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Pressure sensor

  • US 8,516,897 B1
  • Filed: 02/21/2012
  • Issued: 08/27/2013
  • Est. Priority Date: 02/21/2012
  • Status: Active Grant
First Claim
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1. A sensor assembly, comprising:

  • a metal substrate having a first side and a second side, with an aperture extending between the first side and the second side;

    a glass substrate having a first side and a second side, with an aperture extending between the first side and the second side;

    the first side of the metal substrate is fused to the second side of the glass substrate along a fusing surface to form a hermetic glass-to-metal seal, with the aperture in the glass substrate in fluid communication with the aperture in the metal substrate;

    a sense die having a first side and a second side, the sense die defining a pressure sensitive diaphragm that has one or more sense elements mounted adjacent to the first side of the sense die; and

    the second side of the sense die is bonded to the first side of the glass substrate with one of an anodic bond and a frit bond, with the aperture in the glass substrate in fluid communication with the diaphragm of the sense die.

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