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Photopolymerizable silicone materials forming semipermeable membranes for sensor applications

  • US 8,486,615 B2
  • Filed: 06/21/2005
  • Issued: 07/16/2013
  • Est. Priority Date: 08/11/2004
  • Status: Expired due to Fees
First Claim
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1. A method comprising:

  • (1) applying a photopatternable semi-permeable silicone resin composition to a surface in a sensing device to form a film, wherein the sensing device comprises a silicon wafer having a silicon dioxide layer on its surface,(2) photopatterning the film by a process comprising exposing the film to radiation through a photomask without using a photoresist to produce an exposed film;

    (3) removing regions of the non-exposed film with a developing solvent to form a patterned semi-permeable film; and

    (4) heating the patterned film,wherein the photopatternable semi-permeable silicone resin composition comprises;

    (a) a curable silicone resin and(b) a photoinitiator,wherein the curable silicone resin is selected from an acrylic functional silicone resin of the formula
    {[(CH2

    CR13COOR14)SiO3/2]h[R15SiO3/2]i}j, whereeach R13 is independently a hydrogen atom or methyl group, each R14 is independently a hydrocarbylene group having 1 to 8 carbon atoms, each R15 is independently an alkyl, cyclic alkyl, aryl or alkenyl group having 1 to 8 carbon atoms, wherein h satisfies the inequality 0.05<

    h<

    0.95, wherein i satisfies the inequality 0.05<

    i<

    0.95, h+i=1, and j is a value sufficient to give the acrylic functional silicone resin a weight average molecular weight (Mw) of 3,000 to 100,000 grams per mole in terms of polystyrene by gel permeation chromatography, a vinyl ether functional silicone resin, an epoxy functional silicone resin, or a combination thereof.

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