Pressure sensor
First Claim
1. A sensor assembly, comprising:
- a metal substrate having a first side and a second side, with an aperture extending between the first side and the second side;
a glass substrate having a first side and a second side, with an aperture extending between the first side and the second side;
the first side of the metal substrate is fused to the second side of the glass substrate along a fusing surface to form a hermetic glass-to-metal seal, with the aperture in the glass substrate in fluid communication with the aperture in the metal substrate;
a sense die having a first side and a second side, the sense die defining a pressure sensitive diaphragm that has one or more sense elements mounted adjacent to the first side of the sense die; and
the second side of the sense die is bonded to the first side of the glass substrate with one of an anodic bond and a frit bond, with the aperture in the glass substrate in fluid communication with the diaphragm of the sense die.
1 Assignment
0 Petitions
Accused Products
Abstract
The present disclosure relates to pressure sensor assemblies and methods. The pressure sensor assembly may include a first substrate, a second substrate and a sense die. The first substrate may be connected to the second substrate, such that an aperture in the first substrate is in fluid communication with an aperture in the second substrate. The second substrate may be connected to the sense die, such that the aperture in the second substrate is in fluid communication with a sense diaphragm on the second substrate. The pressure sensor assembly may include a media path that extends through the aperture in the first substrate, through the aperture in the second substrate, and to the sense die. In some cases, the first substrate, the second substrate and the sense die may be connected in a manner that does not include an adhesive.
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Citations
13 Claims
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1. A sensor assembly, comprising:
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a metal substrate having a first side and a second side, with an aperture extending between the first side and the second side; a glass substrate having a first side and a second side, with an aperture extending between the first side and the second side; the first side of the metal substrate is fused to the second side of the glass substrate along a fusing surface to form a hermetic glass-to-metal seal, with the aperture in the glass substrate in fluid communication with the aperture in the metal substrate; a sense die having a first side and a second side, the sense die defining a pressure sensitive diaphragm that has one or more sense elements mounted adjacent to the first side of the sense die; and the second side of the sense die is bonded to the first side of the glass substrate with one of an anodic bond and a frit bond, with the aperture in the glass substrate in fluid communication with the diaphragm of the sense die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A sensor apparatus, comprising:
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a first substrate having a first side and a second side, with an aperture extending between the first side and the second side; a second substrate having a first side and a second side, with an aperture extending between the first side and the second side; a hermetic substrate-to-substrate fusion seal between the first side of the first substrate and the second side of the second substrate along a fusing surface, with the aperture in the second substrate in registration with the aperture in the first substrate; a sense die having a first side and a second side, the sense die having one or more sense elements; and the second side of the sense die is joined to the first side of the second substrate, with the aperture in the second substrate in fluid communication with the sense die; and wherein a media path extends through the aperture in the first substrate, through the aperture in the second substrate and in direct contact with the sense die. - View Dependent Claims (10, 11, 12, 13)
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Specification