Micromachined piezoelectric z-axis gyroscope
First Claim
1. A gyroscope, comprising:
- a central anchor;
a sense frame disposed around the central anchor;
a plurality of sense beams configured for connecting the sense frame to the central anchor;
a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side;
pairs of drive beams disposed on opposing sides of the sense frame, the drive beams configured to drive the first side of the drive frame in a first direction along a first axis substantially in the plane of the drive frame, the drive beams being further configured to drive the second side of the drive frame in a second and opposing direction along the first axis;
a drive frame suspension configured to substantially restrict a drive motion of the drive frame to that of a substantially linear displacement along the first axis, wherein the drive frame suspension includes a plurality of flexures, each flexure of the plurality of flexures configured for coupling a pair of drive beams to the drive frame; and
a sense frame suspension configured to be compliant to rotation around a second axis orthogonal to the first axis, the sense frame suspension configured to resist translational motion along the first axis.
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Accused Products
Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
82 Citations
15 Claims
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1. A gyroscope, comprising:
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a central anchor; a sense frame disposed around the central anchor; a plurality of sense beams configured for connecting the sense frame to the central anchor; a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side; pairs of drive beams disposed on opposing sides of the sense frame, the drive beams configured to drive the first side of the drive frame in a first direction along a first axis substantially in the plane of the drive frame, the drive beams being further configured to drive the second side of the drive frame in a second and opposing direction along the first axis; a drive frame suspension configured to substantially restrict a drive motion of the drive frame to that of a substantially linear displacement along the first axis, wherein the drive frame suspension includes a plurality of flexures, each flexure of the plurality of flexures configured for coupling a pair of drive beams to the drive frame; and a sense frame suspension configured to be compliant to rotation around a second axis orthogonal to the first axis, the sense frame suspension configured to resist translational motion along the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A gyroscope, comprising:
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a central anchor; a sense frame disposed around the central anchor; sense beam means for detecting a sense motion of the gyroscope and for connecting the sense frame to the central anchor; a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side; drive means for driving the first side of the drive frame in a first direction along a first axis in the plane of the drive frame and for driving a second side of the drive frame in a second and opposing direction along the first axis, the drive means including pairs of drive beams disposed on opposing sides of the sense frame; drive frame suspension means for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis, wherein the drive frame suspension means includes a plurality of flexures, each flexure being configured for coupling a pair of drive beams to the drive frame; and sense frame suspension means for allowing rotation around a second axis orthogonal to the first axis and for resisting translational motion along the first axis. - View Dependent Claims (15)
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Specification