Thin film encapsulation for thin film batteries and other devices
First Claim
Patent Images
1. An electrochemical device comprising:
- an environmentally sensitive layer; and
a thin encapsulation layer deposited over said sensitive layer, comprising a plurality of alternating metallic sub-layers and ceramic sub-layers,wherein at least one area of said thin encapsulation layer corresponding to the environmentally sensitive layer is selectively conductive and another area is insulating.
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Abstract
An electrochemical device is claimed and disclosed, including a method of manufacturing the same, comprising an environmentally sensitive material, such as, for example, a lithium anode; and a plurality of alternating thin metallic and ceramic, blocking sub-layers. The multiple metallic and ceramic, blocking sub-layers encapsulate the environmentally sensitive material. The device may include a stress modulating layer, such as for example, a Lipon layer between the environmentally sensitive material and the encapsulation layer.
812 Citations
27 Claims
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1. An electrochemical device comprising:
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an environmentally sensitive layer; and a thin encapsulation layer deposited over said sensitive layer, comprising a plurality of alternating metallic sub-layers and ceramic sub-layers, wherein at least one area of said thin encapsulation layer corresponding to the environmentally sensitive layer is selectively conductive and another area is insulating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An electrochemical device comprising:
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a cathode; an electrolyte deposited on said cathode; a soft, environmentally sensitive anode deposited on said electrolyte; a stress modulating layer deposited on said anode; and an encapsulation layer, comprising a plurality of alternating metallic and ceramic sub-layers, deposited on said modulating layer, wherein at least one area of said encapsulation layer corresponding to the anode is selectively conductive and another area is insulating.
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27. An electrochemical device comprising:
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a cathode greater than about 0.5 μ
m and less than about 200 μ
m thick;an electrolyte less than about 5 μ
m thick;an anode greater than about 0.1 μ
m and less than about 30 μ
m thick;a modulating layer; a plurality of alternating metallic and ceramic sub-layers, wherein each sub-layer is less than about 5 μ
m thick; andwherein at least one area of said plurality of alternating metallic and ceramic sub-layers corresponding to the anode is selectively conductive and another area is insulating.
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Specification