Technique for verifying the microstructure of lead-free interconnects in semiconductor assemblies

• US 8,514,386 B2
• Filed: 05/25/2011
• Issued: 08/20/2013
• Est. Priority Date: 05/25/2011
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: International Business Machines Corporation
• Inventors: Bergeron, Christian, Blais, Pascal, Fortin, Clement, Guerin, Luc
• Primary Examiner(s): NGUYEN, SANG H
• Application Number:
  US13/115,823
• Publication Number:
  US 20120300220A1
• Time in Patent Office: 818 Days
• Field of Search: 3562371-2375, 438/14, 438/613, 257/48, 257/737, 257/738, 228/6.2, 228/33, 228/254, 228/56.3
• US Class Current: 356/237.1
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 2210/56 Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth

Abstract

A method for verifying the internal microstructure of interconnects in flip-chip applications includes providing a microelectronic assembly comprising the following: a substrate hosting an array of flip-chip attach pads and one or more process control pads; a flip chip having an array of solder bumps in contact with the array of flip-chip attach pads; and one or more representative solder bumps contacting the one or more process control pads. The representative solder bumps have a substantially similar or identical chemical composition as the array of solder bumps. A reflow cycle is then applied to the microelectronic assembly to melt and solidify the array of solder bumps on the flip-chip attach pads and melt and solidify the representative solder bumps on the process control pads. The surface texture of the representative solder bumps is then optically inspected to determine an internal microstructure of the array of solder bumps.

Claims

1. A method for verifying the internal microstructure of interconnects in flip-chip applications, the method comprising:

providing a microelectronic assembly comprising;

a substrate comprising an array of flip-chip attach pads and a process control pad;

a flip chip comprising an array of solder bumps in contact with the array of flip-chip attach pads;

a representative solder bump on the process control pad and positioned such as to enable top-side inspection of the representative solder bump after the microelectronic assembly has undergone a reflow cycle, the representative solder bump having substantially the same chemical composition as the array of solder bumps;

applying a reflow cycle to the microelectronic assembly to melt and solidify the array of solder bumps and the representative solder bump; and

optically inspecting a surface texture of the representative solder bump to determine the internal microstructure of the array of solder bumps.

2. The method of claim 1, wherein the array of solder bumps and the representative solder bump are lead-free.

3. The method of claim 1, wherein the array of solder bumps and the representative solder bump are made from a tin-based alloy.

4. The method of claim 3, wherein the tin-based alloy comprises at least one alloy additive selected from the group consisting of silver, copper, nickel, bismuth, and gold.

5. The method of claim 1, wherein inspecting the surface texture comprises determining whether the surface texture has a “

turtle shell”

appearance.

6. The method of claim 5, further comprising accepting the microelectronic assembly if the surface texture has a “

turtle shell”

appearance, and rejecting the microelectronic assembly if the surface texture does not have a “

turtle shell”

appearance.

7. The method of claim 6, further comprising altering the reflow cycle in response to rejecting the microelectronic assembly.

8. The method of claim 6, further comprising altering the chemical composition in response to rejecting the microelectronic assembly.

9. The method of claim 1, wherein optically inspecting comprises optically inspecting with a human eye.

10. The method of claim 9, wherein optically inspecting with the human eye comprises using a microscope to optically inspect with the human eye.

11. The method of claim 1, wherein optically inspecting comprises optically inspecting with a machine.

12. The method of claim 1, wherein the representative solder bump is one of a plurality of representative solder bumps distributed across the substrate.

13. A microelectronic assembly providing easy verification of the internal microstructure of flip-chip interconnects, the microelectronic assembly comprising:

a substrate comprising an array of flip-chip attach pads and a process control pad;

a flip chip comprising an array of solder bumps bonded to the array of flip-chip attach pads; and

a representative solder bump bonded to the process control pad and viewable from a top side thereof, the representative solder bump having substantially the same chemical composition as the array of solder bumps, the representative solder bump having a surface texture providing a visual indicator of the internal microstructure of the array of solder bumps.

14. The microelectronic assembly of claim 13, wherein the array of solder bumps and the representative solder bump are made from a tin-based alloy.

15. The microelectronic assembly of claim 14, wherein the tin-based alloy comprises at least one alloy additive selected from the group consisting of silver, copper, nickel, bismuth, and gold.

16. The microelectronic assembly of claim 13, wherein the representative solder bump is one of a plurality of representative solder bumps distributed across the substrate.

17. The microelectronic assembly of claim 13, wherein a “

turtle shell”

surface texture on the representative solder bump indicates that the internal microstructure is acceptable.

18. A method for determining a suitable lead-free solder composition for use in a microelectronic assembly, the method comprising:

providing a substrate;

depositing a plurality of solder bumps on the substrate, the plurality of solder bumps comprising solder bumps of at least two different compositions, the plurality of solder bumps positioned on the substrate such as to enable top-side inspection of the plurality of solder bumps on the substrate after the substrate and solder bumps have undergone a reflow cycle;

passing the substrate through a reflow cycle to melt and solidify the plurality of solder bumps;

optically inspecting the surface texture of the plurality of solder bumps to determine which of the plurality of solder bumps has a desired microstructure; and

selecting a composition associated with a solder bump having a desired microstructure for use in a microelectronic assembly.

19. The method of claim 18, wherein optically inspecting the surface texture comprises determining whether the surface texture has a “

turtle shell”

appearance.