Dual thin film precision resistance trimming

• US 8,493,171 B2
• Filed: 07/03/2012
• Issued: 07/23/2013
• Est. Priority Date: 09/17/2008
• Status: Active Grant

• Current Assignee: STMicroelectronics Incorporated (STMicroelectronics NV), STMicroelectronics SAS (STMicroelectronics NV)
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV), STMicroelectronics SAS (STMicroelectronics NV)
• Inventors: Le Neel, Olivier, Dumont-Girard, Pascale, Niu, Chengyu, Wang, Fuchao, Arnoux, Michel
• Primary Examiner(s): LEE, KYUNG S
• Application Number:
  US13/541,468
• Publication Number:
  US 20120266452A1
• Time in Patent Office: 385 Days
• Field of Search: 338/25
• US Class Current: 338/25
• CPC Class Codes: H01C 17/265 by chemical or thermal treatment, e.g. oxydation, reduction, annealing etching H01C17/2416
• CPC Class Codes: H01L 23/345 Arrangements for heating thermal treatment apparatus H01L21/00
• CPC Class Codes: H01L 23/5228 Resistive arrangements or effects of, or between, wiring layers other resistive arrangements H01L23/647
• CPC Class Codes: H01L 27/016 Thin-film circuits
• CPC Class Codes: H01L 27/0688 Integrated circuits having a three-dimensional layout
• CPC Class Codes: H01L 28/20 Resistors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: Y10T 29/49087 with envelope or housing

Abstract

A trimmable resistor for use in an integrated circuit is trimmed using a heater. The heater is selectively coupled to a voltage source. The application of voltage to the heater causes the heater temperature to increase and produce heat. The heat permeates through a thermal separator to the trimmable resistor. The resistance of the trimmable resistor is permanently increased or decreased when the temperature of the resistor is increased to a value within a particular range of temperatures.

Claims

1. A method of forming a trimmable resistance structure in an integrated circuit die, the method comprising:

forming a first and a second metal interconnection structure spaced from each other and overlying a semiconductor substrate having transistors formed therein;

forming a thin film resistive structure overlying the first and second metal interconnection structures and extending from the first metal interconnection structure to the second metal interconnection structure and being positioned over the semiconductor substrate, the resistive structure being composed of a material whose resistance is permanently changeable by application of heat thereto;

forming a dielectric layer over the resistive structure;

forming a heater overlying the dielectric layer, the dielectric layer being positioned between the heater layer and the resistive structure, the resistive structure being positioned between the heater and semiconductor substrate; and

forming a switch in the semiconductor substrate configured to selectively couple the heater to a voltage supply to cause the heater to heat the resistive structure to cause a permanent change in the resistance of the resistive structure.

2. The method of claim 1 wherein the resistive structure, the heater, and the dielectric material are thin films.

3. The method of claim 1 wherein the dielectric includes Si₃N₄.

4. The method of claim 3 wherein the resistive structure includes CrSi.

18. The method of claim 1 wherein the first and the second interconnection structures are at least twice as thick as the thin film resistor structure.

5. A method comprising:

forming a transistor in a semiconductor substrate;

forming a resistor overlying the semiconductor substrate;

forming a dielectric layer on the resistor; and

forming a heater layer on the dielectric layer and overlying the resistor, the transistor being configured to pass a current through the heater to transfer heat to the resistor to cause a permanent change in a resistance of the resistor.

6. The method of claim 5 wherein the resistive structure, the heater, and the dielectric material are thin films.

7. The method of claim 5 wherein the resistor is CrSi.

8. The method of claim 5 wherein the dielectric layer is Si₃N₄.

9. The method of claim 5 wherein heating the resistive structure decreases the resistance of the resistive structure.

10. A method, comprising:

forming an amplifier in an integrated circuit die;

forming a trimmable thin film resistor in the integrated circuit die electrically coupled to the amplifier, a gain of the amplifier being based in part on a resistance of the trimable thin film resistor;

forming a thin film heater in the integrated circuit die above the trimable thin film resistor and thermally coupled to the trimmable thin film resistor;

forming a transistor in the integrated circuit die electrically coupled to the thin film heater and configured to selectively pass a current through the thin film heater to increase a temperature of the trimable thin film resistor to permanently alter the resistance of the trimable thin film resistor; and

forming a thin film thermal separator disposed between the trimmable thin film resistor and the thin film heater.

11. The method of claim 10 wherein the thin film heater is a thin film resistor.

12. The method of claim 11 wherein the resistance of the thin film heater is less than the resistance of the trimmable thin film resistor.

13. The method of claim 10 wherein the resistance of the trimmable thin film resistor permanently changes with exposure to a temperature within a range of temperatures.

14. The method of claim 13 wherein the range of temperatures includes 450°

C. to 850°

C.

15. The method of claim 10 wherein the thin film thermal separator is a dielectric.

16. The method of claim 15 wherein the thin film thermal separator includes Si₃N₄.

17. The method of claim 10 wherein the trimmable thin film resistor includes CrSi.