Piezoelectric sensor dynamic range improvement

• US 8,499,630 B2
• Filed: 03/31/2008
• Issued: 08/06/2013
• Est. Priority Date: 03/31/2008
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Gerfers, Friedel, Wang, Li-Peng
• Primary Examiner(s): Macchiarolo, Peter
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US12/059,009
• Publication Number:
  US 20090241666A1
• Time in Patent Office: 1,954 Days
• Field of Search: 735/143.2, 734/93, 735/09, 735/140.1, 702/141
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A MEMS piezoelectric sensor comprises a plurality of capacitors some of which may be used for sensing and others used for feedback. The capacitors may be switched to connect or disconnect selected capacitors from the sensor. Embodiments convert a two port sensor into a four port sensor without significant changes in hardware design and improve SNR and correct for offset and out-of-axis errors due to process mismatch and variations.

Claims

1. A micro electromechanical system (MEMS) sensor, comprising:

a frame;

a beam;

a proof mass;

a plurality of arms connecting the frame to the proof mass;

a plurality of capacitors, wherein each of said plurality of arms comprises an inner capacitor between the proof mass and the beam and an outer capacitor between the beam and the frame; and

a plurality of switches, one connected to each of the capacitors for connecting or disconnecting selected capacitors,

wherein a first half of said plurality of capacitors is used for outputting a sensor signal, and a second half of said plurality of capacitors is used for a feedback signal,

wherein the plurality of switches cause the capacitors to operate so as to control an overall signal to noise ratio (SNR) of said MEMS sensor,

wherein each sample period of said MEMS sensor is split into two periods, a sense period and a feedback period, and

further wherein, in the sense period, the capacitors used to sense an input acceleration fully differentially, and, in the feedback period, the feedback signal is connected to the first half of said plurality of capacitors so as to form a closed feedback loop.

2. The sensor as recited in claim 1 wherein the feedback loop further comprises:

an analog sensor signal from the outer capacitors;

an analog to digital converter for converting the analog sensor signals into a digital sensor signal;

a decimator and a gain circuit receiving the digital sensor signal and controlling the plurality of switches; and

a digital to analog converter for converting the digital sensor signal to an analog sensor signal which is fed back to the inner capacitors.

3. The sensor as recited in claim 2 further comprising:

a loop filter prior to the analog to digital converter.

4. The sensor as recited in claim 1 wherein the frame is generally square and the plurality of arms comprise one arm at each corner extending inward to the proof mass centered in the frame.

5. The sensor as recited in claim 4 wherein capacitors on a right side of the proof mass are used to output the sense signal and capacitors on a left side of the proof mass are used to receive feedback.

6. The sensor as recited in claim 5 wherein the feedback comprises one of a positive reference voltage and a negative reference voltage.