System and method for voltage-based plasma excursion detection

• US 8,502,689 B2
• Filed: 09/23/2010
• Issued: 08/06/2013
• Est. Priority Date: 09/23/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chen, Jian J., Ayoub, Mohamad
• Primary Examiner(s): HUNNINGS, TRAVIS R
• Application Number:
  US12/888,790
• Publication Number:
  US 20120075108A1
• Time in Patent Office: 1,048 Days
• Field of Search: None
• US Class Current: 340/661
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

The present invention provides a system and method for the detection of plasma excursions, such as arcs, micro-arcs, or other plasma instability, during plasma processing by directly monitoring direct current (DC) bias voltage on an RF power electrode of a plasma processing chamber. The monitored DC bias voltage is then passed through a succession of analog filters and amplifiers to provide a plasma excursion signal. The plasma excursion signal is compared to a preset value, and at points where the plasma excursion signal exceeds the preset value, an alarm signal is generated. The alarm signal is then fed back into a system controller so that an operator can be alerted and/or the processing system can be shut down. In certain embodiments, multiple processing regions can be monitored by a single detection control unit.

Claims

1. A method for detecting plasma excursions in a plasma chamber, comprising:

directly sensing a bias voltage from a radio frequency (RF) powered electrode disposed in a gas distribution system within the plasma chamber during plasma processing;

filtering the bias voltage using a plurality of analog filters to obtain an output voltage signal;

comparing the output voltage signal to a preset voltage value that represents a plasma excursion event; and

generating an alarm signal if the output voltage signal exceeds the preset voltage value.

2. The method of claim 1, further comprising reducing the bias voltage using a voltage divider prior to filtering the bias voltage.

3. The method of claim 2, wherein the filtering the bias voltage comprises passing the bias voltage through a band pass filter.

4. The method of claim 3, wherein the band pass filter is configured to only pass frequencies between about 250 Hz and about 50 kHz.

5. The method of claim 2, wherein the filtering the bias voltage comprises serially passing the bias voltage through a low frequency pass filter and a high frequency pass filter.

6. The method of claim 5, wherein the low frequency pass filter is configured to pass frequencies below about 55 kHz and the high frequency pass filter is configured to pass frequencies above about 230 Hz.

7. The method of claim 2, further comprising passing the bias voltage through a plurality of notch filters and a low pass frequency filter to obtain a filtered direct current bias voltage signal prior to obtaining the output voltage signal.

8. The method of claim 7, wherein the low pass frequency filter is configured to pass frequencies lower than 50 kHz.

9. The method of claim 1, further comprising continually collecting the output voltage signal with a data acquisition module.

10. The method of claim 1, further comprising collecting the output voltage signal with a data acquisition module only when an alarm signal is generated.

11. A system for detecting plasma excursions in a plasma chamber, comprising:

one or more voltage probes, each voltage probe configured to attach to a radio frequency electrode within a gas distribution system in a plasma chamber and sense a bias voltage of the radio frequency electrode during plasma processing; and

a plasma excursion detection unit, comprising;

one or more excursion detection modules, wherein each excursion detection module is configured to receive the bias voltage from one of the one or more voltage probes, wherein each excursion detection module comprises a plurality of analog filters arranged to filter the bias voltage to obtain an output voltage signal, and wherein each excursion module further comprises a comparator configured to compare the output voltage signal to a preset voltage signal and generate an alarm signal if the output voltage signal exceeds the preset voltage signal;

one or more connection ports configured to receive the preset voltage signal from a host controller and configured to send the alarm signal to the host controller; and

a data acquisition module configured to collect and transfer the output voltage signal from each of the one or more excursion detection modules to a data logging and diagnostic system.

12. The system of claim 11, wherein each of the one or more voltage probes is configured to withstand temperatures up to 160°

C.

13. The system of claim 12, wherein each of the one or more voltage probes comprise a voltage reducer configured to reduce the bias voltage by about a 100:

1 ratio.

14. The system of claim 11, wherein each of the excursion detection modules comprises a band pass filter configured to pass frequencies between about 250 Hz and about 50 kHz.

15. The system of claim 11, wherein each of the excursion detection modules comprises a low frequency pass filter and a high frequency pass filter.

16. The system of claim 15, wherein the low frequency pass filter is configured to pass frequencies less than about 50 kHz and the high frequency pass filter is configured to pass frequencies greater than about 250 Hz.

17. The system of claim 11, wherein each of the excursion detection modules comprises a plurality of notch filters and a low pass frequency filter configured to obtain a filtered direct current bias voltage signal prior to obtaining the output voltage signal.

18. The system of claim 11, wherein the system comprises at least two voltage probes attached to separate radio frequency electrodes.