Micromachined piezoelectric X-Axis gyroscope
First Claim
1. A gyroscope, comprising:
- a sense frame;
a proof mass disposed outside the sense frame;
a pair of anchors;
a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and configured to cause drive motions of the proof mass, the drive motions being torsional oscillations substantially in a first plane of the drive beams; and
a plurality of sense beams connecting the sense frame to the pair of anchors, each of the sense beams including a layer of piezoelectric sense electrodes configured to produce a piezoelectric charge in response to an angular rotation applied to the gyroscope,wherein the sense frame is substantially decoupled from the drive motions of the proof mass.
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Accused Products
Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.
92 Citations
19 Claims
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1. A gyroscope, comprising:
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a sense frame; a proof mass disposed outside the sense frame; a pair of anchors; a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and configured to cause drive motions of the proof mass, the drive motions being torsional oscillations substantially in a first plane of the drive beams; and a plurality of sense beams connecting the sense frame to the pair of anchors, each of the sense beams including a layer of piezoelectric sense electrodes configured to produce a piezoelectric charge in response to an angular rotation applied to the gyroscope, wherein the sense frame is substantially decoupled from the drive motions of the proof mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A gyroscope, comprising:
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sense frame means for oscillating when the gyroscope is operating in a sense mode; proof mass means for oscillating torsionally out of the first plane, in response to an applied angular rotation, together with the sense frame means, when the gyroscope is operating in the sense mode, the proof mass means disposed outside the sense frame means; a pair of anchors; a plurality of drive beam means for causing drive motions of the proof mass means, the drive beam means disposed on opposing sides of the sense frame means and between the pair of anchors, the drive beam means connecting the sense frame means to the proof mass means the drive motions being torsional oscillations substantially in a plane of the drive beam means; and sense beam means for connecting the sense frame means to the pair of anchors and for determining when the gyroscope is operating in the sense mode, wherein the sense frame means is configured to be substantially decoupled from the drive motions of the proof mass means. - View Dependent Claims (19)
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Specification