Method and apparatus for automatically fixing double patterning loop violations

• US 8,516,402 B1
• Filed: 08/22/2011
• Issued: 08/20/2013
• Est. Priority Date: 08/22/2011
• Status: Active Grant

• Current Assignee: Cadence Design Systems Incorporated (Cadence Group)
• Original Assignee: Cadence Design Systems Incorporated (Cadence Group)
• Inventors: Wang, Xiaojun
• Primary Examiner(s): Whitmore, Stacy
• Application Number:
  US13/215,118
• Time in Patent Office: 729 Days
• Field of Search: 716 50- 56
• US Class Current: 716/52
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging

Abstract

A method for automatically decomposing a shape of an IC design layout into two or more shapes in order to resolve a double patterning loop violation involving the shape. The method decomposes the shape by introducing one or more splicing graphs on the shape. These splicing graphs serve as cuts to be made on the shape. By decomposing the shape into several shapes and assigning the shapes to alternating masks for the same layer, the method breaks the double patterning loop. That is, no pair of the shape and other shapes that form the loop will be assigned to the same color for a mask after the shape is decomposed. In some embodiments, the method introduces splicing points to more than one shape of the loop-forming shapes when necessary. Some embodiments minimize the number of splicing points introduced to the shape(s).

Claims

1. A non-transitory machine readable medium storing a program for resolving a design rule violation in a circuit design layout including a plurality of shapes, the program comprising sets of instructions for:

identifying a double patterning loop formed by a set of shapes in the design layout, the double patterning loop representing a design rule violation;

identifying critical portions of the set of shapes, wherein a critical portion is a portion of a shape that is within a threshold distance from another shape;

assigning the critical portions of the set of shapes to a plurality of masks in a manner that reduces a number of cut graphs to be inserted in each shape of the set of shapes, the cut graphs for partitioning the shape into a plurality of segments so that at least two different segments of the shape are assignable to two different masks;

inserting cut graphs into the design layout based on the assignment of the critical portions of the set of shapes to the plurality of masks;

partitioning the shapes based on the inserted cut graphs; and

assigning, for each partitioned shape, at least two different partitions to two different masks, in order to resolve the design rule violation due to the double patterning loop.

2. The machine readable medium of claim 1, wherein a cut graph is a straight line based on which to partition a shape into partitions.

3. The machine readable medium of claim 1, wherein a cut graph is a curved line based on which to partition a shape into partitions.

4. The machine readable medium of claim 1, wherein the program further comprises a set of instructions for identifying a group of shapes that includes the set of shapes.

5. The machine readable medium of claim 4, wherein, in the identified group, every shape is (i) within the threshold distance from a first shape that is within the threshold distance from a second shape or (ii) within the threshold distance from at least two other shapes.

6. The machine readable medium of claim 4, wherein the set of instructions for assigning the critical portions comprises sets of instructions for:

selecting, from the identified group, a shape that has at least one critical portion that is not assigned to a mask;

assigning to a mask all critical portions of the selected shape that are not assigned to a mask in a manner that minimizes a number of instances in which critical portions, adjacent within the shape, are assigned to different masks;

repeating the selection of the shapes of the identified group and the assignment of the critical portions to a mask until all critical portions of all shapes in the identified group are assigned to a mask.

7. The machine readable medium of claim 6, wherein the set of instructions for selecting a shape comprises a set of instructions for selecting a shape without a cut graph over a shape with a cut graph.

8. The machine readable medium of claim 6, wherein the set of instructions for selecting a shape comprises a set of instructions for selecting a shape with the least number of critical portions.

9. The machine readable medium of claim 6, wherein the set of instructions for selecting a shape comprises a set of instructions for selecting a shape with at least one critical portion assigned to a mask over a shape with no critical portions assigned to a mask.

10. The machine readable medium of claim 6, wherein two critical portions of two shapes in the identified group must be assigned to different masks when the two critical portions are within the threshold distance from each other.

11. The machine readable medium of claim 6, wherein the set of instructions for assigning to a mask all critical portions of the selected shape that are not assigned to a mask comprises a set of instructions for assigning a first critical portion of the selected shape to a first mask when a second critical portion of the selected shape is adjacent, within the selected shape, to the first critical portion and is assigned to the first mask.

12. The machine readable medium of claim 6, wherein the set of instructions for assigning to a mask all critical portions of the selected shape that are not assigned to a mask comprises a set of instructions for assigning all critical portions of the selected shape to a same mask when no critical portion of the selected shape is assigned to a mask.

13. The machine readable medium of claim 6, wherein the set of instructions for assigning to a mask all critical portions of the selected shape that are not assigned to a mask comprises sets of instructions for:

identifying a group of critical portions that includes a critical portion of the selected shape;

assigning the critical portion of the selected shape to a mask; and

assigning each of the rest of the critical portions of the group of critical portions to a mask such that any two critical portions of the group that are within the threshold distance are assigned to different masks.

14. The machine readable medium of claim 13, wherein, in the group of critical portions, every critical portion is (i) within the threshold distance from a first critical portion that is within the threshold distance from a second critical portion or (ii) within the threshold distance from at least two other critical portions.

15. A computer-implemented method for resolving a design rule violation in a circuit design layout including a plurality of shapes, the method comprising:

identifying, at a computer, that an odd number of shapes form a loop in which each pair of neighboring-shapes has the pair'"'"'s two shapes closer than a threshold distance;

identifying critical portions in the shapes that form the loop, wherein a critical portion is a portion of a shape that is within the threshold distance from another shape;

assigning the critical portions of the shapes that form the loop to a plurality of masks according to criteria that reduce a number of cut graphs to be inserted in each shape of the shapes that form the loop, the cut graphs for partitioning the shape into a plurality of segments so that at least two different segments of the shape are assignable to two different masks;

inserting cut graphs into the design layout based on the assignment of the critical portions of the shapes that form the loop to the plurality of masks; and

breaking the loop by dividing at least one shape of the loop into two or more segments based on the inserted cut graphs to assign the segments to two different masks.

16. The method of claim 15 further comprising identifying a group of shapes that includes the odd number of shapes that form the loop.

17. The method of claim 16, wherein, in the identified group, every shape is (i) within the threshold distance from a first shape that is within the threshold distance from a second shape or (ii) within the threshold distance from at least two other shapes.

18. The method of claim 16, wherein each shape of the identified group comprises one or more critical portions, wherein two critical portions of two shapes in the identified group must be assigned to different masks when the two critical portions are within the threshold distance from each other.

19. The method of claim 18, wherein assigning the critical portions comprises:

based on certain criteria, selecting a shape from the identified group to assign the shape'"'"'s critical portions to one or two masks; and

repeating the selection of the shapes in the identified group until all critical portions of all shapes in the identified group of shapes are assigned to a mask.

20. The method of claim 19, wherein the certain criteria comprise (i) whether a shape has critical portions assigned to more than one mask, (ii) a number of critical portions in a shape, and (iii) whether at least one critical portion of a shape is assigned to a mask.

21. The method of claim 19 further comprising identifying a set of groups of critical portions.

22. The method of claim 21, wherein, in a group of critical portions, every critical portion is (i) within the threshold distance from a first critical portion that is within the threshold distance from a second critical portion or (ii) within the threshold distance from at least two other critical portions.

23. The method of claim 22 further comprising:

selecting a critical portion of the selected shape;

assigning the selected critical portion to a mask;

assigning each of the rest of the critical portions that are in the same group of critical portions as the selected critical portion to a mask such that no two critical portions in the group that are within the threshold distance from each other are assigned to the same mask; and

repeating selection of a critical portion and assignment of the selected critical portion to a mask until all critical portions of the selected shape are assigned to a mask.

24. The method of claim 23 further comprising assigning a first critical portion of the selected shape to a first mask when a second critical portion of the selected shape is adjacent, within the selected shape, to the first critical portion and is assigned to the first mask.

25. The method of claim 23 further comprising assigning all critical portions of the selected shape to a same mask when no critical portion of the selected shape is assigned to a mask.

26. A system comprising:

a processor for executing sets of instructions; and

a memory for storing a computer program for correcting a design rule violation in a circuit design layout including a plurality of shapes, the program comprising sets of instructions for;

identifying a double patterning loop formed by a set of shapes in the design layout, the double patterning loop representing a design rule violation;

identifying critical portions of the set of shapes, wherein a critical portion is a portion of a shape that is within a threshold distance from another shape;

assigning the critical portions of the set of shapes to a plurality of masks in a manner that reduces a number of cut graphs to be inserted in each shape of the set of shapes, the cut graphs for partitioning the shape into a plurality of segments so that at least two different segments of the shape are assignable to two different masks;

inserting cut graphs into the design based on the assignment of the critical portions of the set of shapes to the plurality of masks;

partitioning the shapes based on the inserted cut graphs; and

assigning, for each partitioned shape, at least two different partitions to two different masks, in order to resolve the design rule violation due to the double patterning loop.

27. The system of claim 26, wherein the program further comprises a set of instructions for identifying a group of shapes that includes the set of shapes.

28. The system of claim 27, wherein, in the identified group, every shape is (i) within the threshold distance from a first shape that is within the threshold distance from a second shape or (ii) within the threshold distance from at least two other shapes.

29. The system of claim 27, wherein the set of instructions for assigning the critical portions comprises sets of instructions for:

selecting, from the identified group, a shape that has at least one critical portion that is not assigned to a mask;

assigning to a mask all critical portions of the selected shape that are not assigned to a mask in a manner that reduces a number of instances in which critical portions, adjacent within the shape, are assigned to different masks; and

repeating the selection of the shapes of the identified group and the assignment of the critical portions to a mask until all critical portions of all shapes in the identified group are assigned to a mask..