Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine

• US 8,488,100 B2
• Filed: 10/08/2010
• Issued: 07/16/2013
• Est. Priority Date: 04/11/2003
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Binnard, Michael
• Primary Examiner(s): Nguyen, Hung Henry
• Assistant Examiner(s): KREUTZER, COLIN WRIGHT
• Application Number:
  US12/923,822
• Publication Number:
  US 20110025999A1
• Time in Patent Office: 1,012 Days
• Field of Search: 355/30, 355/53, 355/72, 355/77
• US Class Current: 355/30
• CPC Class Codes: G03B 27/52 Details
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask

Abstract

An immersion exposure apparatus exposes a substrate with a light beam. The apparatus includes an optical member through which the light beam is irradiated onto the substrate, a substrate table which holds the substrate and is movable relative to the optical member, and a pad member which is movable relative to the substrate table and is positionable opposite to the optical member in place of the substrate table to substantially maintain an immersion liquid in a space under the optical member when the substrate table is moved away from under the optical member. The substrate table and the pad member are relatively tilted and/or moved in a vertical direction before the substrate table is moved away from under the optical member.

Claims

1. An immersion exposure apparatus which exposes a substrate with a light beam, the apparatus comprising:

an optical member through which the light beam is irradiated onto the substrate;

a substrate table which holds the substrate and is movable relative to the optical member; and

a pad member which is movable relative to the substrate table and is positionable opposite to the optical member in place of the substrate table to substantially maintain an immersion liquid in a space under the optical member when the substrate table is moved away from under the optical member,

wherein the substrate table and the pad member are relatively tilted and/or moved in a vertical direction before the substrate table is moved away from under the optical member.

2. An immersion exposure apparatus according to claim 1, wherein the substrate table and the pad member are positioned in a state of being arranged in close proximity to each other so that the immersion liquid is substantially maintained at a space that is positioned directly below the optical member.

3. An immersion exposure apparatus according to claim 2, wherein the substrate table and the pad member are relatively moved toward each other while the substrate table is positioned opposite to the optical member so that the substrate table and the pad member are arranged in close proximity to each other.

4. An immersion exposure apparatus according to claim 1, wherein the substrate table and the pad member transit from a first state in which the immersion liquid is maintained in a space between the optical member and the substrate table to a second state in which the immersion liquid is maintained in a space between the optical member and the pad member.

5. An immersion exposure apparatus according to claim 4, wherein the substrate table and the pad member form a substantially continuous surface during the transition.

6. An immersion exposure apparatus according to claim 1, wherein the pad member is positioned away from under the optical member during exposure of the substrate held by the substrate table.

7. An immersion exposure apparatus according to claim 1, wherein the substrate table and the pad member are provided on a substrate stage.

8. An immersion exposure apparatus according to claim 4, further comprising a substrate exchange system configured to exchange a substrate on the substrate table while in the second state.

9. An immersion exposure apparatus according to claim 8, further comprising an alignment system configured to perform alignment of a substrate that is to be held on the substrate table by the exchange.

10. An immersion exposure apparatus which exposes a substrate with a light beam, the apparatus comprising:

an optical member through which the light beam is irradiated onto the substrate;

a substrate table which holds the substrate and is movable relative to the optical member; and

a pad member which is movable relative to the substrate table,

wherein the substrate table and the pad member are relatively tilted and/or moved in a vertical direction prior to a replacement of the substrate table with the pad member, the substrate table and the pad member transiting from a first state to a second state in the replacement, the first state in which an immersion liquid is maintained in a space between the optical member and the substrate table, the second state in which the immersion liquid is maintained in a space between the optical member and the pad member, the immersion liquid being substantially maintained at a space that is positioned directly below the optical member during the replacement.

11. An immersion exposure apparatus according to claim 10, wherein the substrate table and the pad member are positioned in a state of being arranged in close proximity to each other so that the immersion liquid is substantially maintained at the space that is positioned directly below the optical member.

12. An immersion exposure apparatus according to claim 11, wherein the substrate table and the pad member are relatively moved toward each other while keeping the first state so that the substrate table and the pad member are arranged in close proximity to each other.

13. An immersion exposure apparatus according to claim 10, wherein the substrate table and the pad member form a substantially continuous surface during the transition.

14. An immersion exposure apparatus according to claim 10, wherein the pad member is positioned away from under the optical member during exposure of the substrate held by the substrate table.

15. An immersion exposure apparatus according to claim 10, wherein the substrate table and the pad member are provided on a substrate stage.

16. An immersion exposure apparatus according to claim 10, further comprising a substrate exchange system configured to exchange a substrate on the substrate table while in the second state.

17. An immersion exposure apparatus according to claim 16, further comprising an alignment system configured to perform alignment of a substrate that is to be held on the substrate table by the exchange.

18. An immersion exposure method of exposing a substrate with a light beam, the method comprising:

placing the substrate on a substrate table;

irradiating the light beam onto the substrate placed on the substrate table through an optical member and an immersion liquid; and

positioning a pad member, which is movable relative to the substrate table, opposite to the optical member in place of the substrate table to substantially maintain the immersion liquid in a space under the optical member when the substrate table is moved away from under the optical member,

wherein the substrate table and the pad member are relatively tilted and/or moved in a vertical direction before the substrate table is moved away from under the optical member.

19. An immersion exposure method according to claim 18, wherein the substrate table and the pad member are positioned in a state of being arranged in close proximity to each other so that the immersion liquid is substantially maintained at a space that is positioned directly below the optical member.

20. An immersion exposure method according to claim 19, wherein the substrate table and the pad member are relatively moved toward each other while the substrate table is positioned opposite to the optical member so that the substrate table and the pad member are arranged in close proximity to each other.

21. An immersion exposure method according to claim 18, wherein the substrate table and the pad member transit from a first state in which the immersion liquid is maintained in a space between the optical member and the substrate table to a second state in which the immersion liquid is maintained in a space between the optical member and the pad member.

22. An immersion exposure method according to claim 21, wherein the substrate table and the pad member form a substantially continuous surface during the transition.

23. An immersion exposure method according to claim 18, wherein the pad member is positioned away from under the optical member during exposure of the substrate held by the substrate table.

24. An immersion exposure method according to claim 18, wherein the substrate table and the pad member are provided on a substrate stage.

25. An immersion exposure method according to claim 21, further comprising exchanging a substrate on the substrate table while in the second state.

26. An immersion exposure method according to claim 25, further comprising performing alignment of a substrate that is to be held on the substrate table by the exchanging.

27. An immersion exposure method of exposing a substrate with a light beam, the method comprising:

placing the substrate on a substrate table;

irradiating the light beam onto the substrate placed on the substrate table through an optical member and an immersion liquid; and

replacing the substrate table with a pad member, the replacement including a transition from a first state to a second state, the first state in which the immersion liquid is maintained in a space between the optical member and the substrate table, the second state in which the immersion liquid is maintained in a space between the optical member and the pad member, the immersion liquid being substantially maintained at a space that is positioned directly below the optical member during the replacement,

wherein the substrate table and the pad member are relatively tilted and/or moved in a vertical direction prior to the replacement.

28. An immersion exposure method according to claim 27, wherein the substrate table and the pad member are positioned in a state of being arranged in close proximity to each other so that the immersion liquid is substantially maintained at the space that is positioned directly below the optical member.

29. An immersion exposure method according to claim 28, wherein the substrate table and the pad member are relatively moved toward each other while keeping the first state so that the substrate table and the pad member are arranged in close proximity to each other.

30. An immersion exposure method according to claim 27, wherein the substrate table and the pad member form a substantially continuous surface during the transition.

31. An immersion exposure method according to claim 27, wherein the pad member is positioned away from under the optical member during exposure of the substrate held by the substrate table.

32. An immersion exposure method according to claim 27, wherein the substrate table and the pad member are provided on a substrate stage.

33. An immersion exposure method according to claim 27, further comprising exchanging a substrate on the substrate table while in the second state.

34. An immersion exposure method according to claim 33, further comprising performing alignment of a substrate that is to be held on the substrate table by the exchanging.