MEMS diaphragm
First Claim
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1. A MEMS diaphragm, comprising:
- a first conductive layer, disposed on a substrate and having a plurality of openings, wherein the openings have the same dimension, and distances between the adjacent openings are gradually increased toward an edge of the first conductive layer;
a second conductive layer, disposed between the first conductive layer and the substrate, wherein the second conductive layer is a film with no opening and the openings of the first conductive layer are completely overlapped with the film; and
a first dielectric layer, partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended.
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Abstract
A microelectromechanical system (MEMS) diaphragm is provided. The MEMS diaphragm includes a first conductive layer, a second conductive layer and a first dielectric layer. The first conductive layer is disposed on a substrate and having a plurality of openings. The openings have the same dimension, and the distance between the adjacent openings is gradually increased toward the edge of the first conductive layer. The second conductive layer is disposed between the first conductive layer and the substrate. The first dielectric layer is partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended.
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Citations
8 Claims
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1. A MEMS diaphragm, comprising:
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a first conductive layer, disposed on a substrate and having a plurality of openings, wherein the openings have the same dimension, and distances between the adjacent openings are gradually increased toward an edge of the first conductive layer; a second conductive layer, disposed between the first conductive layer and the substrate, wherein the second conductive layer is a film with no opening and the openings of the first conductive layer are completely overlapped with the film; and a first dielectric layer, partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification