Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

• US 8,514,373 B2
• Filed: 08/25/2010
• Issued: 08/20/2013
• Est. Priority Date: 09/29/2006
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Primary Examiner(s): Whitesell Gordon, Steven H
• Application Number:
  US12/805,945
• Publication Number:
  US 20100321666A1
• Time in Patent Office: 1,091 Days
• Field of Search: 355/53, 355/72, 356/401, 356445-448, 356/493, 356/494, 356/496, 356/498, 356/499, 356/614, 356/615, 356/622, 356/616
• US Class Current: 355/72
• CPC Class Codes: G01D 5/266 by interferometric means G01D5/353 takes precedence
• CPC Class Codes: G01D 5/305 controlling the movement of a following part
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position

Abstract

A laser beam emitted by an encoder main body enters a wafer table via a PBS from the outside, and reaches a grating at a point that is located right under exposure area, and is diffracted by the grating. Then, by receiving interference light of a first polarized component that has returned from the grating and a second polarized component reflected by the PBS, positional information of the wafer table is measured. Accordingly, because the first polarized component, which has passed through PBS passes through the wafer table until it is synthesized with the second polarized component again, does not proceed through the atmosphere outside, position measurement of the wafer table can be performed with high precision without the measurement beam being affected by the fluctuation of the atmosphere around the wafer table.

Claims

1. An exposure apparatus that exposes a substrate with an illumination beam via a projection optical system, the apparatus comprising:

a frame structure that supports the projection optical system;

a stage system which has a substrate stage placed under the projection optical system that is supported by the frame structure and an electromagnetic motor coupled to the substrate stage, and which moves the substrate by driving the substrate stage by the electromagnetic motor, the substrate stage including a substrate mounting portion, the substrate being mounted on an upper side of the substrate mounting portion, and a grating surface being placed on a lower side of the substrate mounting portion and having a grating area where a grating is formed; and

an encoder system which has an optical member supported to be placed lower than the grating surface by the frame structure, and which irradiates the grating surface with a measurement beam from below via the optical member to measure positional information of the substrate stage, the optical member facing the grating surface as the substrate stage is placed facing the projection optical system, wherein

the grating surface is moved relative to the optical member in a first direction and a second direction orthogonal to an optical axis of the projection optical system and orthogonal to each other as the substrate stage moves,

the measurement beam is irradiated on the grating so that a measurement point irradiated with the measurement beam is not moved off from the grating area which is moved relative to the optical member, with respect to the first and the second directions, during at least an exposure operation of the substrate, and

the measurement point is located under an exposure area on which the illumination beam is irradiated via the projection optical system and within the exposure area with respect to the first and the second directions.

2. The exposure apparatus according to claim 1, wherein

the measurement point is located under a center of the exposure area or in the vicinity of a point under the center.

3. The exposure apparatus according to claim 1, wherein

the measurement point is located at a predetermined point where the substrate stage should be positioned or in the vicinity of the point.

4. The exposure apparatus according to claim 1, wherein

the encoder system irradiates the grating with a plurality of measurement beams including the measurement beam via the optical member and measures positional information of the substrate stage in different directions.

5. The exposure apparatus according to claim 4, wherein

the plurality of measurement beams are respectively irradiated on a plurality of measurement points including the measurement point that are at different positions under the exposure area.

6. The exposure apparatus according to claim 5, wherein

the plurality of the measurement points include a pair of measurement points that are located substantially symmetrically with respect to an exposure center under the exposure area or located substantially at an equal distance from the exposure center.

7. The exposure apparatus according to claim 1, further comprising:

a base member at which the substrate stage is placed, wherein

the electromagnetic motor includes a planar motor that drives the substrate stage supported by levitation above the base member.

8. The exposure apparatus according to claim 7, wherein

the optical member is placed lower than an upper surface of the base member.

9. The exposure apparatus according to claim 7, wherein

the substrate stage is supported by levitation by a magnetic force.

10. The exposure apparatus according to claim 7, wherein

the base member has a light-transmitting section, which the measurement beam passes through, the light-transmitting section being located on an upper surface of the base member.

11. The exposure apparatus according to claim 1, wherein

the holding member has a protective member that covers the grating.

12. The exposure apparatus according to claim 11, wherein

the protective member includes a thin film.

13. A device manufacturing method, comprising:

exposing a substrate using the exposure apparatus according to claim 1; and

developing the exposed substrate.

14. The exposure apparatus according to claim 1, wherein

the grating is a reflective two-dimensional grating, and

the encoder system detects a measurement beam reflected off the reflective two-dimensional grating via the optical member.

15. The exposure apparatus according to claim 14, wherein

a grating area where the reflective two-dimensional grating is formed is larger than a mounting area of the substrate mounting portion.

16. The exposure apparatus according to claim 15, further comprising:

a support member supported by the frame structure and placed under the projection optical system, wherein

the optical member is arranged at the support member.

17. The exposure apparatus according to claim 16, wherein

the optical member is arranged inside the support member,

the support member has a light transmitting section located above the optical member, and

the measurement beam passes through the light transmitting section to be irradiated on the grating surface.

18. The exposure apparatus according to claim 16, wherein

the support member is supported by the frame structure only at one end side of the support member in the first direction, and

the optical member is arranged at the support member apart from the one end side in the first direction so that the optical member is placed right under the projection optical system.

19. The exposure apparatus according to claim 18, wherein

the optical member includes at least a part of an optical system that irradiates the grating surface with the measurement beam obliquely.

20. The exposure apparatus according to claim 19, wherein

the encoder system has a light source that emits the measurement beam and a detector that detects the measurement beam reflected, and

at least one of the light source and the detector is coupled to the optical member via an optical fiber in order to be placed apart from the optical member.

21. The exposure apparatus according to claim 18, wherein

the encoder system irradiates the grating surface with a plurality of measurement beams that include the measurement beam via the optical member, and measures positional information of the substrate stage in different directions, the different directions including at least the first and the second directions.

22. The exposure apparatus according to claim 21, wherein

the plurality of measurement beams include another measurement beam that is irradiated on another measurement point which is at a different position from the measurement point in at least one of the first and the second directions under the exposure area.

23. The exposure apparatus according to claim 22, wherein

a plurality of measurement points including the measurement point and the another measurement point respectively irradiated with the plurality of measurement beams are located under the exposure area and within a region corresponding to the exposure area in the first and the second directions.

24. The exposure apparatus according to claim 23, wherein

the plurality of measurement points include at least one measurement point located under a center of the exposure area or in the vicinity of a point under the center.

25. The exposure apparatus according to claim 23, wherein

the plurality of measurement points include a pair of measurement points located substantially symmetrically with respect to an exposure center or located substantially at an equal distance from the exposure center under the exposure area.

26. The exposure apparatus according to claim 25, wherein

the plurality of measurement points include at least one measurement point different from the pair of measurement points that is located under the center of the exposure area or in the vicinity of a point under the center.

27. The exposure apparatus according to claim 23, wherein

the plurality of measurement points are at different positions from each other in at least one of the first and the second directions.

28. The exposure apparatus according to claim 23, wherein

the substrate stage is configured to form a space under the grating surface, and

each of the plurality of measurement beams passes through the space and is irradiated on the grating surface.

29. The exposure apparatus according to claim 28, wherein

the electromagnetic motor has a planar motor that drives the substrate stage, and

the stage system supports the substrate stage by levitation.

30. The exposure apparatus according to claim 29, wherein

the substrate stage is supported by levitation by a magnetic force.

31. The exposure apparatus according to claim 30, wherein

the substrate stage is supported by levitation on a predetermined plane above the optical member.

38. The exposure method according to claim 21, wherein

the substrate stage is supported by levitation above a base member, and

the electromagnetic motor includes a planar motor that drives the substrate stage.

39. The exposure method according to claim 38, wherein

the optical member is placed lower than an upper surface of the base member.

40. The exposure method according to claim 38, wherein

the substrate stage is supported by levitation by a magnetic force.

41. The exposure method according to claim 38, wherein

the measurement beam is irradiated on the grating via a light-transmitting section located on an upper surface of the base member.

32. An exposure method of exposing a substrate with an illumination beam via a projection optical system, the method comprising:

moving the substrate by a stage system which has a substrate stage and an electromagnetic motor coupled to the substrate stage, the substrate stage including a substrate mounting portion, the substrate being mounted on an upper side of the substrate mounting portion, and a grating surface being placed on a lower side of the substrate mounting portion and having a grating area where a grating is formed; and

measuring positional information of the substrate stage by an encoder system having an optical member which is supported to be placed lower than the grating surface by a frame structure that supports the projection optical system, the encoder system irradiating the grating surface with a measurement beam from below via the optical member that faces the grating surface as the substrate stage is placed facing the projection optical system; and

controlling driving of the substrate stage by the electromagnetic motor based on the positional information measured by the encoder system, wherein

the grating surface is moved relative to the optical member in a first and a second direction orthogonal to an optical axis of the projection optical system and orthogonal to each other as the substrate stage moves,

the measurement beam is irradiated on the grating so that a measurement point irradiated with the measurement beam is not moved off from the grating area which is moved relative to the optical member, with respect to the first and the second directions, during at least an exposure operation of the substrate, and

the measurement point is located under an exposure area on which the illumination beam is irradiated via the projection optical system and within the exposure area with respect to the first and the second directions.

33. The exposure method according to claim 32, wherein

the measurement point is located under a center of the exposure area or in the vicinity of a point under the center.

34. The exposure method according to claim 32, wherein

the measurement point is located at a predetermined point where the substrate stage should be positioned or in the vicinity of the point.

35. The exposure method according to claim 32, wherein

positional information the substrate stage in different directions is measured by irradiating a plurality of measurement beams including the measurement beam on the grating via the optical member.

36. The exposure method according to claim 35, wherein

the plurality of measurement beams are respectively irradiated on a plurality of measurement points including the measurement point that are at different positions under the exposure area.

37. The exposure method according to claim 36, wherein

the plurality of measurement points include a pair of measurement points that are located substantially symmetrically with respect to an exposure center under the exposure area or located substantially at an equal distance from the exposure center.

42. The exposure method according to claim 32, wherein

the grating is covered with a protective member.

43. The exposure method according to claim 42, wherein

the protective member includes a thin film.

44. A device manufacturing method, comprising:

exposing a substrate using the exposure method according to claim 32; and

developing the exposed substrate.

45. The exposure method according to claim 32, wherein

the grating is a reflective two-dimensional grating, and

a measurement beam reflected off the reflective two-dimensional grating is detected via optical member.

46. The exposure method according to claim 45, wherein

a grating area where the reflective two-dimensional grating is formed is larger than a mounting area of the substrate mounting portion.

47. The exposure method according to claim 46, wherein

the optical member is arranged at a support member that is supported by the frame structure and placed under the projection optical system.

48. The exposure method according to claim 47, wherein

the support member is supported by the frame structure only at one end side of the support member in the first direction, and

the optical member is arranged at the support member apart from the one end side in the first direction so that the optical member is placed right under the projection optical system.

49. The exposure method according to claim 48, wherein

the optical member includes at least a part of an optical system that irradiates the grating surface with the measurement beam obliquely.

50. The exposure method according to claim 49, wherein

the optical member is coupled to at least one of a light source that emits the measurement beam and a detector that detects the measurement beam reflected, via an optical fiber.

51. The exposure method according to claim 48, wherein

the grating surface is irradiated with a plurality of measurement beams that include the measurement beam, and positional information of the substrate stage is measured in different directions including at least the first and the second directions.

52. The exposure method according to claim 51, wherein

the plurality of measurement beams include another measurement beam that is irradiated on another measurement point which is at a different position from the measurement point in at least one of the first and the second directions under the exposure area.

53. The exposure method according to claim 52, wherein

a plurality of measurement points including the measurement point and the another measurement point respectively irradiated with the plurality of measurement beams are located under the exposure area within a region corresponding to the exposure area in the first and the second directions.

54. The exposure method according to claim 53, wherein

the plurality of measurement points include at least one measurement point located under a center of the exposure area or in the vicinity of a point under the center.

55. The exposure method according to claim 53, wherein

the plurality of measurement points include a pair of measurement points located substantially symmetrically with respect to an exposure center or located substantially at an equal distance from the exposure center under the exposure area.

56. The exposure method according to claim 55, wherein

the plurality of measurement points include at least one measurement point different from the pair of measurement points that is located under the center of the exposure area or in the vicinity of a point under the center.

57. The exposure method according to claim 53, wherein

the plurality of measurement points are at different positions from each other in at least one of the first and the second directions.

58. The exposure method according to claim 53, wherein

each of the plurality of measurement beams passes through a space of the substrate stage formed under the grating surface, and is irradiated on the grating surface.

59. The exposure method according to claim 58, wherein

the electromagnetic motor has a planar motor that drives the substrate stage, and

the substrate stage is supported by levitation by the stage system.

60. The exposure method according to claim 59, wherein

the substrate stage is supported by levitation by a magnetic force.

61. The exposure method according to claim 60, wherein

the substrate stage is supported by levitation on a predetermined plane above the optical member.

62. A manufacturing method of an exposure apparatus that exposes a substrate with an illumination beam via a projection optical system, the method comprising:

supporting the projection optical system by a frame structure;

providing a stage system which has a substrate stage and an electromagnetic motor coupled to the substrate stage, and which moves the substrate by driving the substrate stage by the electromagnetic motor, the substrate stage including a substrate mounting portion, the substrate being mounted on an upper side of the substrate mounting portion, and a grating surface being placed on a lower side of the substrate mounting portion and having a grating area where a grating is formed; and

providing an encoder system which has an optical member supported to be placed lower than the grating surface by the frame structure, and measures positional information of the substrate stage, the encoder system irradiating the grating surface with a measurement beam from below via the optical member facing the grating surface as the substrate stage is placed facing the projection optical system, wherein

the grating surface is moved relative to the optical member in a first and a second direction orthogonal to an optical axis of the projection optical system and orthogonal to each other as the substrate stage moves,

the measurement beam is irradiated on the grating so that a measurement point irradiated with the measurement beam is not moved off from the grating area which is moved relative to the optical member, with respect to the first and the second directions, during at least an exposure operation of the substrate, and

the measurement point is located under an exposure area on which the illumination beam is irradiated via the projection optical system and within the exposure area with respect to the first and the second directions.

63. The manufacturing method according to claim 62, wherein

the measurement point is located under a center of the exposure area or in the vicinity of a point under the center.

64. The manufacturing method according to claim 62, wherein

the measurement point is located at a predetermined point where the substrate stage should be positioned or in the vicinity of the point.

65. The manufacturing method according to claim 62, wherein

the encoder system irradiates the grating with a plurality of measurement beams including the measurement beam via the optical member and measures positional information of the substrate stage in different directions.

66. The manufacturing method according to claim 62, further comprising:

providing a base member at which the substrate stage is placed, wherein

the electromagnetic motor includes a planar motor that moves the substrate stage supported by levitation above the base member.

67. The manufacturing method according to claim 66, wherein

the optical member is placed lower than an upper surface of the base member.

68. The manufacturing method according to claim 62, wherein

the grating is covered with a protective member.

69. The manufacturing method according to claim 62, wherein

the grating is a reflective two-dimensional grating, and

the encoder system detects a measurement beam reflected off the reflective two-dimensional grating via the optical member.

70. The manufacturing method according to claim 69, wherein

a grating area where the reflective two-dimensional grating is formed is larger than a mounting area of the substrate mounting portion.

71. The manufacturing method according to claim 70, further comprising:

providing a support member supported by the frame structure and placed under the projection optical system, wherein

the optical member is arranged at the support member.

72. The manufacturing method according to claim 71, wherein

the support member is supported by the frame structure only at one end side of the support member in the first direction, and

the optical member is arranged at the support member apart from the one end side in the first direction so that the optical member is placed right under the projection optical system.

73. The manufacturing method according to claim 72, wherein

the optical member includes at least a part an optical system that irradiates the grating surface with the measurement beam obliquely.

74. The manufacturing method according to claim 73, wherein

the optical member is coupled to at least one of a light source that emits the measurement beam and a detector that detects the measurement beam reflected, via an optical fiber.

75. The manufacturing method according to claim 72, wherein

the grating surface is irradiated with a plurality of measurement beams that include the measurement beam, and positional information of the substrate stage is measured in different directions including at least the first and the second directions.

76. The manufacturing method according to claim 75, wherein

the plurality of measurement beams include another measurement beam that is irradiated on another measurement point which is at a different position from the measurement point in at least one of the first and the second directions under the exposure area.

77. The manufacturing method according to claim 76, wherein

a plurality of measurement points including the measurement point and the another measurement point respectively irradiated with the plurality of measurement beams are located under the exposure area within the exposure area in the first and the second directions.

78. The manufacturing method according to claim 77, wherein

the plurality of measurement points include at least one measurement point located under a center of the exposure area or in the vicinity of a point under the center.

79. The manufacturing method according to claim 77, wherein

the plurality of measurement points include a pair of measurement points located substantially symmetrically with respect to an exposure center or located substantially at an equal distance from the exposure center under the exposure area.

80. The manufacturing method according to claim 79, wherein

the plurality of measurement points include at least one measurement point different from the pair of measurement points that is located under the center of the exposure area or in the vicinity of a point under the center.

81. The manufacturing method according to claim 77, wherein

the plurality of measurement points are at different positions from each other in at least one of the first and the second directions.

82. The manufacturing method according to claim 77, wherein

each of the plurality of measurement beams passes through a space of the substrate stage formed under the grating surface, and is irradiated on the grating surface.

83. The manufacturing method according to claim 82, wherein

the electromagnetic motor has a planar motor that drives the substrate stage, and

the stage system supports the substrate stage by levitation.

84. The manufacturing method according to claim 83, wherein

the substrate stage is supported by levitation by a magnetic force.

85. The manufacturing method according to claim 84, wherein

the substrate stage is supported by levitation on a predetermined plane above the optical member.