Mounting system for torsional suspension of a MEMS device
First Claim
1. A mounting system for providing torsional and flexural suspension of a MEMS device, the mounting system comprising:
- a proof mass;
a plurality of isolation cuts selectively arranged in the proof mass; and
an anchor mounting member having a first surface bonded to a proof mass and a second surface bonded to a substrate, the anchor mounting member centrally located relative to a centerline of the proof mass,wherein the anchor mounting member does not extend beyond a border of the proof mass.
1 Assignment
0 Petitions
Accused Products
Abstract
A mounting system for a MEMS device includes a proof mass selectively coupled to a substrate using a centrally located, single anchor mount that minimizes sensitivity to strain variations experienced by the MEMS device. The mounting system may include isolation cuts arranged in the proof mass to advantageously achieve a desired amount of strain isolation and to produce hinges that extend in opposite directions from the anchor mount. The single anchor mount is arranged to reduce a separation distance from a mid-point or centroid of the anchor mount to its perimeter as compared to conventional mounting schemes that have multiple anchor mounts positioned distally from a common mid-point.
-
Citations
22 Claims
-
1. A mounting system for providing torsional and flexural suspension of a MEMS device, the mounting system comprising:
-
a proof mass; a plurality of isolation cuts selectively arranged in the proof mass; and an anchor mounting member having a first surface bonded to a proof mass and a second surface bonded to a substrate, the anchor mounting member centrally located relative to a centerline of the proof mass, wherein the anchor mounting member does not extend beyond a border of the proof mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A mounting system for providing torsional and flexural suspension of a MEMS device, the mounting system comprising:
-
a proof mass; a plurality of isolation cuts selectively arranged in the proof mass; and a one-piece anchor mounting member having a first portion coupled to a substrate and a second portion coupled to the proof mass, wherein the anchor mounting member does not extend beyond a border of the proof mass. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A MEMS device comprising:
-
a sensor element; a proof mass; a plurality of isolation cuts selectively arranged in the proof mass; and an anchor mounting member having a first surface bonded to a substrate and a second surface bonded to the proof mass, the anchor mounting member centrally located relative to a centerline of the proof mass, wherein the anchor mounting member does not extend beyond a border of the proof mass. - View Dependent Claims (20, 21, 22)
-
Specification