Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration
First Claim
1. A method for manufacture of thin film photovoltaic cells in a system with single-chamber configuration having multiple compartments therein, the method comprising:
- providing a substrate into a first compartment within a chamber, the substrate being optically transparent and being characterized by a lateral dimension of about 1 meter or greater for manufacture a thin film photovoltaic cell;
forming an electrode layer overlying the substrate;
transferring the substrate within the chamber to a second compartment to subject the electrode layer to a copper bearing sputtering target;
forming a copper-bearing layer overlying the electrode layer;
transferring the substrate within the chamber to a third compartment to subject the copper-bearing layer to an indium sputtering target;
forming an indium layer overlying the copper-bearing layer, thereby forming a Cu-rich Cu—
In composite film having a Cu;
In atomic ratio of 1.2;
1 and greater;
transferring the substrate to a fourth compartment within the chamber, the compartment comprising a plurality of nozzles for supplying gas phase sulfur-bearing species and one or more heaters for supplying thermal energy; and
performing a thermal treatment process to form a photovoltaic absorber layer by reacting the Cu-rich Cu—
In composite film with the sulfur-bearing species.
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Accused Products
Abstract
A system for large scale manufacture of thin film photovoltaic cells includes a chamber comprising a plurality of compartments in a common vacuum ambient therein. Additionally, the system includes one or more shutter screens removably separating each of the plurality of compartments. The system further includes one or more transfer tools configured to transfer a substrate from one compartment to another without breaking the common vacuum ambient. The substrate is optically transparent and is characterized by a lateral dimension of about 1 meter or greater for a solar module. Embodiments of the invention provide compartments configured to subject the substrate to one or more thin film processes to form a Cu-rich Cu—In composite material overlying the substrate and at least one of the plurality of compartments is configured to subject the Cu-rich Cu—In composite material to a thermal process to form a chalcogenide structured material.
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Citations
20 Claims
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1. A method for manufacture of thin film photovoltaic cells in a system with single-chamber configuration having multiple compartments therein, the method comprising:
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providing a substrate into a first compartment within a chamber, the substrate being optically transparent and being characterized by a lateral dimension of about 1 meter or greater for manufacture a thin film photovoltaic cell; forming an electrode layer overlying the substrate; transferring the substrate within the chamber to a second compartment to subject the electrode layer to a copper bearing sputtering target; forming a copper-bearing layer overlying the electrode layer; transferring the substrate within the chamber to a third compartment to subject the copper-bearing layer to an indium sputtering target; forming an indium layer overlying the copper-bearing layer, thereby forming a Cu-rich Cu—
In composite film having a Cu;
In atomic ratio of 1.2;
1 and greater;transferring the substrate to a fourth compartment within the chamber, the compartment comprising a plurality of nozzles for supplying gas phase sulfur-bearing species and one or more heaters for supplying thermal energy; and performing a thermal treatment process to form a photovoltaic absorber layer by reacting the Cu-rich Cu—
In composite film with the sulfur-bearing species. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for manufacture of thin film photovoltaic cells in a system with single-chamber configuration having multiple compartments therein, the method comprising:
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providing a substrate into a first compartment within the chamber, the substrate being optically transparent and being characterized by a lateral dimension of about 1 meter or greater for manufacture a thin film photovoltaic cell; forming an electrode layer overlying the substrate; transferring the substrate to a second compartment within the chamber to subject the electrode layer to a copper bearing sputtering target and an indium bearing sputtering target; forming a copper-bearing layer overlying the electrode layer; forming an indium layer overlying the copper-bearing layer, thereby forming a Cu-rich Cu—
In composite film having a Cu;
In atomic ratio of 1.2;
1 and greater;transferring the substrate to a third compartment within the chamber, the compartment comprising a plurality of nozzles for supplying gas phase sulfur-bearing species and one or more heaters for supplying thermal energy; and performing a thermal treatment process to form a photovoltaic absorber layer by reacting the Cu-rich Cu—
In composite film with the sulfur-bearing species. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification