Chamber match using important variables filtered by dynamic multivariate analysis
First Claim
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1. A method of modifying a chamber in a semiconductor manufacturing facility, the method comprising:
- identifying a first, golden chamber operable to implement a semiconductor process;
identifying a second, reference chamber operable for the semiconductor process;
extracting a matching index of a third, processing chamber relative to the golden chamber and the reference chamber using a dynamic variable analysis; and
modifying the third, processing chamber according to the matching index,wherein the extracting of the matching index includes determining a first distance in a predictive parameter between the golden chamber and the reference chamber, and comparing the first distance to a determined second distance in the predictive parameter between the golden chamber and the processing chamber.
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Abstract
The present disclosure provides a method of chamber match. The method includes identifying a golden chamber designed operable to implement a semiconductor process; identifying a reference chamber designed operable for the semiconductor process; and extracting a matching index of a processing chamber relative to the golden chamber and the reference chamber using a dynamic variable analysis.
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Citations
20 Claims
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1. A method of modifying a chamber in a semiconductor manufacturing facility, the method comprising:
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identifying a first, golden chamber operable to implement a semiconductor process; identifying a second, reference chamber operable for the semiconductor process; extracting a matching index of a third, processing chamber relative to the golden chamber and the reference chamber using a dynamic variable analysis; and modifying the third, processing chamber according to the matching index, wherein the extracting of the matching index includes determining a first distance in a predictive parameter between the golden chamber and the reference chamber, and comparing the first distance to a determined second distance in the predictive parameter between the golden chamber and the processing chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method, comprising:
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identifying a golden chamber designed for a semiconductor process; and extracting a matching index of a processing chamber using a dynamic variable analysis, wherein the extracting the matching index further includes; extracting the matching index using a partial least square (PLS) model if metrology data is available; extracting the matching index using a principal component analysis (PCA) model if the metrology data is not available and a reference chamber is not ready; and extracting the matching index using a partial least square-discriminant analysis (PLS-DA) model if the metrology data is not available and the reference chamber is ready; and selecting very important parameters (VIPs) from the matching index; identifying a tunable parameter based on the VIPs using design of experiments (DOE); and modifying the processing chamber based on the matching index, wherein the selecting the VIPs comprises selecting a VIP if a filtering parameter VIPak is greater than 1, in which the filtering parameter is defined as, - View Dependent Claims (12, 13, 14, 15)
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16. A system for chamber match, comprising:
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a multivariate analysis (MVA) module operable to identify a matching index by performing a MVA model to dynamic manufacturing data from a processing chamber and being associated with a semiconductor process; a variable of importance (VIP) module operable to identify VIP parameters from the matching index; and a design of experiment (DOE) module operable to identify a tunable parameter from the VIP parameters using a DOE model, wherein the MVA module includes a first sub-module operable to extract the matching index by comparing a first distance in a predictive parameter between a golden chamber and a reference chamber with a second distance in the predictive parameter between the golden chamber and the processing chamber. - View Dependent Claims (17, 18, 19, 20)
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Specification