Microelectromechanical (MEMS) pressure transducer
First Claim
Patent Images
1. A pressure transducer for measuring pressure comprising:
- a chamber that has no dimension greater than 1 mm; and
pressure-sensing components configured to measure pressure within the chamber.
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Abstract
A pressure transducer for measuring pressure may include an all-polymer chamber that has no dimension greater than 1 mm. There may be fluid within the chamber, a gaseous bubble trapped within the fluid, and electrodes in contact with the fluid. The electrodes may enable a measurement of changes in the impedance of the fluid caused by changes in the volume of the gaseous bubble caused by changes in the pressure to be measured.
The pressure transducer may be made by depositing the chamber, placing the fluid within the chamber, and generating the gaseous bubble within the fluid with electrolysis.
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Citations
22 Claims
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1. A pressure transducer for measuring pressure comprising:
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a chamber that has no dimension greater than 1 mm; and pressure-sensing components configured to measure pressure within the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A pressure transducer for measuring pressure comprising:
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a chamber; fluid within the chamber; a gaseous bubble within the fluid; and volume-sensing components configured to measure changes in the volume of the gaseous bubble caused by changes in fluidic pressure within the chamber. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A process for manufacturing a pressure transducer for measuring pressure comprising:
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making a chamber; placing fluid within the chamber; and generating a gaseous bubble within the fluid, whereby the process results in the construction of the pressure transducer. - View Dependent Claims (16, 17, 18, 19)
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20. A process for manufacturing a pressure transducer chamber for measuring pressure within the chamber comprising:
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depositing a series of layers on a substrate; and removing at least one deposited layer, wherein the process results in the construction of the pressure transducer chamber. - View Dependent Claims (21, 22)
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Specification