Particle beam microscope and method for operating the particle beam microscope

• US 8,487,252 B2
• Filed: 09/29/2011
• Issued: 07/16/2013
• Est. Priority Date: 09/29/2010
• Status: Active Grant

• Current Assignee: Carl Zeiss Microscopy GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Diemer, Simon, Mantz, Hubert, Paluszynski, Jaroslaw
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US13/249,006
• Publication Number:
  US 20120074317A1
• Time in Patent Office: 656 Days
• Field of Search: 250/311, 250/310, 250/306, 250/307, 250/396.R, 250/398
• US Class Current: 250/311
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube image data processing or generation, in general G06T
• CPC Class Codes: H01J 37/226 Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.

Claims

1. A method of operating a particle beam microscope, which comprises an objective lens having an object region, wherein the method comprises:

detecting at least one of light rays which emanate from a structure and particles which emanate from the structure, wherein the structure comprises at least one of at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope;

generating a surface model of the structure depending on the at least one of the detected light rays and the detected particles;

determining a position and an orientation of the surface model of the structure relative to the object region;

determining a measurement location relative to the surface model of the structure; and

positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.

2. The method according to claim 1, further comprising:

generating a surface model of a microscope portion of the particle beam microscope;

combining the surface model of the structure and the surface model of the microscope portion to generate a combined surface model; and

calculating a distance between the surface model of the structure and the surface model of the microscope portion depending on the combined surface model;

wherein the positioning of the object comprises monitoring the distance.

3. The method according to claim 1, wherein the determining of the position and orientation of the surface model of the structure relative to the object region comprises:

generating a digital image from at least a portion of the structure; and

comparing the surface model of the structure with the digital image.

4. The method according to claim 1, further comprising:

determining a second measurement location relative to the surface model of the structure and relative to the measurement location; and

repositioning the object depending on the measurement location and the second measurement location.

5. The method according to claim 1, further comprising:

generating a particle microscopic image, which represents at least a portion of the measurement location;

identifying a region of the particle microscopic image; and

adjusting at least one of a position and an orientation of the object depending on the identified region.

6. The method according to claim 1, wherein the detecting of the at least one of the light rays and the particles comprises detecting the at least one of the light rays and the particles at a plurality of different focus distances.

7. The method according to claim 1, further comprising:

generating digital image data, which represent at least a portion of the structure depending on the at least one of the detected light rays and the detected particles;

wherein the generating of the surface model of the structure is performed depending on the digital image data.

8. The method according to claim 7, wherein the generating of the digital image data comprises generating the digital image data from at least two different imaging directions.

9. A machine-readable medium having stored thereon a program code which, when loaded and executed in a computer system, is adapted to perform the method according to claim 1.

10. A method of operating a particle beam microscope, wherein the method comprises:

detecting at least one of light rays, which emanate from a structure and particles, which emanate from the structure, wherein the structure comprises at least one of at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope;

generating a surface model of the structure depending on the at least one of the detected light rays and the detected particles;

generating a surface model of a microscope portion of the particle beam microscope;

combining the surface model of the structure and the surface model of the microscope portion to generate a combined surface model;

determining a distance between the surface model of the structure and the surface model of the microscope portion depending on the combined surface model; and

monitoring the distance during a positioning of the object.

11. The method according to claim 10, wherein the detecting of the at least one of the light rays and the particles comprises detecting the at least one of the light rays and the particles at a plurality of different focus distances.

12. The method according to claim 10, wherein the generating of the surface model of the structure further comprises:

generating a plurality of stacks of image regions depending on the at least one of the detected light rays and the detected particles at the plurality of focus distances;

wherein image regions, which are part of a same stack of the plurality of stacks represent a same portion of the structure;

determining for each stack of the plurality of stacks an in-focus region depending on the image regions of the respective stack.

13. The method according to claim 12, wherein each image region of at least a portion of the generated image regions is an isolated pixel cluster.

14. The method according to claim 10, further comprising:

generating digital image data, which represent at least a portion of the structure depending on the at least one of the detected light rays and the detected particles;

wherein the generating of the surface model of the structure is performed depending on the digital image data.

15. The method according to claim 14, wherein the generating of the digital image data comprises generating the digital image data from at least two different imaging directions.

16. The method according to claim 10, wherein the detecting of the light rays comprises:

detecting of a laser beam, which has been reflected at the structure.

17. The method according to claim 10, wherein the generating of the surface model of the structure comprises:

generating a first surface model of a first portion of the structure in a first position of the structure relative to at least one of a light-sensitive image acquisition device and the objective lens;

generating a second surface model of a second portion of the structure in a second position of the structure relative to the at least one of the image acquisition device and the objective lens; and

combining the first surface model and the second surface model.

18. A machine-readable medium having stored thereon a program code which, when loaded and executed in a computer system, is adapted to perform the method according to claim 10.

19. A particle beam microscope system, comprising:

an objective lens, having an object region;

an object holder which is configured such that an object is mountable on the object holder;

a positioning device, which is configured to adjust at least one of a position and an orientation of the object holder relative to the object region;

a detecting device, which is configured to detect at least one of light rays, which emanate from a structure, and particles, which emanate from the structure, wherein the structure comprises at least one of at least a portion of a surface of the object holder and at least a portion of a surface of the object;

a computer, which is configured for signal communication with the positioning device and the detecting device, wherein the computer is further configured to;

generate a surface model of the structure depending on the at least one of the detected light rays and the detected particles;

determine a position and an orientation of the surface model of the structure relative to the object region;

determine a measurement location relative to the surface model of the structure; and

to

position the object depending on the determined surface model of the structure, the determined position and orientation of the surface model of the structure and the determined measurement location.

20. The particle beam microscope system according to claim 19, wherein the computer is further configured to:

generate a surface model of a microscope portion of the particle beam microscope system;

combine the surface model of the structure and the surface model of the microscope portion to generate a combined surface model;

determine a distance between the surface model of the structure and the surface model of the microscope portion depending on the combined surface model; and

to

monitor the distance during a positioning of the object.

21. The particle beam microscope system according to claim 19, wherein the particle beam microscope system is configured to generate a digital image depending on the at least one of the detected light rays and the detected particles, wherein the digital image represents at least a portion of the structure;

and

wherein the computer is further configured to determine the position and the orientation of the surface model of the structure relative to the object region depending on a comparison of the surface model of the structure with the digital image.

22. The particle beam microscope system according to claim 19, wherein the detecting device is configured to generate digital image data depending on the at least one of the detected light rays and the detected particles;

wherein the computer is configured to determine the surface model of the structure depending on the digital image data.

23. The particle beam microscope system according to claim 22, wherein the detecting device is further configured to generate the digital image data from at least two viewpoint positions.

24. A particle beam microscope system, comprising:

an objective lens, having an object region;

an object holder, which is configured such that an object is mountable on the object holder;

a positioning device, which is configured to adjust at least one of a position and an orientation of the object holder relative to the object region;

a detecting device, which is configured to detect at least one of light rays which emanate from a structure and particles, which emanate from the structure,

wherein the structure comprises at least one of at least a portion of a surface of the object holder and at least a portion of a surface of the object;

a computer, which is configured for signal communication with the positioning device and with the detecting device;

wherein the computer is configured to;

generate a surface model of the structure depending on the at least one of the detected light rays and the detected particles;

generate a surface model of a microscope portion of the particle beam microscope system;

combine the surface model of the structure and the surface model of the microscope portion to generate a combined surface model;

determine a distance between the surface model of the structure and the surface model of the microscope portion depending on the combined surface model; and

to

monitor the distance during a positioning of the object.

25. The particle beam microscope system according to claim 24, wherein the detecting device is configured to generate digital image data depending on the at least one of the detected light rays and the detected particles;

wherein the computer is configured to determine the surface model of the structure depending on the digital image data.

26. The particle beam microscope system according to claim 25, wherein the detecting device is further configured to generate the digital image data from at least two viewpoint positions.