System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor

• US 8,504,318 B2
• Filed: 03/05/2008
• Issued: 08/06/2013
• Est. Priority Date: 03/05/2008
• Status: Active Grant

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Inventors: Mendelson, Jay, Dille, Joseph C., Kehoe, Anthony B., Whiteley, Jeffrey L., Berger, Todd, Robertson, Walter Dennis III
• Primary Examiner(s): Charioui, Mohamed
• Assistant Examiner(s): Lee, Paul D
• Application Number:
  US12/440,367
• Publication Number:
  US 20100286931A1
• Time in Patent Office: 1,980 Days
• Field of Search: 702/45, 702/47, 702/50, 702/98, 702/99, 702/100, 702/130, 702/138
• US Class Current: 702/100
• CPC Class Codes: G01F 1/36 the pressure or differential pressure being created by the use of flow constriction
• CPC Class Codes: G01F 1/68 by using thermal effects
• CPC Class Codes: G01F 1/86 Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
• CPC Class Codes: G01F 1/88 with differential-pressure measurement to determine the volume flow
• CPC Class Codes: G01F 15/005 Valves valves in general F16K
• CPC Class Codes: G01F 25/10 of flowmeters
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence

Abstract

The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (ψ) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the thermal sensor based mass flow rate.

Claims

1. A system for determining a flow rate of a fluid, comprising:

at least one conduit defining a flow path along which the fluid flows;

at least one thermal sensor that generates a thermal sensor signal, which is proportional to a mass flow rate of the fluid;

at least one pressure sensor that generates a pressure sensor signal, which indicates the pressure of the fluid;

one or more electronics that;

generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal;

generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal;

generate at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate;

generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor to modify the pressure sensor based mass flow rate;

generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate;

determine whether operating conditions are substantially stable;

output the calibrated thermal sensor based mass flow rate in response to a determination that the operating conditions are substantially stable; and

output the calibrated pressure sensor based mass flow rate in response to a determination that the operating conditions are not substantially stable.

2. The system for determining a flow rate of a fluid according to claim 1, wherein:

the at least one pressure sensor includes first and second pressure sensors that generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

3. The system for determining a flow rate of a fluid according to claim 1, wherein the at least one pressure sensor is a differential pressure cell, which directly measures the pressure differential between two points in the fluid flow.

4. The system for determining a flow rate of a fluid according to claim 1, further comprising:

a valve that regulates the fluid flow, wherein;

the at least one pressure sensor includes first and second pressure sensors;

the first pressure sensor is located upstream from the valve and the second pressure sensor is located downstream from the valve;

the first and second pressure sensors generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

5. The system for determining a flow rate of a fluid according to claim 1, wherein:

the at least one calibration factor includes a series of calibration factors; and

the calibrated pressure sensor based mass flow rate is generated using the series of calibration factors to modify the pressure sensor based mass flow rate.

6. The system for determining a flow rate of a fluid according to claim 1, wherein the calibrated pressure sensor based mass flow rate substantially equals a thermal sensor mass flow rate during substantially stable flow conditions.

7. The system for determining a flow rate of a fluid according to claim 1, wherein the calibrated pressure sensor based mass flow rate, relative to a thermal sensor mass flow rate, more accurately reflects the fluid flow rate during or shortly after fluctuating fluid flow conditions.

8. The system for determining a flow rate of a fluid according to claim 1, further comprising a mass flow controller that controls a valve position, wherein the calibrated pressure sensor based mass flow rate is used by the mass flow controller to control the position of the valve.

9. The system for determining a flow rate of a fluid according to claim 1, wherein:

the one or more electronics generate a blended mass flow rate that is determined by using one or more weighing factors to generate a weighed calibrated pressure sensor based mass flow rate and a weighed thermal sensor based mass flow rate, which are combined to determine the blended mass flow rate.

10. The system for determining a flow rate of a fluid according to claim 1, wherein, during stable flow conditions, the one or more electronics determines one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal

11. The system for determining a flow rate of a fluid according to claim 1, wherein the one or more electronics generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

12. The system for determining a flow rate of a fluid according to claim 1, wherein:

the calibrated pressure sensor based mass flow rate is used to control a valve;

the one or more electronics store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

the one or more electronics generate an error signal in the event an improper valve sequencing trend is detected.

13. The system for determining a flow rate of a fluid according to claim 1, wherein:

the calibrated pressure sensor based mass flow rate is used to control a valve;

the one or more electronics calculate the a valve height necessary to achieve a flow set point; and

the one or more electronics generate an error signal in the event the calculated valve height falls outside acceptable limits.

14. A method of determining a flow rate of a fluid, comprising the steps of:

using at least one thermal sensor to generate a thermal sensor signal, which is proportional to a mass flow rate of the fluid;

using at least one pressure sensor to generate a pressure sensor measurement signal, which indicates the pressure of the fluid;

using one or more electronics to;

generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor measurement signal;

generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal;

generate at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate;

generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor to modify the pressure sensor based mass flow rate;

generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate;

determine whether operating conditions are substantially stable;

output the calibrated thermal sensor based mass flow rate in response to a determination that the operating conditions are substantially stable; and

output the calibrated pressure sensor based mass flow rate in response to a determination that the operating conditions are not substantially stable.

15. The method of determining a flow rate of a fluid according to claim 14, wherein:

the at least one pressure sensor includes first and second pressure sensors that generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

16. The method for determining a flow rate of a fluid according to claim 14, wherein the at least one pressure sensor is a differential pressure cell, which directly measures the pressure differential between two points in the fluid flow.

17. The method of determining a flow rate of a fluid according to claim 14, further comprising the step of:

using a valve to regulate the fluid flow, wherein;

the at least one pressure sensor includes first and second pressure sensors;

the first pressure sensor is located upstream from the valve and the second pressure sensor is located downstream from the valve;

the first and second pressure sensors generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

18. The method of determining a flow rate of a fluid according to claim 14, wherein:

the at least one calibration factor includes a series of calibration factors; and

the calibrated pressure sensor based mass flow rate is generated using the series of calibration factors to modify the pressure sensor based mass flow rate.

19. The method of determining a flow rate of a fluid according to claim 14, wherein the calibrated pressure sensor based mass flow rate substantially equals a thermal sensor mass flow rate during substantially stable flow conditions.

20. The method of determining a flow rate of a fluid according to claim 14, wherein the calibrated pressure sensor based mass flow rate, relative to the a thermal sensor mass flow rate, more accurately reflects the fluid flow rate during or shortly after fluctuating fluid flow conditions.

21. The method of determining a flow rate of a fluid according to claim 14, further comprising the step of using a mass flow controller to control a valve position, wherein the calibrated pressure sensor based mass flow rate is used by the mass flow controller to control the position of the valve.

22. The method of determining a flow rate of a fluid according to claim 14, further comprising the step of:

using the one or more electronics to generate a blended mass flow rate determined by using one or more weighing factors to generate a weighed calibrated pressure sensor based mass flow rate and a weighed thermal sensor based mass flow rate, which are combined to determine the blended mass flow rate.

23. The method of determining a flow rate of a fluid according to claim 14, further comprising the step of using the one or more electronics, during stable flow conditions, to determine one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal.

24. The method of determining a flow rate of a fluid according to claim 14, further comprising the step of using the one or more electronics to generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

25. The method of determining a flow rate of a fluid according to claim 14, further comprising the steps of:

using the calibrated pressure sensor based mass flow rate to control a valve;

using the one or more electronics to store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

using the one or more electronics to generate an error signal in the event an improper valve sequencing trend is detected.

26. The method of determining a flow rate of a fluid according to claim 14, wherein:

using the calibrated pressure sensor based mass flow rate to control a valve;

using the one or more electronics to calculate a valve height necessary to achieve a flow set point; and

using the one or more electronics to generate an error signal in the event the calculated valve height falls outside acceptable limits.

27. A non-transitory computer usable medium including executable code for executing a process for determining a flow rate of a fluid, the process comprising:

generating a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from a thermal sensor measurement signal from a thermal mass flow sensor;

generating a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from a pressure sensor signal from a pressure sensor;

generating at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate;

generating a calibrated pressure sensor based mass flow rate by using the at least one calibration factor to modify the pressure sensor based mass flow rate;

generating a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate;

determining whether operating conditions are substantially stable;

outputting the calibrated thermal sensor based mass flow rate in response to a determination that the operating conditions are substantially stable; and

outputting the calibrated pressure sensor based mass flow rate in response to a determination that the operating conditions are not substantially stable.

28. The non-transitory computer usable medium according to claim 27, wherein the process further comprises determining the pressure sensor based mass flow rate at least in part from pressure sensor signals received from at least two pressure sensors.

29. The non-transitory computer usable medium according to claim 27, wherein the process further comprises determining the pressure sensor based mass flow rate at least in part from at least one pressure sensor comprised of a differential pressure cell which directly measures the pressure differential between two points in the fluid flow.

30. The non-transitory computer usable medium according to claim 27, wherein the process further comprises:

using the calibrated pressure sensor based mass flow rate to control a valve that regulates fluid flow; and

determining the pressure sensor based mass flow rate at least in part from a-pressure sensor signals received from at least two a-pressure sensors, wherein a first pressure sensor is located upstream from the valve and a second pressure sensor is located downstream from the valve.

31. The non-transitory computer usable medium according to claim 27, wherein the process further comprises:

generating a series of calibration factors using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate; and

generating the calibrated pressure sensor based mass flow rate using the series of calibration factors to modify the pressure sensor based mass flow rate.

32. The non-transitory computer usable medium according to claim 27, wherein the process further comprises generating the calibrated pressure sensor based mass flow rate so that the calibrated pressure sensor based mass flow rate substantially equals a thermal sensor mass flow rate during substantially stable flow conditions.

33. The non-transitory computer usable medium according to claim 27, wherein the process further comprises generating the calibrated pressure sensor based mass flow rate so that the calibrated pressure sensor based mass flow rate, relative to a thermal sensor mass flow rate, more accurately reflects the fluid flow rate during or shortly after fluctuating fluid flow conditions.

34. The non-transitory computer usable medium according to claim 27, wherein the process further comprises using the calibrated pressure sensor based mass flow rate to control a position of a valve.

35. The non-transitory computer usable medium according to claim 27, wherein the process further comprises using one or more electronics to generate a blended mass flow rate determined by using one or more weighing factors to generate a weighed calibrated pressure sensor based mass flow rate and a weighed thermal sensor based mass flow rate, which are combined to determine the blended mass flow rate.

36. The non-transitory computer usable medium according to claim 27, wherein the process further comprises using one or more electronics, during stable flow conditions, to determine one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal.

37. The non-transitory computer usable medium according to claim 27, wherein the process further comprises using one or more electronics to generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

38. The non-transitory computer usable medium according to claim 27, wherein the process further comprises:

using the calibrated pressure sensor based mass flow rate to control a valve;

using one or more electronics to store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

using the one or more electronics to generate an error signal in the event an improper valve sequencing trend is detected.

39. The non-transitory computer usable medium according to claim 27, wherein the process further comprises:

using the calibrated pressure sensor based mass flow rate to control a valve;

using one or more electronics to calculate a valve height necessary to achieve a flow set point; and

using the one or more electronics to generate an error signal in the event the calculated valve height falls outside acceptable limits.

40. A system for determining a flow rate of a fluid, comprising:

at least one conduit defining a flow path along which the fluid flows;

at least one thermal sensor that generates a thermal sensor signal, which is proportional to a mass flow rate of the fluid;

at least one pressure sensor that generates a pressure sensor signal, which indicates the pressure of the fluid;

one or more electronics that;

generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal;

generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal;

generate at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate;

generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate; and

automatically update periodically the at least one calibration factor during substantially stable operating conditions when a set point, the thermal sensor based mass flow rate, and fluid pressure are substantially stable.

41. The system for determining a flow rate of a fluid according to claim 40, wherein:

the at least one pressure sensor includes first and second pressure sensors that generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

42. The system for determining a flow rate of a fluid according to claim 40, wherein the at least one pressure sensor is a differential pressure cell, which directly measures the pressure differential between two points in the fluid flow.

43. The system for determining a flow rate of a fluid according to claim 40, further comprising:

a valve that regulates the fluid flow, wherein;

the at least one pressure sensor includes first and second pressure sensors;

the first pressure sensor is located upstream from the valve and the second pressure sensor is located downstream from the valve;

the first and second pressure sensors generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

44. The system for determining a flow rate of a fluid according to claim 40, wherein:

the at least one calibration factor includes a series of calibration factors; and

the calibrated thermal sensor based mass flow rate is generated using the series of calibration factors to modify the thermal sensor based mass flow rate.

45. The system for determining a flow rate of a fluid according to claim 40, wherein the calibrated thermal sensor based mass flow rate substantially equals the pressure sensor mass flow rate during substantially stable flow conditions.

46. The system for determining a flow rate of a fluid according to claim 40, wherein the calibrated thermal sensor based mass flow rate, relative to the thermal sensor based mass flow rate, more accurately reflects the fluid flow rate.

47. The system for determining a flow rate of a fluid according to claim 40, further comprising a mass flow controller that controls a valve position, wherein the calibrated thermal sensor based mass flow rate is used by the mass flow controller to control the position of the valve.

48. The system for determining a flow rate of a fluid according to claim 40, wherein the one or more electronics generates an output signal that indicates the calibrated thermal sensor based mass flow rate.

49. The system for determining a flow rate of a fluid according to claim 40, wherein, during stable flow conditions, the one or more electronics determines one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal

50. The system for determining a flow rate of a fluid according to claim 40, wherein the one or more electronics generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

51. The system for determining a flow rate of a fluid according to claim 40, wherein:

the calibrated thermal sensor based mass flow rate is used to control a valve;

the one or more electronics store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

the one or more electronics generate an error signal in the event an improper valve sequencing trend is detected.

52. The system for determining a flow rate of a fluid according to claim 40, wherein:

the calibrated thermal sensor based mass flow rate is used to control a valve;

the one or more electronics calculate the a valve height necessary to achieve a flow set point; and

the one or more electronics generate an error signal in the event the calculated valve height falls outside acceptable limits.

53. A method of determining a flow rate of a fluid, comprising the steps of:

using at least one thermal sensor to generate a thermal sensor signal, which is proportional to a mass flow rate of the fluid;

using at least one pressure sensor to generate a pressure sensor measurement signal, which indicates the pressure of the fluid;

using one or more electronics to;

generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor measurement signal;

generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal;

generate at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate; and

generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate; and

automatically update periodically the at least one calibration factor during substantially stable operating conditions when a set point, the thermal sensor based mass flow rate, and fluid pressure are substantially stable.

54. The method of determining a flow rate of a fluid according to claim 53, wherein:

the at least one pressure sensor includes first and second pressure sensors that generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

55. The method for determining a flow rate of a fluid according to claim 53, wherein the at least one pressure sensor is a differential pressure cell, which directly measures the pressure differential between two points in the fluid flow.

56. The method of determining a flow rate of a fluid according to claim 53, further comprising the step of:

using a valve to regulate the fluid flow, wherein;

the at least one pressure sensor includes first and second pressure sensors;

the first pressure sensor is located upstream from the valve and the second pressure sensor is located downstream from the valve;

the first and second pressure sensors generate pressure sensor signals that indicate the pressure of the fluid; and

the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signals.

57. The method of determining a flow rate of a fluid according to claim 53, wherein:

the at least one calibration factor includes a series of calibration factors; and

the calibrated thermal sensor based mass flow rate is generated using the series of calibration factors to modify the thermal sensor based mass flow rate.

58. The method of determining a flow rate of a fluid according to claim 53, wherein the calibrated thermal sensor based mass flow rate substantially equals the pressure sensor mass flow rate during substantially stable flow conditions.

59. The method of determining a flow rate of a fluid according to claim 53, wherein the calibrated thermal sensor based mass flow rate, relative to the thermal sensor based mass flow rate, more accurately reflects the fluid flow rate.

60. The method of determining a flow rate of a fluid according to claim 53, further comprising the step of using a mass flow controller to control a valve position, wherein the calibrated thermal sensor based mass flow rate is used by the mass flow controller to control the position of the valve

61. The method of determining a flow rate of a fluid according to claim 53, further comprising the step of using the one or more electronics to generate an output signal that indicates the calibrated thermal sensor based mass flow rate.

62. The method of determining a flow rate of a fluid according to claim 53, further comprising the step of using the one or more electronics, during stable flow conditions, to determine one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal.

63. The method of determining a flow rate of a fluid according to claim 53, further comprising the step of using the one or more electronics to generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

64. The method of determining a flow rate of a fluid according to claim 53, further comprising the steps of:

using the calibrated thermal sensor based mass flow rate to control a valve;

using the one or more electronics to store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

using the one or more electronics to generate an error signal in the event an improper valve sequencing trend is detected.

65. The method of determining a flow rate of a fluid according to claim 53, wherein:

using the calibrated thermal sensor based mass flow rate to control a valve;

using the one or more electronics to calculate a valve height necessary to achieve a flow set point; and

using the one or more electronics to generate an error signal in the event the calculated valve height falls outside acceptable limits.

66. A non-transitory computer usable medium including executable code for executing a process for determining a flow rate of a fluid, the process comprising:

generating a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from a thermal sensor measurement signal from a thermal mass flow sensor;

generating a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from a pressure sensor signal from a pressure sensor;

generating at least one calibration factor using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate;

generating a calibrated thermal sensor based mass flow rate by using the at least one calibration factor to modify the thermal sensor based mass flow rate; and

automatically updating periodically the at least one calibration factor during substantially stable operating conditions when a set point, the thermal sensor based mass flow rate, and fluid pressure are substantially stable.

67. The non-transitory computer usable medium according to claim 66, wherein the process further comprises determining the pressure sensor based mass flow rate at least in part from pressure sensor signals received from at least two pressure sensors.

68. The non-transitory computer usable medium according to claim 66, wherein the process further comprises determining the pressure sensor based mass flow rate at least in part from at least one pressure sensor comprised of a differential pressure cell which directly measures the pressure differential between two points in the fluid flow.

69. The non-transitory computer usable medium according to claim 66, wherein the process further comprises:

using the calibrated thermal sensor based mass flow rate to control a valve that regulates fluid flow; and

determining the pressure sensor based mass flow rate at least in part from a-pressure sensor signals received from at least two pressure sensors, wherein a first pressure sensor is located upstream from the valve and the a second pressure sensor is located downstream from the valve.

70. The non-transitory computer usable medium according to claim 66, wherein the process further comprises:

generating a series of calibration factors using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate; and

generating the calibrated thermal sensor based mass flow rate using the series of calibration factors to modify the thermal sensor based mass flow rate.

71. The non-transitory computer usable medium according to claim 66, wherein the process further comprises generating the calibrated thermal sensor based mass flow rate so that the calibrated thermal sensor based mass flow rate substantially equals the thermal sensor based mass flow rate during substantially stable flow conditions.

72. The non-transitory computer usable medium according to claim 66, wherein the process further comprises generating the calibrated thermal sensor based mass flow rate so that the calibrated thermal sensor based mass flow rate, relative to the thermal sensor based mass flow rate, more accurately reflects the fluid flow rate.

73. The non-transitory computer usable medium according to claim 66, wherein the process further comprises using the calibrated thermal sensor based mass flow rate to control a position of a valve.

74. The non-transitory computer usable medium according to claim 66, wherein the process further comprises using one or more electronics to generate an output signal that indicates the calibrated thermal sensor based mass flow rate.

75. The non-transitory computer usable medium according to claim 66, wherein the process further comprises using one or more electronics, during stable flow conditions, to determine one or more fluid variables other than the fluid flow rate, wherein the one or more fluid variables are determined, at least in part from the pressure sensor signal and the thermal sensor signal.

76. The non-transitory computer usable medium according to claim 66, wherein the process further comprises using one or more electronics to generate an error signal when the at least one calibration factor falls outside of one or more acceptable limits.

77. The non-transitory computer usable medium according to claim 66, wherein the process further comprises:

using the calibrated thermal sensor based mass flow rate to control a valve;

using one or more electronics to store a plurality of valve positions and determine whether the stored valve positions indicate a trend that is characteristic of improper valve sequencing; and

using the one or more electronics to generate an error signal in the event an improper valve sequencing trend is detected.

78. The non-transitory computer usable medium according to claim 66, wherein the process further comprises:

using the calibrated thermal sensor based mass flow rate to control a valve;

using one or more electronics to calculate a valve height necessary to achieve a flow set point; and

using the one or more electronics to generate an error signal in the event the calculated valve height falls outside acceptable limits.