Gimbaled scanning micro-mirror actuation scheme and architecture
First Claim
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1. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:
- (a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and
(b) an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar,wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, andwherein said electromagnetic actuator has a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof.
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Abstract
A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.
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Citations
30 Claims
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1. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:
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(a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and (b) an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar, wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, and wherein said electromagnetic actuator has a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:
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(a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and (b) an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar, wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, wherein said electromagnetic actuator comprises; (a) external fixed electromagnet coils; and (b) internal rotating magnets, thereby to define an electromagnetic subsystem, and wherein the electromagnetic subsystem includes an electro-magnetic circuit, a ferromagnetic material, said coils, and said magnets, and is symmetrically located around the vertical axis, such that the electro-magnetic circuit, the ferromagnetic material, the coils, and the magnets each encompass the vertical axis. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method for using a micro-electro-mechanical system device to actuate a gimbaled element, the method comprising:
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(a) using an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and (b) using an electrostatic actuator for actuating a second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar, wherein the horizontal axis comprises an internal axis driven electrostatically and the vertical axis comprises an external axis driven electromagnetically, and also comprising providing an electromagnetic actuator with a symmetric structure, which is symmetric with respect to the horizontal plane, thereby to define a plane of symmetry, and with respect to the vertical z axis, thereby to define an axis of symmetry, and which is operative for actuating forces produced by said electromagnetic actuator, to create only a rotational movement of said first DOF about said vertical axis, wherein the electromagnetic actuator'"'"'s symmetric structure includes two pairs of magnet-assemblies, each individual pair from among said pairs comprising two magnets arranged symmetrically about the vertical axis and engaging top and bottom ends thereof.
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Specification