Acceleration sensor having substrate, web, and seismic mass

• US 8,516,890 B2
• Filed: 09/24/2008
• Issued: 08/27/2013
• Est. Priority Date: 10/05/2007
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Rehle, Dirk
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US12/680,715
• Publication Number:
  US 20100212423A1
• Time in Patent Office: 1,798 Days
• Field of Search: 735/143.2, 735/143.6, 735/143.8, 735/142.9, 735/141.6, 735/143.5
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

An acceleration sensor having a substrate, at least one web, and a seismic mass, the web and the seismic mass being situated over a plane of the substrate. The seismic mass is situated on at least two sides of the web and elastically suspended on the web. The web is anchored on the substrate with the aid of at least one anchor. At least one anchor is situated outside the center of gravity of the seismic mass.

Claims

1. An acceleration sensor having a substrate, at least one central web (1, 12, 13), one right web (2), and one left web (3), and a seismic mass (9),

the right web (2) and the left web (3) running parallel to the central web (1, 12, 13),

the central web (1, 12, 13) and the seismic mass (9) being situated over a plane of the substrate,

the seismic mass (9) being situated on at least two sides of the central web (1, 12, 13),

the seismic mass (9) being elastically suspended on the central web (1, 12, 13),

the central web (1, 12, 13) being anchored on the substrate with the aid of at least one anchor (41, 42),

wherein each of the at least one anchor (41, 42) is situated outside the center of gravity (10) of the seismic mass (9).

2. The acceleration sensor as recited in claim 1, wherein at least two anchors (41 and 42) are provided.

3. The acceleration sensor as recited in claim 2, wherein the center of gravity (10) is situated between the two anchors (41 and 42).

4. The acceleration sensor as recited in claim 1, wherein the seismic mass (9) surrounds the central web (1, 12, 13) in the shape of a ring.

5. The acceleration sensor as recited in claim 1, wherein the central web includes at least two central webs (12 and 13) provided on which the seismic mass (9) is elastically suspended.

6. The acceleration sensor as recited in claim 1, wherein two anchors are provided.

7. The acceleration sensor as recited in claim 6, wherein the center of gravity is situated between the two anchors.

8. The acceleration sensor as recited in claim 1, wherein only one anchor is provided and wherein the anchor is situated adjacent to the center of gravity such that the center of gravity does not run through the anchor.