produce an ion beam;

providing a workpiece scanning system configured to selectively pass a workpiece through the ion beam, wherein the workpiece scanning system comprises a scan arm configured to rotate about a first axis and an end effector rotatably coupled to the scan arm at a predetermined distance from the first axis, wherein the end effector is configured to selectively clamp the workpiece thereto, and wherein the end effector is configured to rotate about a second axis;

chilling the end effector, wherein one or more of a bearing and a seal associated with the rotation of the end effector about the second axis are chilled, wherein one or more of the bearing and seal comprise a ferrofluid, and wherein chilling the end effector decreases an ability of the end effector to rotate about the second axis; and

rotating the scan arm about the first axis after chilling the end effector, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

10. A method for warming a rotational interface in an ion implantation environment, the method comprising:

providing a scan arm having an end effector rotatably coupled thereto via a twist motor and configured to selectively secure a workpiece, said end effector having a bearing and a seal associated with the twist motor, wherein one or more of the bearing and seal comprise a ferrofluid;

activating the twist motor to rotate said end effector in a first direction; and

selectively reversing the rotation of the twist motor after a predetermined time in order to maintain the rotatable coupling between said scan arm and said end effector, wherein activating the twist motor and reversing the direction of the twist motor are performed for a selected period of time for maintaining a predetermined viscosity of the ferrofluid.

11. A method for ion implantation, the method comprising:

translating a workpiece across an ion beam via an end effector rotatably coupled to a scan arm;

rotating the end effector about a first axis via a first axis motor, wherein a bearing positioned along the first axis rotatably couples the end effector to the scan arm, and a magnetic liquid seal positioned along the first axis further provides a protective barrier for the bearing; and

providing a predetermined amount of heat to the bearing and magnetic liquid seal via selectively rotating the end effector about the first axis, therein maintaining a minimum propensity of the end effector to rotate about the first axis, wherein selectively rotating the end effector about the first axis comprises a selective rotation and counter-rotation of the end effector about the first axis based, at least in part, on feedback from the first axis motor and a predetermined degree of rotation of the end effector about the first axis.

12. The method of claim 11, further comprising chilling the end effector, therein increasing a viscosity of the magnetic liquid seal, and wherein the predetermined amount of heat is increased to counteract the increase in viscosity of the magnetic liquid seal.

13. A method for scanning a workpiece in an ion implantation system, the method comprising:

securing a workpiece to an end effector rotatably coupled to a scan arm via a twist motor, a bearing, and a seal positioned along a twist axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and end effector;

translating the workpiece across an ion beam; and

selectively rotating and counter-rotating the end effector about the twist axis, wherein a predetermined amount of heat is provided to the bearing and seal, therein increasing a propensity of the end effector to rotate about the twist axis;

receiving feedback from the twist motor, wherein the selective rotation and counter-rotation of the end effector is based, at least in part, on the feedback from the twist motor; and

reciprocating the scan arm about a first axis when the feedback from the twist motor indicates that the rotation and counter-rotation of the end effector is unacceptable, wherein the first axis and twist axis are separated by a predetermined distance, and wherein inertia of the end effector causes a rotation of the end effector about the twist axis.

14. The method of claim 13, wherein the seal comprises a magnetic liquid rotary seal assembly configured to provide a rotary, hermetic seal between the external environment and internal environment.

15. The method of claim 14, wherein the twist motor comprises a rotor configured to rotate about the twist axis and a stator that is generally fixed with respect to the scan arm, and wherein the magnetic liquid rotary seal comprises a ferrofluid disposed in an annular region between the rotor and stator.

16. The method of claim 13, wherein the end effector comprises a chilled electrostatic chuck configured to selectively electrostatically clamp the workpiece to a clamping surface thereof and to selectively cool the workpiece.