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Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same

  • US 8,490,495 B2
  • Filed: 05/05/2010
  • Issued: 07/23/2013
  • Est. Priority Date: 05/05/2010
  • Status: Expired due to Fees
First Claim
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1. A sensing device, comprising:

  • a first sensing element disposed over a semiconductor die and configured to generate a first sensing signal upon detecting pressure;

    a second sensing element disposed over the semiconductor die adjacent to the first sensing element, and configured to generate a second sensing signal upon sensing ambient conditions; and

    a sensing circuit coupled to the second sensing element and capable of generating a pressure sensing signal in response to the first sensing signal and the second sensing signal;

    wherein the first sensing element includes a pressure diaphragm formed with flexible material able to deflect under pressure and functioned as a first capacitor electrode, a gap situated adjacent to the pressure diaphragm able to alter its physical shape in response to the pressure, a silicon pillar disposed on one side of the gap opposite from the pressure diaphragm, and a second capacitor electrode formed by directly doping in bottom doped sidewall of the silicon pillar adjacent to the gap via a doping process.

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