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Assembly method of transfer mechanism and transfer chamber

  • US 8,499,430 B2
  • Filed: 07/30/2010
  • Issued: 08/06/2013
  • Est. Priority Date: 07/31/2009
  • Status: Expired due to Fees
First Claim
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1. An assembly method of a transfer mechanism which transfers a target, the assembly method comprising:

  • installing a lifting mechanism configured to lift units of the transfer mechanism at a ceiling of a transfer chamber where the transfer mechanism is accommodated, the units including a pick unit configured to hold the target, a slide unit configured to slide the pick unit and a drive unit configured to drive the slide unit and installed at a drive unit installation portion provided in a bottom of the transfer chamber; and

    assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism,wherein the lifting mechanism is installed at a lifting mechanism installation portion provided in the ceiling corresponding to the drive unit installation portion.

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