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Integrated MEMS devices with controlled pressure environments by means of enclosed volumes

  • US 8,513,747 B1
  • Filed: 12/11/2012
  • Issued: 08/20/2013
  • Est. Priority Date: 07/03/2012
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • two or more enclosures of different volumes;

    at least one of the two or more enclosures comprising at least one cavity;

    a first structure within a first enclosure; and

    a second structure within a second enclosure,wherein the volume of the first enclosure is different from the volume of the second enclosure, wherein a substrate defines part of the first and second sealed enclosures, wherein the substrate contains two or more etched cavities of different depths.

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