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System and method for estimating the height of an object using tomosynthesis-like techniques

  • US 8,508,591 B2
  • Filed: 02/05/2010
  • Issued: 08/13/2013
  • Est. Priority Date: 02/05/2010
  • Status: Active Grant
First Claim
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1. A method to estimate the height profile of an object, said method comprising:

  • acquiring a plurality of raw images of an object to be characterized using at least one imaging device, where said plurality of raw images are representative of a plurality of spatial shifts between said at least one imaging device and said object to be characterized occurring parallel to a surface that the object to be characterized is resting upon;

    processing said plurality of raw images to generate a plurality of composite images, where each composite image of said plurality of composite images corresponds to a unique image shift between spatially adjacent raw images and is made up of a plurality of image pixel locations;

    calculating a volatility parameter value within a neighborhood of at least one same image pixel location of said plurality of image pixel locations for each of said plurality of composite images;

    determining which composite image of said plurality of composite images has a largest volatility parameter value for said at least one same image pixel location;

    transforming said unique image shift, corresponding to said composite image having said largest volatility parameter value, into a height value representative of a height dimension of said at least one same image pixel location;

    generating a height value for each image pixel location of said plurality of image pixel locations to form a height profile image of said object to be characterized; and

    comparing said height profile image to at least one reference image to find any defects in said object to be characterized.

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