Dielectric coated metal diffraction grating with high reflection resistance to a femtosecond mode flow

• US 8,482,855 B2
• Filed: 04/28/2010
• Issued: 07/09/2013
• Est. Priority Date: 04/29/2009
• Status: Active Grant

• Current Assignee: HORIBA Jobin Yvon S.A.S.
• Original Assignee: HORIBA Jobin Yvon S.A.S.
• Inventors: Desserouer, Frederic
• Primary Examiner(s): Hellner, Mark
• Assistant Examiner(s): Diacou, Ari M
• Application Number:
  US13/318,170
• Publication Number:
  US 20120093191A1
• Time in Patent Office: 1,168 Days
• Field of Search: 359/574, 359/576
• US Class Current: 359/576
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength
• CPC Class Codes: G02B 5/1861 Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: H01S 3/0057 Temporal shaping, e.g. pulse compression, frequency chirping soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108
• CPC Class Codes: H01S 3/08009 using a diffraction grating
• CPC Class Codes: H01S 3/235 Regenerative amplifiers
• CPC Class Codes: Y10T 428/12472 Microscopic interfacial wave or roughness
• CPC Class Codes: Y10T 428/12604 Film [e.g., glaze, etc.]

Abstract

A reflection metal diffraction grating has a high diffraction efficiency for diffracting femtosecond mode laser pulses, and includes a substrate with a set of lines having a pitch A. The substrate is made of metal or covered with a metal layer, and the grating includes a thin film of dielectric material having a thickness, the dielectric film covering the metal surface of the lines of the grating, the grating being suitable for receiving a pulsed electromagnetic lightwave in a femtosecond mode. The thickness of the dielectric thin film is lower than 50 nm, and is suitable for reducing by a third order factor at least the maximum of the square of the electric field of the electromagnetic lightwave on the metal surface and in the metal layer of the substrate as compared to the square of the electric field at the surface of a metal grating not having a dielectric thin film.

Claims

1. A reflection metallic diffraction grating (6) having a very high diffraction efficiency for diffracting laser pulses in the femtosecond regime, said grating comprising:

a substrate (2) with a set of lines (1) having a pitch Λ

, said substrate (2) being covered with a metallic layer (2′

), and

said grating (6) comprising a thin layer (4) of a dielectric material having a thickness e, said thin dielectric layer (4) covering the metallic surface (12) of the lines of the grating,

wherein said grating (6) is suitable for receiving a pulsed electromagnetic lightwave in the femtosecond regime,

wherein the thickness e of the thin dielectric layer (4) is lower than 50 nm, the thickness e being suitable for reducing by at least a factor three the maxima of the square of the electric field of the electromagnetic lightwave on the metallic surface (12) and in the metallic layer of the substrate (2, 2′

) compared with the square of the electric field at the surface of a metallic grating (5) having no thin dielectric layer, in order to improve the laser flow resistance of the diffraction grating in the femtosecond regime;

wherein the metallic layer (2′

) is a gold metallic layer (2′

).

2. A diffraction grating (6) according to claim 1, wherein the diffraction grating (6) is a TM polarized grating.

3. A diffraction grating (6) according to claim 1, wherein the lines (1) of the grating have, in a plane transverse to the direction of the lines (1), a sinusoidal, pseudo-sinusoidal, triangular, rectangular, trapezoidal or pseudo-trapezoidal profile.

4. A diffraction grating (6) according to claim 1, wherein the thin dielectric layer (4) has a thickness e that is smaller than the depth of modulation h of the lines (1) of the grating.

5. A diffraction grating (6) according to claim 1, wherein the thin dielectric layer (4) is made of silica (SiO₂).

6. A diffraction grating (6) according to claim 1, wherein the dielectric layer (4) is transparent over the optical bandwidth [λ

±

Δ

λ

/2] and the thickness e of the thin dielectric layer (4) is lower than or equal to the thickness for which the diffraction efficiency in TM polarization is attenuated by a coefficient α

(comprised between 0 and

     1), compared with the diffraction efficiency of a metallic grating (5) having lines (1) with the same profile and having no thin dielectric layer (4).

7. A diffraction grating according to claim 6, wherein the diffraction efficiency in TM polarization is higher than 90% over the optical bandwidth [λ

±

Δ

λ

/2].

8. A chirped pulse amplification (CPA) system comprising one stage for time spreading the laser pulses, one or more amplification stages, and one compression stage for time compressing the amplified pulses, wherein the compression stage includes at least one diffraction grating (6) according to claim 1.

10. A diffraction grating (6) according to claim 2, wherein the lines (1) of the grating have, in a plane transverse to the direction of the lines (1), a sinusoidal, pseudo-sinusoidal, triangular, rectangular, trapezoidal or pseudo-trapezoidal profile.

9. A method for improving the damage threshold of a metallic diffraction grating to an intense laser beam in the femtosecond regime, comprising:

selecting a diffraction grating of very high reflection diffraction efficiency comprising a substrate (2) with a set of lines (1) having a pitch Λ

, said substrate (2) being covered with a gold metallic layer (2′

), and

depositing a thin dielectric layer (4) on the metallic surface (12) of the grating lines, said thin dielectric layer (4) being transparent over the spectral bandwidth of the femtosecond pulses and the thickness e of the dielectric layer (4) being suitable for reducing by at least a factor three the maxima of the electric field of the electromagnetic lightwave on the metallic surface (12) and in the metallic layer (2, 2′

), compared with the electric field at the surface of a metallic grating (5) having no thin dielectric layer.