Method of burn-in testing for thermally assisted head

• US 8,509,036 B2
• Filed: 12/09/2010
• Issued: 08/13/2013
• Est. Priority Date: 12/09/2010
• Status: Active Grant

• Current Assignee: ROHM Co., Ltd., TDK Corporation
• Original Assignee: ROHM Co., Ltd., TDK Corporation
• Inventors: Shimazawa, Koji, Tanaka, Kosuke, Fujii, Ryuji, Honda, Takashi, Nagai, Yoshiteru, Noma, Tsuguki, Mitsuzawa, Hosei
• Primary Examiner(s): TRAN, THANG V
• Application Number:
  US12/964,168
• Publication Number:
  US 20120147717A1
• Time in Patent Office: 978 Days
• Field of Search: 369/13.02, 369/13.13, 369/13.32, 369/13.33, 360/59, 296/030.1, 296/030.7, 296/030.9, 296/031.9, 324/750.01, 324/750.05, 324/754.23, 257/48
• US Class Current: 369/13.13
• CPC Class Codes: G11B 2005/0021 Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
• CPC Class Codes: G11B 5/314 where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers G11B5/3196 takes precedence
• CPC Class Codes: G11B 5/3166 Testing or indicating in relation thereto, e.g. before the fabrication is completed
• CPC Class Codes: G11B 5/3173 Batch fabrication, i.e. producing a plurality of head structures in one batch
• CPC Class Codes: G11B 5/3189 Testing
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 29/49021 Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
• CPC Class Codes: Y10T 29/49032 Fabricating head structure or component thereof

Abstract

A plurality of laser diode units is tested in a bar state, each of the laser diode units in which a laser diode that includes a first electrode and a second electrode formed on surfaces facing each other and that is mounted on a mounting surface of a submount such that the first electrode faces the mounting surface of the submount. The method includes preparing a bar in which mounting areas each of which includes the laser diode unit formed thereon and dicing margins for separating the bar into the separate laser diode units are alternatively aligned along a longitudinal direction wherein a first pad electrically connected with the first electrode of the laser diode is disposed on the mounting surface of each of the mounting areas of the submounts and a second pad electrically connected to the first pad of either one of the mounting areas that are adjacent to the dicing margin is disposed on the mounting surface of each of the dicing margins of the submounts: contacting sheet-shaped probes to the second electrode and the second pad at a slantwise angle with respect to the second electrode and the second pad, and pressing the probes to the second electrode and the second pad while deforming the probes; and providing a potential difference between the second electrode and the second pad through the probes so that the laser diode emits laser light.

Claims

1. A method of testing a plurality of laser diode units in a bar state, each of the laser diode units in which a laser diode that includes a first electrode and a second electrode formed on surfaces facing each other and that is mounted on a mounting surface of a submount such that the first electrode faces the mounting surface of the submount, comprising:

a step of preparing a bar in which mounting areas each of which includes the laser diode unit formed thereon and dicing margins for separating the bar into the separate laser diode units are alternatively aligned along a longitudinal direction wherein a first pad electrically connected with the first electrode of the laser diode is disposed on the mounting surface of each of the mounting areas of the submounts and a second pad electrically connected to the first pad of either one of the mounting areas that are adjacent to the dicing margin is disposed on the mounting surface of each of the dicing margins of the submounts;

a step of contacting sheet-shaped probes to the second electrode and the second pad at a slantwise angle with respect to the second electrode and the second pad, and pressing the probes to the second electrode and the second pad while deforming the probes; and

a step of providing a potential difference between the second electrode and the second pad through the probes so that the laser diode emits laser light.

2. The method of testing according to claim 1, wherein,

in the step of contacting the probes, a plurality of the probes are simultaneously pressed to the second electrodes and second pads of the plurality of the laser diodes, and

in the step of emitting laser light, each of the plurality of the laser diodes in which the probes are pressed to the second electrode and the second pad simultaneously emits laser light.

3. The method of testing according to claim 2, wherein,

in the step of contacting the probes, the probes which are an integrated-type probe assembly in which each of the plurality of the probes may deform separately are simultaneously pressed to the second electrodes and the second pads of the plurality of the laser diodes.

4. The method of testing according to claim 1, wherein

a length of the second pad in a direction orthogonal to the longitudinal direction is the same as or longer than a length of the laser diode.

5. The method of testing according to claim 1, wherein

the submount includes a photodiode, mounted on the mounting surface, that receives laser light emitted from the laser diode and a connection wiring that extends on the mounting surface and electrically connects the first pad with the second pad,

the submount is electrically connected with a cathode electrode of the photodiode, and

at least an area across the mounting area and the dicing margin of the connection wiring is formed of a material having a Vickers hardness of 100 or more.

6. The method of testing according to claim 1, wherein

the first electrode is a positive electrode and the second electrode is a negative electrode.

7. A method of manufacturing a magnetic head, comprising:

testing a plurality of laser diode units in a bar state based on the method of claim 1;

separating the tested bar of the laser diode units into separated laser diode units;

manufacturing the magnetic head by firmly attaching one of the separated laser diode units to a magnetic head slider that includes;

a waveguide through which laser light emitted from the laser diode propagates as propagation light,

a near field generator that generates near field light from the propagation light at an air bearing surface, and

a main pole for recording that is disposed adjacent to the near field generator and of which an edge part is positioned on the air bearing surface.