Method of making ITO-coated article for use with electronic device
First Claim
1. A method of making a coated article for use in an electronic device, the method comprising:
- sputtering a film comprising substantially sub-oxidized indium tin oxide (ITO) and/or metallic-mode indium-tin, directly or indirectly, on a glass substrate via a target comprising indium and tin, said sputtering being performed at or close to room temperature;
heat treating the substrate with the film comprising substantially sub-oxidized ITO and/or metallic-mode indium-tin such that the substantially sub-oxidized ITO and/or metallic-mode indium-tin is transformed into a substantially transparent and electrically conductive crystalline resultant film comprising ITO, wherein the substantially transparent and electrically conductive crystalline resultant film comprising ITO is for use as a conductor in an electronic device.
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Accused Products
Abstract
Certain example embodiments of this invention relate to techniques for making a coated article including a transparent conductive indium-tin-oxide (ITO) film supported by a heat treated glass substrate. A substantially sub-oxidized ITO or metallic indium-tin (InSn) film is sputter-deposited onto a glass substrate at room temperature. The glass substrate with the as-deposited film thereon is subjected to elevated temperatures. Thermal tempering or heat strengthening causes the as-deposited film to be transformed into a crystalline transparent conductive ITO film. Advantageously, this may reduce the cost of touch panel assemblies, e.g., because of the higher rates of the ITO deposition in the metallic mode. The cost of touch-panel assemblies may be further reduced through the use of float glass.
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Citations
7 Claims
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1. A method of making a coated article for use in an electronic device, the method comprising:
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sputtering a film comprising substantially sub-oxidized indium tin oxide (ITO) and/or metallic-mode indium-tin, directly or indirectly, on a glass substrate via a target comprising indium and tin, said sputtering being performed at or close to room temperature; heat treating the substrate with the film comprising substantially sub-oxidized ITO and/or metallic-mode indium-tin such that the substantially sub-oxidized ITO and/or metallic-mode indium-tin is transformed into a substantially transparent and electrically conductive crystalline resultant film comprising ITO, wherein the substantially transparent and electrically conductive crystalline resultant film comprising ITO is for use as a conductor in an electronic device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification