Apparatus and method of testing singulated dies

• US 8,513,969 B2
• Filed: 06/08/2010
• Issued: 08/20/2013
• Est. Priority Date: 09/19/2005
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Dozier, Thomas H. II, Eldridge, Benjamin N., Khandros, Igor Y., Miller, Charles A., Hsu, David H.
• Primary Examiner(s): ISLA RODAS, RICHARD
• Application Number:
  US12/796,457
• Publication Number:
  US 20100244873A1
• Time in Patent Office: 1,169 Days
• Field of Search: 324754-765, 324/158.1, 324/754.09, 324/754.01
• US Class Current: 324/754.09
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Abstract

An exemplary die carrier is disclosed. In some embodiments, the die carrier can hold a plurality of singulated dies while the dies are tested. The dies can be arranged on the carrier in a pattern that facilities testing the dies. The carrier can be configured to allow interchangeable interfaces to different testers to be attached to and detached from the carrier. The carrier can also be configured as a shipping container for the dies.

Claims

1. An apparatus comprising:

a die carrier comprising;

a carrier;

die sites on the carrier, each die site comprising an area on the carrier where a singulated die can be placed;

application circuitry disposed on the carrier and configured to generate data signals for input into a die disposed at one of the die sites;

electrical connections from the application circuitry, wherein the electrical connections terminate immediately next to the one of the die sites but are spaced sufficiently away from all die sites on the carrier that the electrical connections do not physically connect to any die disposed at any die site on the carrier; and

electrical inputs configured to receive control signals for input into the application circuitry; and

a contactor device that is structurally distinct from the die carrier, the contactor device comprising;

a substrate; and

a first set of probe pairs disposed on the substrate, wherein each said probe pair comprises a first electrically conductive probe disposed to contact, without being attached to, one of the electrical connections of the die carrier and a second electrically conductive probe electrically connected to the first probe and disposed to contact, without being attached to, an input terminal of the die disposed at the one of the die sites.

2. The apparatus of claim 1, wherein the electrical inputs comprise electrically conductive elements configured to be physically contacted by probes of the contactor device.

3. The apparatus of claim 1, wherein the data signals generated by the application circuitry are test signals for testing the die disposed at the one of the die sites.

4. The apparatus of claim 3, wherein the test signals generated by the application circuitry are output through ones of the electrical connections.

5. The apparatus of claim 1, wherein the application circuitry is configured to function as an electronic device the die disposed at the one of the die sites is designed to operate with.

6. The apparatus of claim 1, wherein the application circuitry comprises an electronic device the die disposed at the one of the die sites is designed to operate with.

7. The apparatus of claim 1, wherein the application circuitry is configured to receive as inputs data through ones of the electrical connections.

8. The apparatus of claim 1, wherein the application circuitry comprises a processor circuit.

9. The apparatus of claim 1 further comprising holding means for holding dies on the carrier in the die sites.

10. The apparatus of claim 9, wherein the holding means comprises an adhesive.

11. The apparatus of claim 9, wherein the holding means holds the dies on the carrier in the die sites with a vacuum.

12. The apparatus of claim 9, wherein the holding means holds the dies on the carrier in the die sites with an electrostatic charge.

13. The apparatus of claim 1 further comprising alignment marks by which dies can by aligned on the die sites.

14. The apparatus of claim 1, wherein:

the die carrier further comprises an electrical connection to a source of power; and

the contactor device further comprises a first probe pair disposed on the substrate, wherein the first probe pair comprises an electrically conductive probe disposed to contact, without being attached to, the electrical connection to the source of power, and the first probe pair further comprises another electrically conductive probe disposed to contact, without being attached to, a power terminal of the die disposed at the one of the die sites, wherein the probes of the first probe pair are physically spaced apart but are electrically connected on the contactor device to each other.

15. The apparatus of claim 14, wherein:

the electrical connection to the source of power and the power terminal of the die disposed at the one of the die sites are not electrically connected on the die carrier; and

the first probe pair electrically connects the electrical connections source of power to the power terminal while the probes of the first probe pair are in contact with the electrical connection to the source of power and the power terminal.

16. The apparatus of claim 14, wherein:

the die carrier further comprises an electrical connection to ground; and

the contactor device further comprises a second probe pair disposed on the substrate, wherein the second probe pair comprises an electrically conductive probe disposed to contact, without being attached to, the electrical connection to ground, and the second probe pair further comprises another electrically conductive probe disposed to contact, without being attached to, a ground terminal of the die disposed at the one of the die sites, wherein the probes of the second probe pair are physically spaced apart but are electrically connected on the contactor device to each other.

17. The apparatus of claim 16, wherein the contactor device further comprises a first set of electrically conductive probes disposed on the substrate to contact, without being attached to, ones of the electrical inputs to the application circuitry on the carrier.

18. The apparatus of claim 17, wherein the contactor device further comprises a second set of electrically conductive probes disposed on the substrate to contact, without being attached to, output terminals of the die disposed at the one of the die sites.

19. The apparatus of claim 1, wherein:

none of the electrical connections are electrically connected on the die carrier to any input terminal of the die disposed at the one of the die sites; and

the first probe pairs electrically connect ones of the electrical connections on the die carrier to ones of the input terminals of the die.