Data cells with drivers and methods of making and operating the same
First Claim
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1. A method, comprising:
- forming a plurality of insulating trenches in a substrate;
forming a plurality of trench segments between the insulating trenches;
forming a plurality of fins to individually comprise multiple legs each, wherein the trench segments extend between pairs of adjacent fins but not between more than four fins.
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Abstract
Disclosed are methods and devices, among which is a device that includes a first semiconductor fin having a first gate, a second semiconductor fin adjacent the first semiconductor fin and having a second gate, and a third gate extending between the first semiconductor fin and the second semiconductor fin. In some embodiments, the third gate may not be electrically connected to the first gate or the second gate.
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Citations
20 Claims
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1. A method, comprising:
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forming a plurality of insulating trenches in a substrate; forming a plurality of trench segments between the insulating trenches; forming a plurality of fins to individually comprise multiple legs each, wherein the trench segments extend between pairs of adjacent fins but not between more than four fins. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20)
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19. A method, comprising:
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forming a plurality of longitudinally elongated and parallel insulating trenches in a substrate; forming a plurality of longitudinally elongated and spaced trench segments between the insulating trenches, the trench segments extending longitudinally parallel the insulating trenches; and forming a plurality of fins to individually comprise multiple legs each, wherein the trench segments extend between pairs of adjacent fins but not between more than four fins.
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Specification