Methods and apparatus for tuning matching networks

• US 8,513,889 B2
• Filed: 10/06/2010
• Issued: 08/20/2013
• Est. Priority Date: 10/21/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Zhang, Chunlei, Ramaswamy, Kartik, Cruse, James P., Liao, Bryan, Shoji, Sergio F., Semenin, Andrey
• Primary Examiner(s): VU, DAVID HUNG
• Application Number:
  US12/899,048
• Publication Number:
  US 20110162798A1
• Time in Patent Office: 1,049 Days
• Field of Search: 315/111.21, 315/111.41, 315/111.31, 315/111.71, 315/111.51, 315/111.61, 118/715, 118/723.R, 118/723.MR, 118/723.MA, 118/723.AN
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.

Claims

1. A method of tuning a matching network during a plasma process, comprising:

(a) providing a matching network coupling an RF source to a load, the matching network having a first tunable element disposed at a first set point;

(b) increasing a value of the first tunable element by a first step above the first set point;

(c) sensing a first adjusted value of a reflected RF power;

(d) decreasing the value of the first tunable element by the first step below the first set point;

(e) sensing a second adjusted value of the reflected RF power;

(f) comparing the first and the second adjusted values of the reflected RF power; and

(g) moving the first tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

2. The method of claim 1, further comprising:

(h) determining that the first and second adjusted values of the reflected RF power are not less than an initial reflected RF power corresponding to the matching network having a first tunable element disposed at the first set point;

(i) increasing the value of the first tunable element by a second step above the second set point, the second step having a value less than that of the first step;

(j) sensing a third adjusted value of the reflected RF power;

(k) decreasing the value of the first tunable element by the second step below the second set point;

(l) sensing a fourth adjusted value of the reflected RF power; and

(m) comparing the third and the fourth adjusted values of the reflected RF power;

wherein (h) through (m) occur between (f) and (g).

3. The method of claim 2, further comprising:

determining that the lowest adjusted value of reflected RF power is within an acceptable range of reflected RF power; and

maintaining the first tunable element at a position corresponding to the lowest adjusted value of the reflected RF power.

4. The method of claim 1, further comprising:

determining the lowest adjusted value of reflected RF power is within an acceptable range of reflected RF power; and

maintaining the first tunable element at a position corresponding to the lowest adjusted value of the reflected RF power.

5. The method of claim 1, further comprising:

(h) determining that the lowest adjusted value of reflected RF power is not within an acceptable range of reflected RF power;

(i) increasing a value of the first tunable element by a first step above the first set point;

(j) sensing a first adjusted value of a reflected RF power;

(k) decreasing the value of the first tunable element by the first step below the first set point;

(l) sensing a second adjusted value of the reflected RF power;

(m) comparing the first and the second adjusted values of the reflected RF power; and

(n) moving the first tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

6. The method of claim 5, further comprising:

repeating (h) through (n) until the lowest adjusted value of reflected RF power is within an acceptable range of reflected RF power.

7. The method of claim 1, wherein the first tunable elements are capacitors or capacitive shunts to ground.

8. The method of claim 1, wherein the method further comprises:

performing (a) through (g) for a first matching network coupled to a first RF source; and

repeating (a) through (g) for a second matching network coupled to a second RF source.

9. The method of claim 1, wherein the matching network further comprises a second tunable element disposed at a first set point, and further comprising:

(h) increasing a value of the second tunable element by a second step above the first set point;

(i) sensing a third adjusted value of the reflected RF power;

(j) decreasing the value of the second tunable element by the second step below the first set point; and

(k) sensing a fourth adjusted value of the reflected RF power;

wherein (f) further comprises comparing the first, second, third, and fourth adjusted values of the reflected RF power, and wherein (h) through (k) occur prior to (f) and (g), and wherein (g) further comprises moving either the first tunable element or the second tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

10. The method of claim 1, wherein the matching network further comprises a second tunable element disposed at a first set point, and further comprising:

(h) increasing a value of the second tunable element by a second step above the first set point at the same time as one of increasing or decreasing the value of the first tunable element by the first step;

(i) decreasing the value of the second tunable element by the second step below the first set point while keeping the first tunable element in the same position as in (h); and

(i) sensing a third adjusted value of the reflected RF power;

wherein (f) further comprises comparing the first, second, and third adjusted values of the reflected RF power, wherein (h) through (j) occur prior to (f) and (g), and wherein (g) further comprises moving either or both of the first tunable element or the second tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

11. A non-transitory computer readable medium, having instructions stored thereon which, when executed by a controller, performs a method that causes the tuning of a match network, the match network coupling an RF source to a load and having a tunable element disposed at a first set point, the method further comprising:

(a) increasing a value of the tunable element by a first step above the first set point;

(b) sensing a first adjusted value of a reflected RF power;

(c) decreasing the value of the tunable element by the first step below the first set point;

(d) sensing a second adjusted value of the reflected RF power;

(e) comparing the first and the second adjusted values of the reflected RF power; and

(f) moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

12. The computer readable medium of claim 11, further comprising:

(g) determining that the first and second adjusted values of the reflected RF power are not less than an initial reflected RF power corresponding to the matching network having a tunable element disposed at the first set point;

(h) increasing the value of the tunable element by a second step above the second set point, the second step having a value less than that of the first step;

(i) sensing a third adjusted value of the reflected RF power;

(j) decreasing the value of the tunable element by the second step below the second set point;

(k) sensing a fourth adjusted value of the reflected RF power; and

(l) comparing the third and the fourth adjusted values of the reflected RF power;

wherein (g) through (l) occur between (e) and (f).

13. The computer readable medium of claim 12, further comprising:

determining the lowest adjusted value of reflected RF power is within an acceptable range of reflected power; and

maintaining the tunable element at a position corresponding to the lowest adjusted value of the reflected RF power.

14. The computer readable medium of claim 11, further comprising:

determining the lowest adjusted value of reflected RF power is within an acceptable range of reflected power; and

maintaining the tunable element at a position corresponding to the lowest adjusted value of the reflected RF power.

15. The computer readable medium of claim 11, further comprising:

(g) determining that the lowest adjusted value of reflected RF power is not within an acceptable range of reflected RF power;

(h) increasing a value of the tunable element by a first step above the first set point;

(i) sensing a first adjusted value of a reflected RF power;

(j) decreasing the value of the tunable element by the first step below the first set point;

(k) sensing a second adjusted value of the reflected RF power;

(l) comparing the first and the second adjusted values of the reflected RF power; and

(m) moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.

16. The computer readable medium of claim 11, wherein the method further comprises:

performing the method a number of times wherein a first RF source provides power, then performing the method a number of times wherein a second RF source provides power.

17. The computer readable medium of claim 11, wherein the method further comprises:

performing (a) through (f) for a first matching network coupled to a first RF source; and

repeating (a) through (f) for a second matching network coupled to a second RF source.

18. The computer readable medium of claim 11, wherein the matching network further comprises a second tunable element disposed at a first set point, and further comprising:

(g) increasing a value of the second tunable element by a second step above the first set point;

(h) sensing a third adjusted value of the reflected RF power;

(i) decreasing the value of the second tunable element by the second step below the first set point; and

(j) sensing a fourth adjusted value of the reflected RF power;

wherein (e) further comprises comparing the first, second, third, and fourth adjusted values of the reflected RF power, and wherein (g) through (j) occur prior to (e) and (f).

19. The computer readable medium of claim 11, wherein the matching network further comprises a second tunable element disposed at a first set point, and further comprising:

(g) increasing a value of the second tunable element by a second step above the first set point at the same time as one of increasing or decreasing the value of the tunable element by the first step;

(h) decreasing the value of the second tunable element by the second step below the first set point while keeping the tunable element in the same position as in (h); and

(i) sensing a third adjusted value of the reflected RF power;

wherein (e) further comprises comparing the first, second, and third adjusted values of the reflected RF power, and wherein (g) through (i) occur prior to (e) and (f).

20. A system for plasma processing of a substrate, comprising:

a process chamber for processing a substrate;

a first RF source coupled to the process chamber through a first matching network coupled;

a second RF source coupled to the process chamber through a second matching network; and

a controller comprising computer readable medium having instructions stored thereon that, when executed, performs a method that causes the controller to tune the first matching network and the second matching network to a load during a plasma process, wherein the first matching network coupled the first RF source to the load and includes a first tunable element disposed at a first set point, and wherein the method further comprises;

(a) increasing a value of the first tunable element by a first step above the first set point;

(b) sensing a first adjusted value of a reflected RF power;

(c) decreasing the value of the first tunable element by the first step below the first set point;

(d) sensing a second adjusted value of the reflected RF power;

(e) comparing the first and the second adjusted values of the reflected RF power; and

(f) moving the first tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power.