Semiconductor wafer handling and transport
First Claim
Patent Images
1. A method for moving a wafer in a semiconductor manufacturing process, the method comprising:
- providing a front end module having a first robotic arm, a tunnel capable of being sealed for holding a sealed environment, a plurality of process ports, an exchange zone having at least one exchange zone port and at least one tunnel exchange zone port, and a track for guiding cart motion within the tunnel, each of the plurality of process ports, the at least one tunnel exchange zone port, and the at least one exchange zone port having an isolation valve that opens and closes the port;
providing a second robotic arm at each of the plurality of process ports and the at least one tunnel exchange zone port, each second robotic arm at each respective port being operable to reach through its respective port from outside the tunnel;
retrieving a wafer with the first robotic arm;
handing off the wafer through the exchange zone from the first robotic arm to the second robotic arm at the at least one tunnel exchange zone port where both the first robotic arm and the second robotic arm at the at least one tunnel exchange zone port reach into the exchange zone from outside the exchange zone, where the second robotic arm at the at least one tunnel exchange zone port reaches through the at least one exchange zone port into the exchange zone;
with the isolation valve of the at least one exchange zone port closed, positioning the wafer outside the at least one tunnel exchange zone port with the second robotic arm at the at least one tunnel exchange zone port;
positioning a cart inside of the tunnel adjacent the at least one tunnel exchange zone port;
opening the isolation valve of the at least one tunnel exchange zone port;
inserting the second robotic arm at the at least one tunnel exchange zone port into the tunnel through the at least one tunnel exchange zone port and placing the wafer on the cart;
withdrawing the second robotic arm at the at least one tunnel exchange zone port from the tunnel; and
closing the isolation valve of the at least one tunnel exchange zone port.
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Abstract
Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
543 Citations
17 Claims
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1. A method for moving a wafer in a semiconductor manufacturing process, the method comprising:
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providing a front end module having a first robotic arm, a tunnel capable of being sealed for holding a sealed environment, a plurality of process ports, an exchange zone having at least one exchange zone port and at least one tunnel exchange zone port, and a track for guiding cart motion within the tunnel, each of the plurality of process ports, the at least one tunnel exchange zone port, and the at least one exchange zone port having an isolation valve that opens and closes the port; providing a second robotic arm at each of the plurality of process ports and the at least one tunnel exchange zone port, each second robotic arm at each respective port being operable to reach through its respective port from outside the tunnel; retrieving a wafer with the first robotic arm; handing off the wafer through the exchange zone from the first robotic arm to the second robotic arm at the at least one tunnel exchange zone port where both the first robotic arm and the second robotic arm at the at least one tunnel exchange zone port reach into the exchange zone from outside the exchange zone, where the second robotic arm at the at least one tunnel exchange zone port reaches through the at least one exchange zone port into the exchange zone; with the isolation valve of the at least one exchange zone port closed, positioning the wafer outside the at least one tunnel exchange zone port with the second robotic arm at the at least one tunnel exchange zone port; positioning a cart inside of the tunnel adjacent the at least one tunnel exchange zone port; opening the isolation valve of the at least one tunnel exchange zone port; inserting the second robotic arm at the at least one tunnel exchange zone port into the tunnel through the at least one tunnel exchange zone port and placing the wafer on the cart; withdrawing the second robotic arm at the at least one tunnel exchange zone port from the tunnel; and closing the isolation valve of the at least one tunnel exchange zone port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method comprising:
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providing a substrate transport system including at least one tunnel capable of being sealed for holding a sealed environment within the at least one tunnel, at least one substrate transport cart disposed within the at least one tunnel, a front end module having a first robotic arm, an exchange zone disposed between and connecting the front end module and the tunnel and having an exchange zone port, and a second robotic arm operable to reach into the at least one tunnel through a sealable port from outside the at least one tunnel; transferring a substrate between a substrate holding location and the second robotic arm through the exchange zone with the first robotic arm where both the first robotic arm and the second robotic arm reach into the exchange zone from outside the exchange zone, where the second robotic arm reaches through the exchange zone port into the exchange zone; with the exchange zone port and the sealable port sealed, positioning the substrate outside the sealable port with the second robotic arm; positioning the at least one cart inside the at least one tunnel adjacent the sealable port; opening the sealable port and transferring the substrate between the second robotic arm and the at least one cart; and withdrawing the second robotic arm from the at least one tunnel and sealing the sealable port. - View Dependent Claims (13, 14, 15, 16, 17)
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Specification