Polarization doping in nitride based diodes

• US 8,519,437 B2
• Filed: 09/14/2007
• Issued: 08/27/2013
• Est. Priority Date: 09/14/2007
• Status: Active Grant

• Current Assignee: Creeled Incorporated
• Original Assignee: CREE Incorporated (Wolfspeed, Inc.)
• Inventors: Chakraborty, Arpan
• Primary Examiner(s): Ho, Anthony
• Assistant Examiner(s): Chen, Yu
• Application Number:
  US11/900,952
• Publication Number:
  US 20090072254A1
• Time in Patent Office: 2,174 Days
• Field of Search: 257/94, 257/96, 257/97, 257/101, 257/102, 257/103, 257/190, 257/191, 257/E29.11, 257/E33.048, 257/E33.049
• US Class Current: 257/191
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 33/14 with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
• CPC Class Codes: H01L 33/32 containing nitrogen

Abstract

A light emitting device comprising a three-dimensional polarization-graded (3DPG) structure that improves lateral current spreading within the device without introducing additional dopant impurities in the epitaxial structures. The 3DPG structure can include a repeatable stack unit that may be repeated several times within the 3DPG. The stack unit includes a compositionally graded layer and a silicon (Si) delta-doped layer. The graded layer is compositionally graded over a distance from a first material to a second material, introducing a polarization-induced bulk charge into the structure. The Si delta-doped layer compensates for back-depletion of the electron gas at the interface of the graded layers and adjacent layers. The 3DPG facilitates lateral current spreading so that current is injected into the entire active region, increasing the number of radiative recombination events in the active region and improving the external quantum efficiency and the wall-plug efficiency of the device.

Claims

1. A light emitting device, comprising:

an n-type semiconductor layer;

a p-type semiconductor layer;

an active region interposed between said n-type layer and said p-type layer; and

a three-dimensional polarization-graded (3DPG) structure disposed on said n-type layer opposite said active region, said 3DPG structure comprising at least one repeatable stack unit, said 3DPG structure having a wurtzite crystal structure grown along the [0001]-crystal direction;

wherein said repeatable stack unit comprises;

a retrograded layer that is compositionally retrograded from a first material to a second material over a grading distance, said retrograded layer disposed proximate to said n-type layer such that said second material is closest to said n-type layer; and

a silicon (Si) delta-doped layer disposed adjacent to said retrograded layer opposite said n-type layer.

2. The light emitting device of claim 1, wherein said n-type semiconductor layer comprises n-GaN and is approximately 3 microns thick.

3. The light emitting device of claim 1, further comprising a p-contact disposed on said p-type layer opposite said active region.

4. The light emitting device of claim 1, further comprising an n-contact disposed on said 3DPG structure.

5. The light emitting device of claim 1, further comprising a n-contact and a p-contact that are accessible from the same side of said device, said n-contact disposed to provide an electrical connection to said 3DPG structure.

6. The light emitting device of claim 1, wherein said retrograded layer has a linear compositional grading.

7. The light emitting device of claim 1, wherein said retrograded layer has a nonlinear compositional grading.

8. The light emitting device of claim 1, said repeatable stack unit further comprising an n-type spacer layer disposed adjacent to said Si delta-doped layer opposite said retrograded layer.

9. The light emitting device of claim 8, wherein said n-type spacer layer is uniformly doped.

10. The light emitting device of claim 9, wherein said repeatable stack unit is repeated 15 to 20 times within said 3DPG structure.

11. The light emitting device of claim 9, wherein said retrograded layer is approximately 25 nm thick.

12. The light emitting device of claim 9, wherein said Si delta-doped layer is approximately 1 nm thick.

13. The light emitting device of claim 1, wherein said first material comprises indium gallium nitride of a first composition (In_xGa_1-xN) and said second material comprises indium gallium nitride of a second composition (In_yGa_1-yN), where x is greater than y and both x and y range between 0 and 1, inclusive.

14. The light emitting device of claim 13, wherein x equals 0.1 and y equals 0.

15. The light emitting device of claim 1, wherein said device is a polar nitride-based device.

16. The light emitting device of claim 1, wherein said device comprises a vertically conducting light emitting diode (LED).

17. The light emitting device of claim 1, wherein said device comprises a flip-chip LED.

18. The light emitting device of claim 1, wherein said n-type semiconductor layer comprises n-GaN and has a thickness of at least 500 angstroms.

19. A current spreading device, comprising:

a retrograded layer that is compositionally retrograded from a first material to a second material over a grading distance; and

a silicon (Si) delta-doped layer disposed adjacent to said retrograded layer, such that said first material is proximate to said Si delta-doped layer;

an n-type spacer layer disposed adjacent to said Si delta-doped layer opposite said retrograded layer such that said Si delta-doped layer is interposed between said retrograded layer and said spacer layer;

wherein said retrograded layer, said Si delta-doped layer, and said n-type spacer layer are arranged in a repeatable stack that is repeated 15-20 times within said current spreading device.

20. The current spreading device of claim 19, wherein said retrograded layer has a bulk three-dimensional polarization-induced background charge.

21. The current spreading device of claim 19, wherein said retrograded layer and said spacer layer both comprise n-type semiconductor materials.

22. The current spreading device of claim 19, wherein said first material comprises indium gallium nitride of a first composition (In_xGa_1-xN) and said second material comprises indium gallium nitride of a second composition (In_yGa_1-yN), where x is greater than y and both x and y range between 0 and 1, inclusive.

23. The current spreading device of claim 22, wherein x equals approximately 0.1 and y equals approximately 0.

24. The current spreading device of claim 19, wherein said retrograded layer is approximately 25 nm thick.

25. The current spreading device of claim 19, wherein said Si delta-doped layer is approximately 1 nm thick.

26. A semiconductor device, comprising:

a retrograded layer that is compositionally retrograded from a first material to a second material over a grading distance; and

a silicon (Si) delta-doped layer disposed adjacent to said graded layer, such that said first material is proximate to said Si delta-doped layer;

wherein said first material comprises indium gallium nitride of a first composition (In_xGa_1-xN) where x is approximately 0.1, and said second material comprises gallium nitride (GaN).

27. A semiconductor device, comprising:

multiple stack units, each said stack unit comprising;

a retrograded layer that is compositionally retrograded from a first material to a second material over a grading distance, said first material comprising a component material in a first percentage and said second material comprising a lower percentage of said component material than said first material;

a uniformly doped spacer layer; and

a delta-doped layer interposed between said retrograded layer and said uniformly doped spacer layer,

wherein said retrograded layer first material is directly adjacent to said delta-doped layer.

28. The semiconductor device of claim 27, wherein multiple repeatable stack units are arranged in a stack structure.

29. The semiconductor device of claim 27, wherein said retrograded layer has a bulk three-dimensional polarization-induced background charge.

31. The semiconductor device of claim 27, wherein said retrograde layer has a linear compositional grading to provide a uniform charge profile.

32. The semiconductor device of claim 27, wherein said retrograded layer has a nonlinear compositional grading to provide a non-uniform charge profile.

30. A semiconductor device, comprising:

multiple stack units, each said stack unit comprising;

a retrograded layer that is compositionally retrograded from a first material to a second material over a grading distance, said first material comprising a component material in a first percentage and said second material comprising a lower percentage of said component material than said first material;

a uniformly doped spacer layer, wherein said retrograded layer and said spacer layer both comprise n-type semiconductor materials; and

a delta-doped layer interposed between said retrograded layer and said uniformly doped spacer layer, wherein said retrograded layer first material is adjacent to said delta-doped layer.