Polymer layer on X-ray window

• US 8,498,381 B2
• Filed: 10/07/2010
• Issued: 07/30/2013
• Est. Priority Date: 10/07/2010
• Status: Active Grant

• Current Assignee: Moxtek (Polatechno Co.,Ltd.)
• Original Assignee: Moxtek (Polatechno Co.,Ltd.)
• Inventors: Liddiard, Steven, Taylor, Brian, Decker, Keith, Maynard, Jason
• Primary Examiner(s): Ho, Allen C.
• Application Number:
  US12/899,750
• Publication Number:
  US 20120087476A1
• Time in Patent Office: 1,027 Days
• Field of Search: 378/161
• US Class Current: 378/161
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G21K 1/00 Arrangements for handling particles or ionising radiation, e.g. focusing or moderating production or acceleration of neutrons, electrically-charged particles, neutral molecular beams or neutral atomic beams H05H3/00 - H05H15/00
• CPC Class Codes: H01J 2235/18 Windows, e.g. for X-ray transmission
• CPC Class Codes: H01J 2235/183 Multi-layer structures
• CPC Class Codes: H01J 35/18 Windows
• CPC Class Codes: H01J 5/18 Windows permeable to X-rays, gamma-rays, or particles

Abstract

An x-ray window comprising a plurality of thin film layers stacked together, including a thin film layer and a polymer layer. The thin film layer can be diamond, graphene, diamond-like carbon, beryllium, and combinations thereof. The polymer layer can be a polyimide. A boron hydride layer may also be included.

Claims

1. An x-ray window comprising a plurality of layers stacked together, including:

a) a thin film layer comprising a material selected from the group consisting of diamond, graphene, diamond-like carbon, beryllium, and combinations thereof;

b) a boron hydride layer;

c) a polymer layer; and

d) wherein the boron hydride layer is disposed between the thin film layer and the polymer layer.

2. The x-ray window of claim 1, wherein the plurality of layers are substantially transmissive to x-rays having an energy in the range of 100-20,000 electronvolts.

3. The x-ray window of claim 1, wherein the polymer layer comprises a polyimide.

4. The x-ray window of claim 1, wherein:

a) the thin film layer has a thickness of about 5 to 500 micrometers;

b) the boron hydride layer has a thickness of about 20 to 2000 nanometers; and

c) the polymer layer has a thickness of about 50 to 1200 nanometers.

5. The x-ray window of claim 1, wherein:

a) the thin film layer has a thickness of about 5 to 12 micrometers;

b) the boron hydride layer has a thickness of about 800 to 1600 nanometers; and

c) the polymer layer has a thickness of about 20 to 300 nanometers.

6. The x-ray window of claim 1, wherein:

a) the thin film layer has a thickness of about 50 to 1200 nanometers;

b) the boron hydride layer has a thickness of about 20 to 2000 nanometers; and

c) the polymer layer has a thickness of about 50 to 1200 nanometers.

7. The x-ray window of claim 1, further comprising a mount, and wherein:

a) the thin film layer is hermetically sealed to the mount at a perimeter of the thin film layer defining a sealed joint;

b) the boron hydride layer and the polymer layer extend beyond the perimeter of the thin film layer; and

c) the boron hydride layer and the polymer layer providing corrosion protection to the sealed joint.

8. The x-ray window of claim 7, wherein the boron hydride layer is a first boron hydride layer, and further comprising:

a) a second boron hydride layer disposed on an opposite side of the thin film layer from the first boron hydride layer;

b) the second boron hydride layer extending beyond the perimeter of the thin film layer to cover the sealed joint; and

c) the second boron hydride layer providing corrosion protection to the sealed joint.

9. The x-ray window of claim 7, wherein the polymer layer is a first polymer layer, and further comprising:

a) a second polymer layer disposed on an opposite side of the thin film layer from the first polymer layer;

b) the second polymer layer extending beyond the perimeter of the thin film layer to cover the sealed joint; and

c) the second polymer layer providing corrosion protection to the sealed joint.

10. The x-ray window of claim 7, wherein:

a) the plurality of layers is capable of withstanding a differential pressure of at least 1 atmosphere; and

b) the plurality layers is capable of withstand temperatures of greater than 350°

C.

11. The x-ray window of claim 7, wherein the thin film layer is hermetically sealed to the mount by diffusion bonding, brazing, or soldering.

12. An x-ray window comprising a plurality of layers stacked together, including:

a) a thin film layer comprising a material selected from the group consisting of diamond, graphene, diamond-like carbon, beryllium, and combinations thereof, the thin film layer having a thickness of about 50 to 1200 nanometers;

b) a boron hydride layer having a thickness of about 20 to 2000 nanometers; and

c) a polymer layer having a thickness of about 50 to 1200 nanometers.

13. The x-ray window of claim 12 further comprising a mount with the thin film layer hermetically sealed thereto at a perimeter of the thin film layer defining a sealed joint, the polymer layer extending beyond the perimeter of the thin film layer, and the polymer layer providing corrosion protection to the sealed joint.

14. The x-ray window of claim 12, wherein the thin film layer is disposed between the boron hydride layer and the polymer layer.

15. An x-ray window comprising:

a) a plurality of layers stacked together, including;

i) a thin film layer comprising a material selected from the group consisting of diamond, graphene, diamond-like carbon, beryllium, and combinations thereof;

ii) a boron hydride layer;

iii) a first polymer layer and a second polymer layer;

iv) the first polymer layer disposed on one side of the thin film layer and the second polymer layer disposed on an opposite side of the thin film layer;

b) a mount;

c) the thin film layer is hermetically sealed to the mount at a perimeter of the thin film layer defining a sealed joint;

d) the boron hydride layer, the first polymer layer, and the second polymer layer extend beyond the perimeter of the thin film layer; and

e) the boron hydride layer, the first polymer layer, and the second polymer layer provide corrosion protection to the sealed joint.

16. The x-ray window of claim 15, wherein the thin film layer is hermetically sealed to the mount by diffusion bonding, brazing, or soldering.

17. The x-ray window of claim 15, wherein the boron hydride layer is a first boron hydride layer, and further comprising:

a) a second boron hydride layer disposed on an opposite side of the thin film layer from the first boron hydride layer;

b) the second boron hydride layer extending beyond the perimeter of the thin film layer to cover the sealed joint; and

c) the second polyimide layer providing corrosion protection to the sealed joint.

18. The x-ray window of claim 15, wherein the thin film layer comprises beryllium and the polymer layer comprises polyimide.