Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method
First Claim
1. A movable body drive method in which a movable body is driven along a predetermined plane, the method comprising:
- driving the movable body based on one ofa synthesized signal of a first signal which is a first detection signal that has been made to pass through a high pass filter and a second signal which is a second detection signal that has been made to pass through a low pass filter having a cut off frequency which is the same as the high pass filter, the first detection signal corresponding to a position of the movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the movable body, and the second detection signal being obtained by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the movable body and an outside of the movable body and receiving a diffraction beam from the diffraction grating by a measurement system which has at least a part of the system placed on the other of the movable body and the outside of the movable body, anda signal which is substantially equivalent to the synthesized signal.
1 Assignment
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Accused Products
Abstract
A stage is driven (position control) using a hybrid signal which is obtained by synthesizing an output signal of an interferometer (an interferometer system) and an output signal of an encoder (an encoder system) that are made to pass through a high pass filter and a low pass filter, respectively. A cutoff frequency is set to a frequency corresponding to a speed slightly smaller than the speed of the stage at the time of scanning exposure. This allows the stage to be driven using an interferometer whose linear measurement is high at the time of scanning exposure, and using an encoder whose measurement reproducibility is high at the time of stepping.
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Citations
64 Claims
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1. A movable body drive method in which a movable body is driven along a predetermined plane, the method comprising:
driving the movable body based on one of a synthesized signal of a first signal which is a first detection signal that has been made to pass through a high pass filter and a second signal which is a second detection signal that has been made to pass through a low pass filter having a cut off frequency which is the same as the high pass filter, the first detection signal corresponding to a position of the movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the movable body, and the second detection signal being obtained by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the movable body and an outside of the movable body and receiving a diffraction beam from the diffraction grating by a measurement system which has at least a part of the system placed on the other of the movable body and the outside of the movable body, and a signal which is substantially equivalent to the synthesized signal. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A movable body apparatus, comprising:
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a movable body which moves along a predetermined plane; a first measurement system which outputs a first detection signal corresponding to a position of the movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the movable body; a second measurement system which outputs a second detection signal by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the movable body and an outside of the movable body and receiving a diffraction beam from the diffraction grating, and has at least a part of the system placed on the other of the movable body and the outside of the movable body; and a drive system which drives the movable body based on a synthesized signal of a first signal which is the first detection signal that has passed through a high pass filter and a second signal which is the second detection signal that has passed through a low pass filter having the same cutoff frequency as the high pass filter, or a signal which is substantially equivalent to the synthesized signal. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. An exposure method in which an energy beam is irradiated on a mask on which a pattern is formed, and the pattern is transferred on an object, the method comprising:
driving at least one of a first movable body which moves along a predetermined plane holding the object and a second movable body which holds the mask, based on one of a synthesized signal of a first signal which is a first detection signal that has been made to pass through a high pass filter and a second signal which is a second detection signal that has been made to pass through a low pass filter having a cut off frequency which is the same as the high pass filter, the first detection signal corresponding to a position of the first movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the first movable body, and the second detection signal being obtained by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the first movable body and an outside of the first movable body and receiving a diffraction beam from the diffraction grating by a measurement system which has at least a part of the system placed on the other of the first movable body and the outside of the first movable body, and a signal which is substantially equivalent to the synthesized signal. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An exposure method in which a mask and an object are synchronously moved in a predetermined direction while an energy beam is irradiated on the mask on which a pattern is formed, and the pattern is transferred onto the object, the method comprising:
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driving at least one movable body of a first movable body moving along a predetermined plane holding the object and a second movable body holding the mask, according to a predetermined temporal change curve of speed and also along a predetermined path based on a drive signal, while switching between a first detection signal corresponding to a position of the first movable body output by an interferometer system which detects positional information of the first movable body and a second detection signal corresponding to a position of the first movable body output by an encoder system which detects positional information of the first movable body that serve as the drive signal, by making the first detection signal and the second detection signal pass through a high pass filter and a low pass filter that have the same cutoff frequency, respectively; and performing a weighting of a first drive period in which the at least one movable body is driven based on the first detection signal and a second drive period in which the at least one movable body is driven based on the second detection signal by setting the cutoff frequency. - View Dependent Claims (27, 28, 29, 30, 31)
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32. An exposure apparatus which irradiates an energy beam on a mask on which a pattern is formed, and transfers the pattern on an object, the apparatus comprising:
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a first movable body which holds the object and moves along a predetermined plane; a second movable body which moves holding the mask; a first measurement system which outputs a first detection signal corresponding to a position of the first movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the first movable body; a second measurement system which outputs a second detection signal by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the first movable body and an outside of the first movable body and receiving a diffraction beam from the diffraction grating, and has at least a part of the system placed on the other of the first movable body and the outside of the first movable body; and a movable body drive system which drives at least one of the first movable body and the second movable body, based on one of a synthesized signal and a signal which is substantially equivalent to the synthesized signal, the synthesized signal being obtained by synthesizing a first signal which is the first detection signal that has passed through a high pass filter and a second signal which is the second detection signal that has passed through a low pass filter having the same cutoff frequency as the high pass filter. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. An exposure apparatus that synchronously moves a mask and an object in a predetermined direction while irradiating an energy beam on the mask on which a pattern is formed, and transfers the pattern onto the object, the apparatus comprising:
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a first movable body which holds the object and moves along a predetermined plane; a second movable body which moves holding the mask; an interferometer system which detects positional information of the first movable body, and outputs a first detection signal corresponding to a position of the first movable body; an encoder system which detects positional information of the first movable body, and outputs a second detection signal corresponding to the position of the first movable body; a drive system which drives at least one movable body of the first movable body and the second movable body, according to a predetermined temporal change curve of speed and also along a predetermined path based on a drive signal, while switching between the first detection signal and the second detection signal that serve as the drive signal, by making the first detection signal and the second detection signal pass through a high pass filter and a low pass filter that have the same cutoff frequency, respectively; and a setting device which performs a weighting of a first drive period in which the at least one movable body is driven based on the first detection signal and a second drive period in which the at least one movable body is driven based on the second detection signal by setting the cutoff frequency. - View Dependent Claims (45, 46, 47, 48, 49, 50)
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51. An exposure method in which an energy beam is irradiated on a mask on which a pattern is formed, and the pattern is transferred on an object, the method comprising:
driving at least one of a first movable body which moves along a predetermined plane holding the object and a second movable body which holds the mask, based on one of a synthesized signal and a signal which is substantially equivalent to the synthesized signal, the synthesized signal being of a first signal which is a first detection signal that has been made to pass through a first frequency filter that cuts off a signal lower than a predetermined frequency and a second signal which is a second detection signal that has been made to pass through a second frequency filter that cuts off a frequency higher than the predetermined frequency, the first detection signal corresponding to a position of the movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the first movable body, and the second detection signal being obtained by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the movable body and an outside of the movable body and receiving a diffraction beam from the diffraction grating by a measurement system which has at least a part of the system placed on the other of the movable body and the outside of the movable body. - View Dependent Claims (52, 53, 54, 55, 56)
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57. An exposure apparatus which irradiates an energy beam on a mask on which a pattern is formed, and transfers the pattern on an object, the apparatus comprising:
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a first movable body which holds the object and moves along a predetermined plane; a second movable body which moves holding the mask; a first measurement system which outputs a first detection signal corresponding to a position of the first movable body obtained by receiving a return beam of a measurement beam via an optical member provided on the first movable body; a second measurement system which outputs a second detection signal by irradiating a measurement beam on a diffraction grating on a measurement plane parallel to the predetermined plane provided on one of the first movable body and an outside of the first movable body and receiving a diffraction beam from the diffraction grating, and has at least a part of the system placed on the other of the first movable body and the outside of the first movable body; and a movable body drive system which drives at least one of the first movable body and the second movable body, based on one of a synthesized signal and a signal which is substantially equivalent to the synthesized signal, the synthesized signal being obtained by synthesizing a first signal which is the first detection signal that has been made to pass through a first frequency filter that cuts off a signal lower than a predetermined frequency and a second signal which is the second detection signal that has been made to pass through a second frequency filter that cuts off a frequency higher than the predetermined frequency. - View Dependent Claims (58, 59, 60, 61, 62, 63, 64)
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Specification