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Interface for MEMS inertial sensors

  • US 8,508,290 B2
  • Filed: 09/13/2011
  • Issued: 08/13/2013
  • Est. Priority Date: 09/14/2010
  • Status: Active Grant
First Claim
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1. An integrated circuit for interfacing with a MEMS sensor, comprising:

  • an electrostatic actuation controller configured to generate an actuation signal and an excitation signal and to receive a sense information signal; and

    a sensing capacitance-to-voltage converter responsive to a signal from the MEMS sensor for producing a sense signal;

    wherein the electrostatic actuation controller is configured to, during at least some signal transitions of the actuation signal, apply a control signal to the sensing capacitance-to-voltage converter to cause it to be reset, disabled or powered down.

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