Micromechanical yaw-rate sensor
First Claim
1. A micromechanical yaw-rate sensor, comprising:
- a first yaw-rate sensor element which outputs a first sensor signal containing information about a rotation around a first rotational axis, the first yaw-rate sensor element being a linear oscillator and having a first oscillating body, which can be set into a linear oscillation in an oscillation plane perpendicular to the first rotational axis in relation to a substrate;
a second yaw-rate sensor element which outputs a second sensor signal containing information about a rotation around a second rotational axis, the second rotational axis being perpendicular to the first rotational axis, the second yaw-rate sensor element being a rotational oscillator having a second oscillating body which can be set into a rotational oscillation movement in the oscillation plane which is parallel to the second rotational axis in relation to the substrate;
a coupling link which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another; and
a drive which drives the first yaw-rate sensor element, driving of the first yaw-rate sensor element by the drive also causing driving of the second yaw-rate sensor element due to the mechanical coupling by the coupling link.
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Abstract
A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
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Citations
9 Claims
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1. A micromechanical yaw-rate sensor, comprising:
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a first yaw-rate sensor element which outputs a first sensor signal containing information about a rotation around a first rotational axis, the first yaw-rate sensor element being a linear oscillator and having a first oscillating body, which can be set into a linear oscillation in an oscillation plane perpendicular to the first rotational axis in relation to a substrate; a second yaw-rate sensor element which outputs a second sensor signal containing information about a rotation around a second rotational axis, the second rotational axis being perpendicular to the first rotational axis, the second yaw-rate sensor element being a rotational oscillator having a second oscillating body which can be set into a rotational oscillation movement in the oscillation plane which is parallel to the second rotational axis in relation to the substrate; a coupling link which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another; and a drive which drives the first yaw-rate sensor element, driving of the first yaw-rate sensor element by the drive also causing driving of the second yaw-rate sensor element due to the mechanical coupling by the coupling link. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9)
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2. A micromechanical yaw-rate sensor, comprising:
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a first yaw-rate sensor element which outputs a first sensor signal containing information about a rotation around a first rotational axis, the first yaw-rate sensor element being a linear oscillator and having a first oscillating body, which can be set into a linear oscillation in an oscillation plane perpendicular to the first rotational axis in relation to a substrate; a second yaw-rate sensor element which outputs a second sensor signal containing information about a rotation around a second rotational axis, the second rotational axis being perpendicular to the first rotational axis, the second yaw-rate sensor element being a rotational oscillator having a second oscillating body which can be set into a rotational oscillation movement in the oscillation plane which is parallel to the second rotational axis in relation to the substrate; a coupling link which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another; and a drive which drives the coupling link, driving of the coupling link by the drive also causing driving of the first yaw-rate sensor element and the second yaw-rate sensor element.
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Specification