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Micromechanical yaw-rate sensor

  • US 8,490,483 B2
  • Filed: 07/13/2010
  • Issued: 07/23/2013
  • Est. Priority Date: 07/21/2009
  • Status: Active Grant
First Claim
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1. A micromechanical yaw-rate sensor, comprising:

  • a first yaw-rate sensor element which outputs a first sensor signal containing information about a rotation around a first rotational axis, the first yaw-rate sensor element being a linear oscillator and having a first oscillating body, which can be set into a linear oscillation in an oscillation plane perpendicular to the first rotational axis in relation to a substrate;

    a second yaw-rate sensor element which outputs a second sensor signal containing information about a rotation around a second rotational axis, the second rotational axis being perpendicular to the first rotational axis, the second yaw-rate sensor element being a rotational oscillator having a second oscillating body which can be set into a rotational oscillation movement in the oscillation plane which is parallel to the second rotational axis in relation to the substrate;

    a coupling link which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another; and

    a drive which drives the first yaw-rate sensor element, driving of the first yaw-rate sensor element by the drive also causing driving of the second yaw-rate sensor element due to the mechanical coupling by the coupling link.

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