Lithographic apparatus, method for levelling an object, and lithographic projection method

• US 8,514,368 B2
• Filed: 12/22/2008
• Issued: 08/20/2013
• Est. Priority Date: 12/21/2007
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Bussink, Peter Gerhardus Wilhelmus, Bruinsma, Anastasius Jacobus Anicetus, Meijer, Hendricus Johannes Maria
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US12/809,730
• Publication Number:
  US 20100265484A1
• Time in Patent Office: 1,702 Days
• Field of Search: 355/52, 355/53, 355/55, 355/67, 355/71, 250/548, 356399-401
• US Class Current: 355/53
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7034 Leveling

Abstract

A lithographic apparatus configured to project a patterned radiation beam onto a substrate. The apparatus includes a support configured to hold a patterned object, and a measurement system configured to detect orientations and/or densities of user area structures that are present on a user area of the patterned object.

Claims

1. A lithographic apparatus configured to project a patterned radiation beam onto a substrate, comprising:

a support configured to hold a patterned object;

a measurement system configured to detect orientations or densities or both the orientations and densities of user area structures that are present on a user area of the patterned object;

a levelling information system configured to generate levelling information by utilizing the detected orientations or densities or both the orientations and densities of the user area structures; and

a levelling system configured to position a level of the patterned object based on the levelling information.

2. The apparatus according to claim 1, wherein the measurement system is configured to discern or determine spatial orientations of the user area structures, in a 2-dimensional plane, or angular orientations of the user area structures, in a 2-dimensional plane, or general shapes of the user area structures, in a 2-dimensional plane, or any combination thereof.

3. The apparatus according to claim 1, wherein the measurement system is configured to determine the orientations of the user area structures with respect to two orthogonal directions, the two orthogonal directions both being parallel to a radiation receiving surface of the patterned object.

4. The apparatus according to claim 1, wherein the measurement system is configured to scan a measurement beam along at least one scanning line over the user area of the patterned object.

5. The apparatus according to claim 4, wherein the patterned object comprises a marker area located outside the user area, wherein the marker area comprises a marker, and wherein the measurement system is configured to scan the measurement beam over the user area of the patterned object as well as over the marker of the marker area.

6. The apparatus according to claim 1, wherein the measurement system comprises a beam splitter configured to redirect part of a measurement beam that emanates from the patterned object, towards a radiation detector.

7. The apparatus according to claim 1, further comprising

a polarizing filter configured to filter a predetermined polarization mode of a measurement beam part that emanates from the patterned object;

and

a radiation detector configured to detect radiation filtered by the polarizing filter.

8. The apparatus according to claim 7, further comprising a data processor configured to process data obtained by the radiation detector, wherein the data processor is configured to determine, calculate or estimate structure orientations of the patterned object by utilizing predetermined information that contains a relation between at least two predetermined structure orientations and at least two different polarization modes of the measurement beam.

9. The apparatus according to claim 1, further comprising a data storage system configured to process and store the orientations or densities or both the orientations and densities of the user area structures, detected by the measurement system, in combination with patterned object identification information.

10. A lithographic apparatus configured to project a patterned radiation beam onto a substrate, comprising:

a support configured to hold a patterned object, the patterned object having a patterned user area;

a levelling information system configured to provide levelling information that is based on orientations or densities or both the orientations and densities of user area structures present on the user area of the patterned object; and

a levelling system configured to receive the levelling information from the levelling information system, and to use the received levelling information for levelling the patterned object.

11. A method for levelling a patterned object, comprising:

detecting an orientation or density or both the orientation and density of one or more user area structures present on a user area of the patterned object;

generating levelling information based on the detected orientation or density or both the orientation and density of the structures; and

levelling the patterned object by utilizing the levelling information.

12. The method according to claim 11, further comprising

illuminating at least part of the patterned object with a measuring beam that optically interacts with the user area structure;

and

utilizing part of the measuring beam emanating from the patterned object to discern or determine a spatial orientations of the user area structure, or an angular orientation of the user area structure, or a general shape of the user area structure, or any combination thereof, a or utilizing part of the measuring beam emanating from the patterned object to discern or determine the density of the user area structure or utilizing both the part of the measuring beam emanating from the patterned object to discern or determine the spatial orientations of the user area structure, or the angular orientation of the user area structure, or the general shape of the user area structure, or any combination thereof, and the part of the measuring beam emanating from the patterned object to discern or determine the density of the user area structure.

13. The method according to claim 11, wherein the measuring beam is scanned along a predetermined scanning line over the patterned object to illuminate a measuring field of the user area of the patterned object, and wherein the measuring field contains a pattern of structures having certain spatial orientations, angular orientations, general shapes, and densities, respectively, with respect to the scanning line.

14. The method according to claim 11, further comprising

filtering a predetermined polarization part of a measuring beam part, emanating from the patterned object;

and

detecting the filtered measuring beam part.

15. The method according to claim 14, further comprising

providing predetermined information that contains a relation between at least two predetermined structure orientations and at least two different polarization modes of the measurement beam;

processing data obtained from the detection of the filtered measuring beam part; and

determining structure orientations of the patterned object by utilizing the predetermined information.

16. The method according to claim 15, wherein said determining comprises calculating the structure orientations.

17. The method according to claim 15, wherein said determining comprises estimating the structure orientations.

18. The method according to claim 11, further comprising scanning the measurement beam along at least one scanning line over the user area of the patterned object as well as over at least one marker of a marker area located outside the user area of the patterned object.

19. The method according to claim 11, further comprising splitting a measurement beam part that emanates from the patterned object towards a radiation detector.

20. The method according to claim 11, further comprising storing detected orientations or densities or both the orientations and densities of structures present on the user area of a patterned object, detected by the measurement system, in combination with patterned object identification information.

21. The method according to claim 11, wherein at least one of the structures has a width smaller than 100 nm, measured in a direction perpendicular to a levelling direction.

22. A lithographic projection method, including:

providing a radiation beam of radiation having a first wavelength;

providing a patterning device containing a user area having a pattern of structures, the structures having a first reflectivity for the radiation and user area parts extending outside the structures having a second reflectivity for the radiation, the second reflectivity being different from the first reflectivity;

directing the radiation beam onto the user area of the patterning device to impart the pattern of the user area to the radiation beam;

projecting the patterned radiation beam onto a target portion of a substrate with a projection system; and

levelling of at least one of the patterning device and the substrate with respect to the projection system, so that an object plane provided by the patterning device is projected in focus by the projection system onto the substrate, wherein the levelling comprises utilizing a predetermined relation between one or both of orientations and local densities of surface structures and the effect of the one or both of the surface structure orientations and densities on reflection of different polarization parts of incoming radiation.