Sensor

• US 8,487,260 B2
• Filed: 10/20/2006
• Issued: 07/16/2013
• Est. Priority Date: 01/26/2005
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Lane, William A., Hynes, Eamon, Coyne, Edward John
• Primary Examiner(s): Bryant, Casey
• Application Number:
  US11/584,725
• Publication Number:
  US 20070138395A1
• Time in Patent Office: 2,461 Days
• Field of Search: 250/338.1, 250/338.4, 250339-33903, 250/353
• US Class Current: 250/339.01
• CPC Class Codes: G01J 1/04 Optical or mechanical part supplementary adjustable parts
• CPC Class Codes: G01J 1/0411 using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
• CPC Class Codes: G01J 5/0014 for sensing the radiation from gases, flames
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/0225 Shape of the cavity itself or of elements contained in or suspended over the cavity
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/045 Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements getter arrangements per se H01L23/26 and H01L21/3221
• CPC Class Codes: G01J 5/06 Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity for adjusting of solid angle of collected radiation G01J5/07; means for wavelength selection G01J5/0801
• CPC Class Codes: G01J 5/064 Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
• CPC Class Codes: G01J 5/07 Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position optical collimating elements G01J5/0806
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0803 Arrangements for time-dependent attenuation of radiation signals
• CPC Class Codes: G01J 5/0806 Focusing or collimating elements, e.g. lenses or concave mirrors
• CPC Class Codes: G01J 5/0846 having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
• CPC Class Codes: G01J 5/10 using electric radiation detectors
• CPC Class Codes: G01J 5/24 Use of specially adapted circuits, e.g. bridge circuits
• CPC Class Codes: H01L 2924/16235 Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
• CPC Class Codes: H01L 31/0203 Containers; Encapsulations , e.g. encapsulation of photodiodesfor photovoltaic devices H01L31/048; for organic photosensitive devices H10K30/80
• CPC Class Codes: H01L 31/02164 for shielding light, e.g. light blocking layers, cold shields for infrared detectors
• CPC Class Codes: H01L 31/0232 Optical elements or arrangements associated with the device H01L31/0236 takes precedence; for photovoltaic cells H01L31/054; for photovoltaic modules H02S40/20
• CPC Class Codes: H01L 31/02325 : the optical elements not being integrated nor being directly associated with the device

Abstract

The invention provides a sensor including a first sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the first sensor element, the at least one optical element being configured to guide incident radiation on the cap to the first sensor element. The sensor also includes a reference sensor element whose output can be used to reference the output of the first sensor element.

Claims

1. An electromagnetic radiation sensor comprising:

a first sensor element and a second sensor element formed in a first substrate, and

a first cap and a second cap formed in a second substrate, the first and second substrates being arranged relative to each other such that the first cap overlies the first sensor element, and the second cap overlies the second sensor element, thereby defining first and second cells, respectively, wherein the first cell provides an output based on a first response characteristic and the second cell provides an output based on a second response characteristic,

wherein the first cap is configured to pass a first amount of an ambient radiation through the first cap,

wherein the second cap is configured to pass a second amount of the ambient radiation through the second cap, wherein the second amount of the ambient radiation is a known fraction of the first amount of ambient radiation, and

wherein the second amount is less than the first amount, and is greater than zero.

2. The sensor as claimed in claim 1 wherein the response characteristics of each of the first and second cells are a function of at least one of the following properties of each cell:

a) the optical response characteristic,

b) the electrical response characteristic,

c) the thermal response characteristic,

d) the nature of the radiation source used to illuminate each of the first and second cells.

3. The sensor of claim 1 wherein the cap for the first sensor element includes an optical element configured to provide a focusing of the incident radiation onto the first sensor element.

4. The sensor as claimed in claim 1 wherein the arrangement of the first and second substrates relative to one another define a cavity between each of the caps and their respective sensor elements.

5. The sensor as claimed in claim 1 wherein the first and second sensor elements are infra-red sensor elements.

6. The sensor as claimed in claim 4, wherein the cavities are provided at a pressure lower than ambient pressure.

7. The sensor as claimed in claim 4, wherein the cavities are populated with a gaseous composition selected for the application with which the sensor is to be used.

8. The sensor as claimed in claim 1 wherein the caps for the first and second element are formed in the same second substrate, the sensor additionally comprising an outer cap, the outer cap being orientated over the second substrate, the outer cap including an optical element.

9. The sensor as claimed in claim 1 wherein each of the first and second substrates is arranged relative to one another such that each of the caps are formed by side walls extending upwardly from the first substrate and supporting a roof therebetween, the roof being in a plane substantially parallel to the sensor elements.

10. The sensor as claimed in claim 9 wherein each of the first and second sensor elements are adjacent to one another, the caps provided thereabove sharing a common central column that extends downwardly from the roof, thereby defining chambers for each of the first and second sensor elements.

11. The sensor as claimed in claim 10 wherein the central column does not extend fully from the roof to the first substrate, such that a gap is defined between a lower surface of the column and an upper surface of the first substrate.

12. The sensor as claimed in claim 1 wherein each of the first and second sensor elements is provided as a bolometer.

13. The sensor as claimed in claim 1 wherein at least a portion of one of the first and second sensor elements are suspended over a cavity defined in the first substrate, the cavity providing thermal insulation between the first substrate and the sensor element.

14. The sensor as claimed in claim 1 wherein the first and second sensor elements are arranged in a Wheatstone bridge configuration.

15. The sensor as claimed in claim 1, wherein the trench arrangement is located around the one or more of the sensor elements so as to define a thermal barrier around the one or more of the sensor elements.

16. The sensor as claimed in claim 1, wherein the trench arrangement is located between the one or more of the sensor elements and a heat source provided on the first substrate.

17. The sensor as claimed in claim 1 further including a plurality of die temperature sensors, the plurality of the die temperature sensors providing an output indicative of the temperature of the die on which the sensor is located.

18. A sensor array including a plurality of sensors, each of the sensors having an active sensor element and a reference sensor element, the active sensor element being formed in a first substrate and having an optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a first cap over the sensor element, the optical element being configured to guide incident ambient radiation through the first cap to the sensing element, the reference sensor element also being formed in the first substrate and having a second cap formed in the second substrate, the first and second substrates being configured relative to one another such that the second cap is located over the reference sensor element, the second cap serving to pass a modified intensity of the incident ambient radiation therethrough to the reference sensor element relative to the intensity of the incident ambient radiation passing through the first cap such that the active and reference sensors have a different response characteristic, wherein the modified intensity is a known fraction of an intensity of the incident ambient radiation,

wherein the modified intensity is less than the intensity of the incident ambient radiation, and is greater than zero.

19. The sensor array of claim 18 wherein an output of the sensor array defines an image plane.

20. An electromagnetic radiation sensor fabricated in a semiconductor process, the sensor comprising:

first and second sensing elements formed in a first substrate, the first and second sensing elements being provided with first and second caps, respectively, defined thereabove, the first and second caps being formed in a second substrate and being mountable onto the first substrate,

wherein the first cap formed over the first sensing element allows a transmission of an ambient radiation through the first cap onto the first sensing element, and

wherein the second cap formed over the second sensing element partially blocks the transmission of the ambient radiation through the second cap onto the second sensing element so as to pass a reduced intensity of the ambient radiation therethrough onto the second sensing element relative to the intensity of the ambient radiation transmitted through the first cap onto the first sensing element, wherein the reduced intensity is a known fraction of an intensity of the ambient radiation,

wherein the reduced intensity of the ambient radiation is greater than zero.

21. The electromagnetic radiation sensor of claim 20, wherein the first cap defines a first controlled volume above the first sensing element, and wherein the second cap defines a second controlled volume above the second sensing element.

22. The electromagnetic radiation sensor of claim 21, wherein the first controlled volume is separate from the second controlled volume.