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Method for manufacturing an on-chip BALUN transformer

  • US 8,505,193 B2
  • Filed: 05/16/2012
  • Issued: 08/13/2013
  • Est. Priority Date: 08/31/2004
  • Status: Active Grant
First Claim
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1. A method for manufacturing an on-chip BALUN transformer using a manufacturing process, the method comprising:

  • forming a first winding conductive path in a first metal layer wherein the forming a first winding conductive path further comprises;

    forming an essentially symmetrical primary inductor comprising of a plurality of symmetrical windings, each winding ending with a metal segment on the first metal layer causing the next winding to be internal to the previous winding;

    forming an insulator layer using an insulating material to insulate between said first metal layer and at least a subsequent metal layer;

    forming a symmetrical second winding conductive path in a second metal layer over at least an insulating layer that insulates the second winding conductive path from at least the first winding conductive path, the second winding conductive path essentially placed in vertical and horizontal displacement with respect of a winding path of the first winding conductive path; and

    ,forming shunts to ensure the continuity of each of the first winding conductive path and the second winding conductive path.

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