Gimbaled scanning micro-mirror actuation scheme and architecture

• US 8,508,098 B2
• Filed: 04/10/2007
• Issued: 08/13/2013
• Est. Priority Date: 12/03/2006
• Status: Active Grant

• Current Assignee: Maradin Ltd.
• Original Assignee: Maradin Technologies Ltd.
• Inventors: Lubianiker, Yoram
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US12/517,449
• Publication Number:
  US 20100020379A1
• Time in Patent Office: 2,317 Days
• Field of Search: 310/309
• US Class Current: 310/309
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129

Abstract

A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.

Claims

1. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:

(a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and

(b) an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar,

wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, and

wherein said electromagnetic actuator has a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof.

2. The device of claim 1, wherein said electromagnetic actuator, excites negligible residual actuation force on said second DOF.

3. The device of claim 1, wherein said electrostatic actuator, uses electrostatic fringing fields, thereby creating an actuation force and defines coplanar electrodes including rotor and stator electrodes having the same potential,

wherein the electrostatic actuator has a plane of symmetry which includes coplanar rotor and stator electrodes creating an attraction force therebetween which acts as a pure moment to yield torsional rotation of said horizontal axis.

4. The device of claim 3, wherein said electrostatic actuator has a symmetric structure, operative for actuating forces produced by said electrostatic actuator, to create only a rotational movement of said second DOF about said horizontal axis,

wherein said coplanar rotor and stator electrodes are included in the electrostatic actuator'"'"'s symmetric structure and create an attraction force therebetween which acts as a pure moment to yield torsional rotation of said horizontal axis,

and wherein the electrostatic actuator'"'"'s symmetric structure is symmetric with respect to the horizontal plane and with respect to the vertical axis.

5. The device of claim 4, wherein said electrostatic actuator, excites negligible residual actuation force on said first DOF.

6. The device of claim 3, wherein said electrostatic actuator has a sinusoidal electromechanical response.

7. The device of claim 1, wherein said electrostatic actuator, uses electrostatic fringing fields, thereby creating an actuation force and wherein there is no electrical potential difference between both sides of the structural material of said electrostatic actuator.

8. The device of claim 1, wherein said electrostatic actuator, actuates said second degree of freedom in the horizontal scan direction.

9. The device of claim 1, wherein said electromagnetic actuator, actuates said first degree of freedom in the vertical scan direction.

10. The device of claim 1, wherein said electromagnetic actuator, has a linear electromechanical response.

11. The device of claim 1, wherein said electrostatic actuator, comprises a frequency sensor with high signal to noise ratio.

12. The device of claim 1, wherein said electro-magnetic actuator has a symmetric structure, operative for actuating forces produced by said electro-magnetic actuator and for creating only a rotational movement of said second DOF about said horizontal axis,

wherein the electro-magnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the horizontal axis and engaging top and bottom ends thereof.

13. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:

(a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and

(b) an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar,

wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically,

wherein said electromagnetic actuator comprises;

(a) external fixed electromagnet coils; and

(b) internal rotating magnets, thereby to define an electromagnetic subsystem,

and wherein the electromagnetic subsystem includes an electro-magnetic circuit, a ferromagnetic material, said coils, and said magnets, and is symmetrically located around the vertical axis, such that the electro-magnetic circuit, the ferromagnetic material, the coils, and the magnets each encompass the vertical axis.

14. The device of claim 13, wherein said rotating magnets are affixed to said vertical axis and actuated by said electromagnet coils.

15. The device of claim 13, wherein one or more of said electromagnetic actuators can be used on each side of said vertical axis.

16. The device of claim 13, wherein said electromagnetic actuator has a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof.

17. The device of claim 16, wherein said electromagnetic actuator, excites negligible residual actuation force on said second DOF.

18. The device of claim 16, wherein said electromagnetic actuator, has a linear electromechanical response.

19. The device of claim 16, wherein said electro-magnetic actuator has a symmetric structure, operative for actuating forces produced by said electro-magnetic actuator and for creating only a rotational movement of said second DOF about said horizontal axis,

wherein the electro-magnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the horizontal axis and engaging top and bottom ends thereof.

20. The device of claim 13, wherein said electrostatic actuator, uses electrostatic fringing fields, thereby creating an actuation force and defines coplanar electrodes including rotor and stator electrodes having the same potential,

wherein the electrostatic actuator has a plane of symmetry which includes coplanar rotor and stator electrodes creating an attraction force therebetween which acts as a pure moment to yield torsional rotation of said horizontal axis.

21. The device of claim 20, wherein said electrostatic actuator has a symmetric structure, operative for actuating forces produced by said electrostatic actuator, to create only a rotational movement of said second DOF about said horizontal axis,

wherein said coplanar rotor and stator electrodes are included in the electrostatic actuator'"'"'s symmetric structure and create an attraction force therebetween which acts as a pure moment to yield torsional rotation of said horizontal axis,

and wherein the electrostatic actuator'"'"'s symmetric structure is symmetric with respect to the horizontal plane and with respect to the vertical axis.

22. The device of claim 21, wherein said electrostatic actuator, excites negligible residual actuation force on said first DOF.

23. The device of claim 20, wherein said electrostatic actuator has a sinusoidal electromechanical response.

24. The device of claim 13, wherein said electrostatic actuator, uses electrostatic fringing fields, thereby creating an actuation force and wherein there is no electrical potential difference between both sides of the structural material of said electrostatic actuator.

25. The device of claim 13, wherein said rotating magnets are affixed to said vertical axis and actuated by said electromagnet coils.

26. The device of claim 13, wherein one or more of said electromagnetic actuators can be used on each side of said vertical axis.

27. The device of claim 13, wherein said electrostatic actuator, actuates said second degree of freedom in the horizontal scan direction.

28. The device of claim 13, wherein said electromagnetic actuator, actuates said first degree of freedom in the vertical scan direction.

29. The device of claim 13, wherein said electrostatic actuator, comprises a frequency sensor with high signal to noise ratio.

30. A method for using a micro-electro-mechanical system device to actuate a gimbaled element, the method comprising:

(a) using an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and

(b) using an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar,

wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, and

also comprising providing an electromagnetic actuator with a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof.