Lithographic error reduction by pattern matching

• US 8,495,525 B1
• Filed: 03/20/2012
• Issued: 07/23/2013
• Est. Priority Date: 03/20/2012
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Bouchard, Pierre J., Chaudhary, Aditya, Dave, Kalpesh G.
• Primary Examiner(s): Siek, Vuthe
• Application Number:
  US13/424,816
• Time in Patent Office: 490 Days
• Field of Search: 716/51, 716/52, 716/112
• US Class Current: 716/51
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G03F 1/44 Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales

Abstract

A library of waivable images with corresponding waiver constraints is generated. Each of the waivable images is an image of a region of a reference design layout including a raw error as determined by an optical rule checks (ORC) program and does not require a correction for printability on a photoresist layer. A list of raw errors is generated by running the ORC program on a target design layout. Error region images corresponding to the list of raw errors are generated by selecting a region of the target design layout around points corresponding to the raw errors. A list of matches between the library of waivable images and the error region images is generated. By removing a subset of raw errors that correspond to a subset of the list of matches from the list of raw errors, a list of real errors is generated.

Claims

1. A method for generating a list of real errors from a list of raw errors, said method comprising:

generating a library of waivable images with corresponding waiver constraints, wherein each of said waivable images is an image of a region of a reference design layout including a raw error as determined by an optical rule checks (ORC) program and does not require a correction for printability on a photoresist layer;

generating a list of raw errors by running said ORC program on a target design layout;

generating error region images corresponding to said list of raw errors;

generating a list of matches between said library of waivable images and said error region images; and

removing a subset of raw errors that correspond to a subset of said list of matches from said list of raw errors to generate a list of real errors.

2. The method of claim 1, wherein said library of waivable images and said error region images are generated employing the same grid size.

3. The method of claim 2, wherein said subset of said list of matches is determined by comparing, within a matching pair of a waivable image and an error region image, a waiver constraint of said waivable image with a corresponding property value of said error region image.

4. The method of claim 1, wherein said images of error regions are generated employing a coarser grid than said library of waivable images.

5. The method of claim 4, wherein said subset of said list of matches is determined by:

generating additional error region images employing a grid size of said library of waivable images; and

comparing, within a matching pair of a waivable image and an additional error region image, a waiver constraint of said waivable image with a corresponding property value of said additional error region image.

6. The method of claim 1, wherein said corresponding waiver constraint comprises at least one allowed modification to a set of design rules embodied in said ORC program.

7. The method of claim 6, wherein said at least one modification comprises at least one of a minimum spacing between adjacent line shapes, a minimum width of a line shape, a minimum pattern factor within a predefined radius, a maximum spacing between adjacent line shapes, a maximum width of a line shape, and a maximum pattern factor within a predefined radius.

8. The method of claim 1, wherein said error region images are generated by compiling images around each point in said target design layout that corresponds to said list or raw errors.

9. A system for generating a list of real errors from a list of raw errors, said system comprising:

a data storage unit that stores a library of waivable images with corresponding waiver constraints; and

a computing means in communication with said data storage unit and configured to accept as inputs a target design layout and a list of raw errors of said target design layout as generated by an optical rule checks (OPC) program, and configured to generate error region images corresponding to said list of raw errors, and configured to generate a list of matches between said library of waivable images and said error region images, and configured to remove a subset of raw errors that correspond to a subset of said list of matches from said list of raw errors, and configured to output, in a data storage medium, a list of real errors that is a difference between said list of raw errors and said subset of raw errors.

10. The system of claim 9, wherein said data storage unit is configured to store said library of waivable images using a grid size, and said computing means is configured to generate said error region images using said grid size.

11. The system of claim 10, wherein said computing means is configured to determine said subset of said list of matches by comparing, within a matching pair of a waivable image and an error region image, a waiver constraint of said waivable image with a corresponding property value of said error region image.

12. The system of claim 9, wherein said data storage unit is configured to store said library of waivable images using a first grid size, and said computing means is configured to generate said error region images using a second grid size that is coarser than said first grid size.

13. The system of claim 12, wherein computing means is configured to determine said subset of said list of matches by:

generating additional error region images employing a grid size of said library of waivable images; and

comparing, within a matching pair of a waivable image and an additional error region image, a waiver constraint of said waivable image with a corresponding property value of said additional error region image.

14. The system of claim 9, wherein said corresponding waiver constraint comprises at least one modification to a set of design rules embodied in said OPC program.

15. The system of claim 14, wherein said at least one modification comprises at least one of a minimum spacing between adjacent line shapes, a minimum width of a line shape, a minimum pattern factor within a predefined radius, a maximum spacing between adjacent line shapes, a maximum width of a line shape, and a maximum pattern factor within a predefined radius.

16. The system of claim 9, wherein said computing means is configured to generate said error region images by compiling images around each point in said target design layout that corresponds to said list or raw errors.

17. A non-transitory machine-readable data storage medium embodying a program for generating a list of real errors from a list of raw errors, said program comprising steps of:

retrieving a library of waivable images with corresponding waiver constraints from a data storage unit;

accepting as inputs a target design layout and a list of raw errors from said target design layout as generated by an optical proximity correction (OPC) program;

generating error region images corresponding to said list of raw errors;

generating a list of matches between said library of waivable images and said error region images; and

removing a subset of raw errors that correspond to a subset of said list of matches from said list of raw errors to generate a list of real errors.

18. The non-transitory machine-readable data storage medium of claim 17, wherein said program is configured to generate said error region images employing a same grid size as a grid size of said library of waivable images.

19. The non-transitory machine-readable data storage medium of claim 18, wherein said program determines said subset of said list of matches by comparing, within a matching pair of a waivable image and an error region image, a waiver constraint of said waivable image with a corresponding property value of said error region image.

20. The non-transitory machine-readable data storage medium of claim 17, wherein said program is configured to generate said error region images employing a coarser grid size as a grid size of said library of waivable images, and said program determines said subset of said list of matches by:

generating additional error region images employing a grid size of said library of waivable images; and

comparing, within a matching pair of a waivable image and an additional error region image, a waiver constraint of said waivable image with a corresponding property value of said additional error region image.