×

Method of making ITO-coated article for use with electronic device

  • US 8,518,221 B2
  • Filed: 11/05/2012
  • Issued: 08/27/2013
  • Est. Priority Date: 11/18/2008
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of making a coated article for use in an electronic device, the method comprising:

  • sputtering a film comprising substantially sub-oxidized indium tin oxide (ITO) and/or metallic-mode indium-tin, directly or indirectly, on a glass substrate via a target comprising indium and tin, said sputtering being performed at or close to room temperature;

    heat treating the substrate with the film comprising substantially sub-oxidized ITO and/or metallic-mode indium-tin such that the substantially sub-oxidized ITO and/or metallic-mode indium-tin is transformed into a substantially transparent and electrically conductive crystalline resultant film comprising ITO, wherein the substantially transparent and electrically conductive crystalline resultant film comprising ITO is for use as a conductor in an electronic device.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×