Nano electromechanical integrated-circuit bank and switch
First Claim
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1. A bank of integrated circuit filters, the bank comprising:
- a silicon substrate;
a sacrificial layer; and
a device layer including at least two resonators, wherein the at least two resonators include sub-micron excitable elements and wherein the at least two resonators possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements,the bank of integrated circuit filters further comprising a first level of switches that connect to a second level of switches that connect to a filter in the bank of integrated circuit filters.
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Abstract
A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.
50 Citations
12 Claims
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1. A bank of integrated circuit filters, the bank comprising:
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a silicon substrate; a sacrificial layer; and a device layer including at least two resonators, wherein the at least two resonators include sub-micron excitable elements and wherein the at least two resonators possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements, the bank of integrated circuit filters further comprising a first level of switches that connect to a second level of switches that connect to a filter in the bank of integrated circuit filters. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification